本文選題：薄膜 + 硅酸鋯�。� 參考：《無機材料學(xué)報》2017年11期

【摘要】：采用乙酸鋯和正硅酸乙酯為原料,硅烷偶聯(lián)劑3-氨丙基三乙氧基硅(APTES)為表面改性劑,通過溶膠-凝膠法制備了致密硅酸鋯薄膜。系統(tǒng)研究了APTES的添加對硅酸鋯薄膜的晶體結(jié)構(gòu)、顯微形貌及其抗氧化性能的影響。實驗結(jié)果表明,添加硅酸鋯摩爾濃度10mol%的APTES可以制備出純相的致密硅酸鋯薄膜,超過這一濃度則會出現(xiàn)少量的SiO_2雜質(zhì),同時造成硅酸鋯溶膠的黏度迅速升高。AFM測試結(jié)果表明添加APTES制備的薄膜更致密平滑。1300℃抗氧化測試102 h后,未鍍膜的碳化硅基底增重0.16%,相比之下,添加APTES前后的樣品的增重分別為0.08%和0.03%,說明添加APTES有利于提高ZrSiO_4薄膜的致密度,進而提高其抗氧化性能。
[Abstract]:The dense zirconium silicate thin films were prepared by sol-gel method using zirconium acetate and ethyl orthosilicate as raw materials and silane coupling agent 3-aminopropyl triethoxysilane (APTES) as surface modifier. The effects of APTES addition on the crystal structure, micromorphology and oxidation resistance of zirconium silicate thin films were studied. The experimental results show that dense zirconium silicate thin films with pure phase can be prepared by adding 10 mol% zirconium silicate molar concentration of APTES, and a small amount of SiO_2 impurities will appear when the concentration exceeds this concentration. At the same time, the viscosity of zirconium silicate sol increased rapidly. The results of AFM test showed that the film prepared by adding APTES was denser and smoother at 1300 鈩，

本文編號：1948551