本文選題：氦氖激光陀螺儀 + 銦封接��； 參考：《合肥工業(yè)大學(xué)》2017年碩士論文

【摘要】：氦氖激光陀螺儀電極銦封接技術(shù)是維持微晶諧振腔真空環(huán)境的關(guān)鍵技術(shù)之一。本文以氦氖激光陀螺儀電極銦封接結(jié)構(gòu)為研究對(duì)象,分析其殘余應(yīng)力和溫度對(duì)封接疲勞失效的影響,設(shè)計(jì)了氦氖激光陀螺儀電極銦封接系統(tǒng)。主要內(nèi)容如下:基于彈塑性力學(xué)理論,分析了封接界面殘余應(yīng)力與撓度的關(guān)系,依據(jù)高等傳熱學(xué)理論,研究了封接過(guò)程中熱量傳遞方式,得出了溫度變化規(guī)律;構(gòu)建激光陀螺儀電極-腔體銦封接結(jié)構(gòu)的數(shù)學(xué)和物理模型,并依據(jù)封接過(guò)程確定求解邊界條件,對(duì)銦封接結(jié)構(gòu)殘余應(yīng)力進(jìn)行理論計(jì)算和數(shù)值分析,獲得了銦封接結(jié)構(gòu)軸向、周向以及切向殘余應(yīng)力的變化規(guī)律;分析了銦絲環(huán)直徑、銦合金化學(xué)計(jì)量比對(duì)銦封接殘余應(yīng)力的影響,優(yōu)化了封接工藝參數(shù),提高了諧振腔真空銦封接性能及封接強(qiáng)度,為激光陀螺儀電極熱壓銦封接系統(tǒng)后續(xù)設(shè)計(jì)提供了工藝參數(shù)與理論基礎(chǔ)。依據(jù)黏塑性流體方程與損傷演化理論,選用Anand黏塑性模型進(jìn)行疲勞分析;根據(jù)幾何對(duì)稱性與載荷對(duì)稱性簡(jiǎn)化銦封接結(jié)構(gòu),構(gòu)建了二維有限元模型并給出邊界條件及黏塑性參數(shù);基于構(gòu)建的有限元模型,分析循環(huán)溫度工況下銦封接結(jié)構(gòu)的疲勞失效問(wèn)題,獲得其失效趨勢(shì),依據(jù)塑性應(yīng)變累積效應(yīng)確定了危險(xiǎn)節(jié)點(diǎn),并對(duì)應(yīng)力滯回環(huán)與溫度棘輪出現(xiàn)的根本原因進(jìn)行了分析�；谇笆鲢煼饨幽Ｐ偷墓に噮�(shù)、尺寸特征及封接技術(shù)難點(diǎn),以提高加工效率為目的,確定了銦封接系統(tǒng)總體架構(gòu),研究了以下幾方面內(nèi)容:從封裝夾具出發(fā),確定了最優(yōu)定位點(diǎn)分布,實(shí)現(xiàn)了封接狀態(tài)中腔體的力閉合裝夾,并對(duì)裝夾可靠性進(jìn)行了分析;從機(jī)身結(jié)構(gòu)出發(fā),對(duì)比了開(kāi)式、閉式、半開(kāi)式機(jī)身性能,選用了輕量化的半開(kāi)式機(jī)身,設(shè)計(jì)了流水線嵌入式機(jī)身結(jié)構(gòu),并分析其最大角變形驗(yàn)證了機(jī)身可靠性;從熱壓機(jī)構(gòu)出發(fā),針對(duì)陰陽(yáng)極特征差異分析了壓力與熱量傳遞方式,比對(duì)了不同原理的作業(yè)平臺(tái),并根據(jù)型面特征設(shè)計(jì)了真空夾緊系統(tǒng);從力熱測(cè)量出發(fā),設(shè)計(jì)了帶有溫度補(bǔ)償單元的壓力傳感器系統(tǒng),構(gòu)建了溫度傳感器控制系統(tǒng),確定了位移傳感器的位置分布并采用機(jī)器視覺(jué)建立準(zhǔn)直檢測(cè)系統(tǒng)。綜合上述設(shè)計(jì),搭建了氦氖激光陀螺儀電極銦封接系統(tǒng)的總體結(jié)構(gòu)。
[Abstract]:The indium sealing technology of He-Ne laser gyroscope electrode is one of the key technologies to maintain the vacuum environment of microcrystal resonator. In this paper, the indium sealing structure of He-Ne laser gyroscope electrode is studied, the influence of residual stress and temperature on sealing fatigue failure is analyzed, and the indium sealing system of He-Ne laser gyroscope electrode is designed. The main contents are as follows: based on the theory of elastoplastic mechanics, the relationship between residual stress and deflection of sealing interface is analyzed. According to the theory of higher heat transfer, the heat transfer mode in sealing process is studied, and the law of temperature change is obtained. The mathematical and physical model of indium sealing structure of laser gyroscope electrode cavity was constructed. The residual stress of indium sealing structure was calculated and numerically analyzed according to the boundary conditions determined by the sealing process, and the axial direction of indium sealing structure was obtained. The influence of the diameter of indium wire ring and the stoichiometric ratio of indium alloy on the residual stress of indium sealing is analyzed, the sealing process parameters are optimized, and the vacuum indium sealing performance and sealing strength of the resonator are improved. It provides the technological parameters and theoretical basis for the subsequent design of the hot pressing indium sealing system of laser gyroscope electrode. According to the viscoplastic fluid equation and damage evolution theory, the Anand viscoplastic model is selected for fatigue analysis, the Indium sealing structure is simplified according to geometric symmetry and load symmetry, the two-dimensional finite element model is constructed and the boundary conditions and viscoplastic parameters are given. Based on the established finite element model, the fatigue failure problem of indium sealing structure under cyclic temperature is analyzed, and the failure trend is obtained. The dangerous joints are determined according to the cumulative plastic strain effect. The fundamental causes of stress hysteresis loop and temperature ratchet are analyzed. Based on the process parameters, dimension characteristics and sealing technology difficulties of the indium sealing model, the overall structure of indium sealing system is determined in order to improve the processing efficiency. The following aspects are studied: starting from the packaging fixture, The optimal location point distribution is determined, the force closed clamping of the cavity in the sealing state is realized, and the reliability of the clamping is analyzed, and the performance of the open, closed and semi-open fuselage is compared from the fuselage structure. The structure of pipeline embedded fuselage is designed, and the reliability of the fuselage is verified by analyzing the maximum angular deformation of the fuselage, and the pressure and heat transfer mode are analyzed according to the difference of the characteristics of cathode and anode from the hot pressing mechanism, and the reliability of the fuselage is verified by analyzing the maximum angular deformation of the fuselage. The vacuum clamping system is designed according to the characteristics of the profile, the pressure sensor system with temperature compensation unit is designed from the point of view of force and heat measurement, and the temperature sensor control system is constructed. The position distribution of displacement sensor is determined and the collimation detection system is established by machine vision. The overall structure of indium sealing system for He-Ne laser gyroscope electrode is built.
【學(xué)位授予單位】：合肥工業(yè)大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2017
【分類號(hào)】：TN96

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