【摘要】：線鋸和進(jìn)給系統(tǒng)是金剛石線鋸切割機(jī)最重要的兩個(gè)部件。線鋸作為線鋸切割機(jī)的刀具,其動(dòng)態(tài)特性直接影響著晶片的表面粗糙度和損傷層的大小;金剛石線鋸切割機(jī)進(jìn)給系統(tǒng)的動(dòng)態(tài)特性直接影響機(jī)床的加工質(zhì)量和效率。因此,本文通過理論建模、有限元分析及動(dòng)態(tài)特性實(shí)驗(yàn)相結(jié)合的方法分析了線鋸和進(jìn)給系統(tǒng)的動(dòng)力學(xué)特性,研究?jī)?nèi)容主要包括:建立了線鋸的有限元模型,分析了不同張緊力下線鋸的固有頻率,自由模態(tài)實(shí)驗(yàn)顯示前3階固有頻率誤差在5%以內(nèi),從而驗(yàn)證了有限元模型的正確性;在自由模態(tài)模型的基礎(chǔ)上完成了線鋸工作模態(tài)的分析與實(shí)驗(yàn)驗(yàn)證,結(jié)果顯示,切削參數(shù)不變時(shí),線鋸張力越大其第1階工作模態(tài)越大�；诙杂啥壤碚摻⒘私饎偸�鋸切割機(jī)進(jìn)給系統(tǒng)的動(dòng)力學(xué)方程,通過經(jīng)驗(yàn)公式分別確定了軸向上絲杠、軸承與絲杠結(jié)合面、絲杠與螺母結(jié)合面的等效剛度以及側(cè)向上導(dǎo)軌與滑塊結(jié)合面的等效剛度,進(jìn)而確定出進(jìn)給系統(tǒng)前4階固有頻率解析值,為進(jìn)給系統(tǒng)參數(shù)化建模與變動(dòng)態(tài)特性研究奠定了分析基礎(chǔ);建立了進(jìn)給系統(tǒng)考慮結(jié)合面和不考慮結(jié)合面時(shí)的有限元分析模型,完成了相應(yīng)的模態(tài)分析與諧響應(yīng)分析,進(jìn)給系統(tǒng)模態(tài)實(shí)驗(yàn)顯示考慮結(jié)合面的進(jìn)給系統(tǒng)有限元模型更精確,因此,研究線鋸切割機(jī)涉及的結(jié)合面特性是必要的。最后,為了完善金剛石線鋸切割機(jī)進(jìn)給系統(tǒng)的有限元模型進(jìn)而實(shí)現(xiàn)整機(jī)系統(tǒng)的動(dòng)力學(xué)特性分析,設(shè)計(jì)了結(jié)合面特性研究的實(shí)驗(yàn)平臺(tái),并對(duì)其進(jìn)行了強(qiáng)度校核,驗(yàn)證了實(shí)驗(yàn)平臺(tái)設(shè)計(jì)的合理性。
[Abstract]:Wire saw and feed system are the two most important parts of diamond wire saw cutting machine. As the cutting tool of wire sawing machine, the dynamic characteristics of wire saw directly affect the surface roughness and damage layer of the wafer, and the dynamic characteristics of the feed system of diamond wire saw cutting machine directly affect the machining quality and efficiency of the machine tool. Therefore, the dynamic characteristics of wire saw and feed system are analyzed by the methods of theoretical modeling, finite element analysis and dynamic characteristic experiment. The main research contents are as follows: the finite element model of wire saw is established. The natural frequencies of wire saws under different tension forces are analyzed. The free mode experiments show that the error of the first three natural frequencies is less than 5%, which verifies the correctness of the finite element model. Based on the free mode model, the working modes of wire saws are analyzed and verified by experiments. The results show that the higher the tension of wire saws is, the greater the first working mode of wire saws is when the cutting parameters are not changed. Based on the theory of two degrees of freedom, the dynamic equations of the feed system of diamond wire sawing machine are established. The equivalent stiffness of the joint surface of the screw and nut and the equivalent stiffness of the lateral upper guideway and the slider are determined, and the analytical values of the first four natural frequencies of the feed system are determined. It lays an analytical foundation for parametric modeling and variable dynamic characteristics of feed system. The finite element analysis model of the feed system with and without the joint surface is established, and the corresponding modal analysis and harmonic response analysis are completed. The modal experiment of the feed system shows that the finite element model of the feed system considering the combined surface is more accurate. Therefore, it is necessary to study the characteristics of the joint surface involved in the wire saw cutting machine. Finally, in order to perfect the finite element model of the feed system of diamond wire sawing machine and realize the dynamic characteristic analysis of the whole machine system, an experimental platform for the study of the characteristics of the interface is designed, and its strength is checked. The rationality of the design of the experimental platform is verified.
【學(xué)位授予單位】：西安理工大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2017
【分類號(hào)】：TG48

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