本文選題：光學(xué)測(cè)量 + 斐索干涉��； 參考：《南京理工大學(xué)》2017年碩士論文

【摘要】：同步移相干涉測(cè)試技術(shù)是目前抗振效果最好的干涉測(cè)量手段,目前大多數(shù)同步移相方案采用了泰曼型結(jié)構(gòu)形式,而斐索型干涉儀由于其共光路的特點(diǎn),適用于檢測(cè)平面元件。目前已有的幾種斐索型結(jié)構(gòu)都不適合于長(zhǎng)干涉腔長(zhǎng)下的平面元件的測(cè)試,針對(duì)長(zhǎng)干涉腔長(zhǎng)的測(cè)試需求,提出一種新的同步移相干涉測(cè)試方案。以斐索型移相干涉儀的結(jié)構(gòu)為基礎(chǔ),采用四分之一波片作為參考鏡,得到一對(duì)正交偏振光。正交偏振光經(jīng)過棋盤相位光柵后形成不同衍射級(jí)次的光線,(±1,±1)級(jí)衍射光的衍射效率相同,通過特制的光闌選取這四束光線,使這四束光線先后通過相位延遲陣列和偏振片獲得4幅移相量依次為π/2的干涉圖。運(yùn)用瓊斯矩陣分析了基于四分之一波片的斐索型同步移相方案的原理。從干涉系統(tǒng)、分光系統(tǒng)、移相系統(tǒng)和數(shù)據(jù)采集系統(tǒng)幾個(gè)方面設(shè)計(jì)與研制了該方案的關(guān)鍵器件并搭建了實(shí)驗(yàn)裝置。對(duì)平面元件進(jìn)行了測(cè)量,將波面測(cè)量結(jié)果與ZYGO干涉儀的測(cè)量結(jié)果比較,得到面形的峰谷值相差0.004λ,均方根誤差值相差0.001λ。詳細(xì)討論了各個(gè)元器件所帶來的誤差,主要針對(duì)四分之一波片的移相量誤差、快軸位置誤差、偏振片方位角誤差、相位延遲陣列的移相誤差進(jìn)行了討論,得出整個(gè)裝置的系統(tǒng)誤差為λ/10。該方案相比泰曼型同步移相干涉測(cè)量方案可以簡(jiǎn)化系統(tǒng)結(jié)構(gòu),減小系統(tǒng)誤差,并且更易裝校,適合用于長(zhǎng)干涉腔長(zhǎng)下平面元件的測(cè)量,并且能有效減小干涉測(cè)量中振動(dòng)帶來的影響。
[Abstract]:The technique of synchronous phase shift interferometry is the best method to resist vibration at present. At present, most of the synchronous phase shifting schemes adopt the Tymanian structure, while the Fesso interferometer is suitable for detecting planar elements because of its common optical path. At present, several kinds of Fieso type structures are not suitable for the measurement of planar elements with long interference cavity length. A new synchronous phase shift interferometric testing scheme is proposed to meet the test requirements of long interference cavity length. A pair of orthogonal polarized light is obtained by using 1/4 wave plate as reference mirror on the basis of the structure of Fisso type phase-shifting interferometer. The diffraction efficiency of orthogonal polarized light with different diffraction order (鹵1, 鹵1) is the same after passing through the chessboard phase grating. The four beams are selected through a special aperture. Through the phase delay array and the polarizer, the four beams are used to obtain the interferogram with the phasor of 蟺 / 2 in turn. The principle of Fieso synchronous phase shift scheme based on 1/4 wave plate is analyzed by Jones matrix. The key devices of the scheme are designed and developed from the aspects of interference system, light splitting system, phase shifting system and data acquisition system. The plane element is measured. The difference of peak and valley value of plane shape is 0.004 位 and the difference of root mean square error is 0.001 位 by comparing the measured result of wave surface with that of ZYGO interferometer. The error caused by each component is discussed in detail. The phase shift error of 1/4 wave plate, the position error of fast axis, the azimuth error of polarizer and the phase shift error of phase delay array are discussed. It is concluded that the systematic error of the whole device is 位 / 10. The proposed scheme can simplify the structure of the system, reduce the system error, and be easier to fit and calibrate, compared with the Tyman synchronous phase shift interferometry. It is suitable for the measurement of plane elements with long interference cavity length. And it can effectively reduce the effect of vibration in interferometry.
【學(xué)位授予單位】：南京理工大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2017
【分類號(hào)】：O436.1

【相似文獻(xiàn)】

相關(guān)期刊論文 前4條

1 戈華;斐索拖曳實(shí)驗(yàn)結(jié)果的正確解釋[J];集寧師專學(xué)報(bào);1999年04期

2 孫曉紅,明海,白明,張國(guó)平,吳云霞,劉e，

本文編號(hào)：2014769