本文選題：AlN粉體 + 酸洗提純��； 參考：《硅酸鹽通報》2017年11期

【摘要】：氮化鋁(AlN)粉體中的金屬雜質(zhì)與氧化是影響其純度和性能發(fā)揮的主要因素,而酸洗是提純AlN粉體的有效手段。實驗采用磷酸(H_3PO_4)、硝酸(HNO_3)、氫氟酸(HF)和鹽酸(HCl)對AlN粉體進(jìn)行酸洗提純,主要研究了酸洗過程中酸液的選擇與配比對提純效果的影響。實驗結(jié)果表明:這四種酸均顯著降低了AlN粉體表面的金屬雜質(zhì)含量,而HF和HNO_3的混合酸具有更好的提純效果,特別能降低其中的Na、W、Fe等金屬雜質(zhì),而且還可通過HF與Al_2O_3的反應(yīng)有效去除氧雜質(zhì)。HF/HNO_3酸液的適宜配比為HF∶HNO_3=2∶1,在該條件下酸洗后的AlN粉體中,金屬雜質(zhì)含量均下降到100 ppm以下,氧含量僅為1.2wt%。
[Abstract]:The metal impurity and oxidation in AlN powder are the main factors that affect the purity and properties of AlN powder, and acid pickling is an effective way to purify AlN powder. The AlN powder was purified by using H3PO4, HNO3, HFH and HCl. The effects of the selection of acid solution and the proportion of acid on the purification effect were studied. The experimental results show that the metal impurity content on the surface of AlN powder is significantly reduced by these four acids, while the mixed acid of HF and HNO_3 has better purification effect, especially the metal impurities such as NaHW Fe can be reduced. In addition, the suitable ratio of HF / HNO3 acid solution can be removed effectively by the reaction of HF and Al_2O_3. The optimum ratio of HNO3 / HNO3 acid solution is HF1 HNO3 / 1. Under this condition, the content of metal impurity in AlN powder after acid washing is decreased to less than 100 ppm, and the oxygen content is only 1.2 wt.
【作者單位】： 武漢理工大學(xué)材料復(fù)合新技術(shù)國家重點實驗室;
【分類號】：TB383.3;TQ133.1

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