本文選題：磁控濺射 + 雙截止鍍膜��； 參考：《海南大學(xué)》2017年碩士論文

【摘要】：環(huán)境惡化的問題隨著人類的發(fā)展日益凸顯,臭氧層破壞,能源短缺問題也隨之加劇,普通玻璃使大量太陽輻射進入室內(nèi),其紅外輻射使室溫升高,增加空調(diào)系統(tǒng)能耗,紫外輻射使物品加速老化,傷害人體。因而人們希望玻璃能透過可見光的同時阻隔掉紫外和紅外輻射,所以能夠?qū)崿F(xiàn)反射紅外輻射同時阻隔紫外線的玻璃是建筑玻璃發(fā)展的必然趨勢,也引起廣大研究者的關(guān)注。目前國內(nèi)多功能玻璃多數(shù)采用貼膜方式生產(chǎn)來實現(xiàn)其功能性,其成本高昂,且易老化、不耐磨,不利于產(chǎn)品的普及應(yīng)用。本文在正交實驗設(shè)計的基礎(chǔ)上,采用反應(yīng)磁控共濺射的方法,以鈰、錫純金屬靶作為粒子源,分別以氬氣和氧氣作為工作氣體和反應(yīng)氣體,研究了鈰(Ce)靶濺射功率、錫(Sn)靶濺射功率、工作氣體流量、氬氧流量比、工作氣壓五個因素對薄膜紫外防護性能及可見光透過性能的影響。制備了 Ce-Sn-O防紫外薄膜,獲得了優(yōu)異的紫外防護性能,且保持了較高的可見光透過率,能夠保證日常采光。其紫外光透過為僅為2.33%,可見光透過率仍保持在80%以上。通過控制變量的方法研究了氬氧流量比和錫(Sn)靶濺射功率對薄膜微觀結(jié)構(gòu)及光學(xué)性能的影響,并利用掃描電子顯微鏡(SEM)、X射線衍射(XRD)、透射電子顯微鏡(TEM)和X射線光電子能譜(XPS)等測試手段對薄膜的結(jié)構(gòu)、表面形貌及成分進行分析和表征。采用在正交試驗中獲得的最優(yōu)水平組合為工藝參數(shù),以自制FTO玻璃為濺射襯底,制備了 Ce-Sn-O/FTO復(fù)合雙截止鍍膜玻璃。獲得了較好的紅外紫外截止性能,通過對其光學(xué)性能的研究發(fā)現(xiàn)復(fù)合薄膜的紫外及可見光透過率取決于在此波段透過率較低的膜層的性能。此外,對比研究了 FTO薄膜和Ce-Sn-O/FTO復(fù)合薄膜的結(jié)合力性能。將FTO膜作為底膜,Ce-Sn-O膜作為頂膜能有效的提高FTO膜的耐刮擦性能,獲得了具有優(yōu)異實用性的紅外紫外雙截止玻璃。玻璃。能夠反射90%以上的紅外輻射,可見光透過率為71.38%,紫外光透過率為5.1%。
[Abstract]:With the development of human beings, the problem of environmental deterioration is becoming more and more prominent, the ozone layer is destroyed, and the energy shortage is aggravated. Ordinary glass makes a large amount of solar radiation into the room, and the infrared radiation increases the room temperature and increases the energy consumption of air conditioning system. Ultraviolet radiation accelerates the aging of objects and harms the human body. Therefore, people hope that glass can block ultraviolet and infrared radiation while passing through visible light, so the glass which can reflect infrared radiation and block ultraviolet radiation is the inevitable trend of the development of building glass, and it has also attracted the attention of researchers. At present, the multifunctional glass is produced by film sticking method in our country, which is costly, easy to aging and not wear-resistant, which is not conducive to the popularization and application of products. On the basis of orthogonal experimental design, the sputtering power of cerium target was studied by reactive magnetron co-sputtering method, using cerium and tin pure metal target as particle source, argon and oxygen as working gas and reaction gas, respectively. The effects of sputtering power, working gas flow rate, argon / oxygen flow ratio and working pressure on the UV protection and visible light transmission of the thin films were investigated. The Ce-Sn-O anti-UV film was prepared, and the excellent UV protection performance was obtained, and the high visible light transmittance was maintained, which can guarantee the daily lighting. The UV transmittance is only 2.33 and the visible light transmittance remains above 80%. The effects of argon / oxygen flow ratio and sputtering power on the microstructure and optical properties of the films were investigated by means of variable control. The structure, surface morphology and composition of the films were characterized by means of scanning electron microscopy (SEM), transmission electron microscopy (TEM) and X-ray photoelectron spectroscopy (XPS). Using the optimum horizontal combination obtained in the orthogonal experiment as the technological parameter, the Ce-Sn-O/FTO composite double-cut coating glass was prepared by using self-made FTO glass as sputtering substrate. The optical properties of the composite films are studied. It is found that the UV and visible transmittance of the composite films depend on the properties of the films with low transmittance in this band. In addition, the adhesion properties of FTO films and Ce-Sn-O/FTO composite films were compared and studied. Ce-Sn-O film with FTO as base film can effectively improve the scratch resistance of FTO film and obtain infrared UV double cut glass with excellent practicability. Glass. The infrared radiation can reflect more than 90% of the infrared radiation, the transmittance of visible light is 71.38 and the transmittance of ultraviolet light is 5.1.
【學(xué)位授予單位】：海南大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2017
【分類號】：TQ171.724

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