PyroMEMS安保機構的設計、制備與作動性能研究
發(fā)布時間：2018-10-31 08:24
【摘要】：PyroMEMS(Pyrotechnical Micro Electrical Mechanical System)是一種基于 MEMS技術,裝載固體含能材料作為功能燃料的微型火工煙火裝置。PyroMEMS安保機構是一種以含能材料的燃燒分解為動力源來解除保險的安保裝置。本文設計并制備了基于PyroMEMS微驅動器和固態(tài)雙懸臂梁安保滑塊的PyroMEMS安保機構,其主要特點在于不需要使用慣性力解保,實現了安�；瑝K的較大位移,且可以實現一體化批量制作。論文的主要研究內容及結果如下:(1)采用精密雕刻的方法制備了以PMMA(有機玻璃)為基材的固態(tài)雙懸臂梁安�；瑝K;采用等離子體干法刻蝕的方法制備了以硅為基材的固態(tài)雙懸臂梁安保滑塊。(2)設計制備的PyroMEMS微驅動器主要包括三個組成部分:換能元、微點火藥和氣體發(fā)生劑。點火藥選用配比為90:10的硅鉛丹點火藥,粘結劑選用硝化棉,溶劑選用乙酸丁酯。利用噴墨沉積的方式對微點火藥進行裝藥,并對含能油墨進行燃燒性能表征。研究了鎳鉻橋絲、SCB(半導體橋)及MSCB(微型半導體橋)三種換能元針對硅鉛丹點火藥的發(fā)火性能。(3)通過理論計算和實驗,對比研究了NaN_3/Fe_2O_3和C_6H_2(N_O2)_3OK/KClO_4兩種氣體發(fā)生劑的爆溫、爆熱和產氣量。研究發(fā)現兩種氣體發(fā)生劑的產氣量幾乎相同,但C_6H_2(N_O2)_3OK/KClO_4 的爆溫和爆熱均遠大于 NaN_3/Fe_2O_3,C_6H_2(N_O2)_3OK/KClO_4 的做功能力更強。(4)通過ABAQUS模擬軟件對安�；瑝K的作動性能和沿滑塊運動方向的過載能力進行了模擬仿真,得出硅基PyroMEMS安保機構的綜合性能優(yōu)于PMMA。PyroMEMS安保機構固態(tài)雙懸臂梁的長寬比越小,其承受的最大氣室壓強越高,抗過載能力越強。由PyroMEMS安保機構作動性能的實驗與模擬結果獲得,當雙懸臂梁的尺寸為長×寬=300μm×300μm時,安保機構最大可承受463.62m/s~2的過載,并可以順利完成解保。通過本論文的研究,掌握了PyroMEMS安保機構的設計與制備方法,獲得了PyroMEMS安保機構各組件設計參數對作動性能的影響規(guī)律,為開發(fā)擁有自主知識產權的安保機構提供了理論和技術參考。
[Abstract]:PyroMEMS (Pyrotechnical Micro Electrical Mechanical System) is a miniature pyrotechnic device with solid energetic materials as its functional fuel based on MEMS technology. PyroMEMS security device is a kind of security device which uses the burning of energetic materials as the power source to remove the safety. In this paper, the PyroMEMS security mechanism based on PyroMEMS microactuator and solid double cantilever beam security slider is designed and fabricated. The main feature of the mechanism is that the large displacement of the security slider can be realized without the use of inertial force, and the integrated batch production can be realized. The main research contents and results are as follows: (1) the solid double cantilever security slider based on PMMA (plexiglass) is fabricated by precision engraving; A solid double cantilever beam security slider based on silicon was prepared by plasma dry etching. (2) the PyroMEMS microactuator is composed of three components: energy transfer element, micro-ignition powder and gas generator. The ratio of ignition powder is 90:10, the binder is nitrified cotton, and the solvent is butyl acetate. Ink-jet deposition was used to charge micro-ignition powder and the burning performance of energetic ink was characterized. The ignition properties of three kinds of energy transfer elements (, SCB () and MSCB (miniature semiconductor bridge) for silicon-lead powder were studied. (3) by theoretical calculation and experiment, The explosion temperature, heat of explosion and gas production of NaN_3/Fe_2O_3 and C_6H_2 (N_O2) _ 3OK/KClO_4 were studied. It was found that the gas production of C_6H_2 (N_O2) _ 3OK/KClO_4 was almost the same, but that of C_6H_2 (N_O2) _ 3OK/KClO_4 was much higher than that of NaN_3/Fe_2O_3,. C_6H_2 (N_O2) _ 3OK/KClO_4 has stronger work ability. (4) the actuation performance of the security slider and the overload ability along the sliding direction are simulated by the ABAQUS simulation software. It is concluded that the smaller the aspect ratio of the solid-state double cantilever beam, the higher the maximum chamber pressure and the stronger the overload resistance of silicon-based PyroMEMS security mechanism. Based on the experimental and simulation results of the actuation performance of the PyroMEMS security apparatus, when the size of the double cantilever beam is 300 渭 m 脳 300 渭 m, the maximum overload of the 463.62m/s~2 can be withstood by the security apparatus, and the decommissioning can be completed successfully. Through the research of this thesis, we master the design and preparation method of PyroMEMS security apparatus, and obtain the law of the influence of the design parameters of each component of PyroMEMS security mechanism on the actuation performance. It provides a theoretical and technical reference for the development of security institutions with independent intellectual property rights.
【學位授予單位】：南京理工大學
【學位級別】：碩士
【學位授予年份】：2017
【分類號】：TJ450.3
本文編號：2301503
[Abstract]:PyroMEMS (Pyrotechnical Micro Electrical Mechanical System) is a miniature pyrotechnic device with solid energetic materials as its functional fuel based on MEMS technology. PyroMEMS security device is a kind of security device which uses the burning of energetic materials as the power source to remove the safety. In this paper, the PyroMEMS security mechanism based on PyroMEMS microactuator and solid double cantilever beam security slider is designed and fabricated. The main feature of the mechanism is that the large displacement of the security slider can be realized without the use of inertial force, and the integrated batch production can be realized. The main research contents and results are as follows: (1) the solid double cantilever security slider based on PMMA (plexiglass) is fabricated by precision engraving; A solid double cantilever beam security slider based on silicon was prepared by plasma dry etching. (2) the PyroMEMS microactuator is composed of three components: energy transfer element, micro-ignition powder and gas generator. The ratio of ignition powder is 90:10, the binder is nitrified cotton, and the solvent is butyl acetate. Ink-jet deposition was used to charge micro-ignition powder and the burning performance of energetic ink was characterized. The ignition properties of three kinds of energy transfer elements (, SCB () and MSCB (miniature semiconductor bridge) for silicon-lead powder were studied. (3) by theoretical calculation and experiment, The explosion temperature, heat of explosion and gas production of NaN_3/Fe_2O_3 and C_6H_2 (N_O2) _ 3OK/KClO_4 were studied. It was found that the gas production of C_6H_2 (N_O2) _ 3OK/KClO_4 was almost the same, but that of C_6H_2 (N_O2) _ 3OK/KClO_4 was much higher than that of NaN_3/Fe_2O_3,. C_6H_2 (N_O2) _ 3OK/KClO_4 has stronger work ability. (4) the actuation performance of the security slider and the overload ability along the sliding direction are simulated by the ABAQUS simulation software. It is concluded that the smaller the aspect ratio of the solid-state double cantilever beam, the higher the maximum chamber pressure and the stronger the overload resistance of silicon-based PyroMEMS security mechanism. Based on the experimental and simulation results of the actuation performance of the PyroMEMS security apparatus, when the size of the double cantilever beam is 300 渭 m 脳 300 渭 m, the maximum overload of the 463.62m/s~2 can be withstood by the security apparatus, and the decommissioning can be completed successfully. Through the research of this thesis, we master the design and preparation method of PyroMEMS security apparatus, and obtain the law of the influence of the design parameters of each component of PyroMEMS security mechanism on the actuation performance. It provides a theoretical and technical reference for the development of security institutions with independent intellectual property rights.
【學位授予單位】：南京理工大學
【學位級別】：碩士
【學位授予年份】：2017
【分類號】：TJ450.3
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