【摘要】：隨著薄膜被越來越廣泛的使用,人們對薄膜的性能與功能提出了新的要求,對薄膜的研究工作也在隨著這些要求的不斷出現(xiàn)而日趨深化。雕塑薄膜由于它的微觀可控性,使得它擁有廣闊的運(yùn)用前景。 本文先從普通薄膜生長理論出發(fā),分析薄膜的微觀結(jié)構(gòu),說明雕塑薄膜生長時與常規(guī)薄膜的不同之處,從而分析雕塑薄膜的微觀結(jié)構(gòu)及其成因。將雕塑薄膜類比于光學(xué)晶體材料,并考慮雕塑薄膜的特殊性,建立適用于雕塑薄膜的等效折射率模型,推導(dǎo)出適合計算單層雕塑薄膜光學(xué)常數(shù)的公式。在普魯泰鍍膜機(jī)上,分別以65°、70°、75°、80°、85°的沉積角鍍制Ti02和Si02薄膜,通過光譜分析,得出不同的工藝參數(shù)對這些薄膜的折射率和厚度的影響。用橢偏儀分析雕塑薄膜的各向異性,并通過建模擬合,表征雕塑薄膜的微觀結(jié)構(gòu)。用橢偏測量結(jié)果檢驗前面建立起的等效折射率模型,分析結(jié)果,并指出本課題實(shí)驗結(jié)果不足之處,對雕塑薄膜的前景進(jìn)行展望。
[Abstract]:With the more and more extensive use of thin films, people put forward new requirements for the properties and functions of thin films, and the research work on thin films is deepening with the continuous emergence of these requirements. Because of its microcosmic controllability, sculpture film has a broad application prospect. In this paper, based on the theory of ordinary thin film growth, the microstructure of sculpture film is analyzed, and the difference between sculpture film growth and conventional film growth is explained, so as to analyze the microstructure and cause of formation of sculpture film. The sculpture film is compared to the optical crystal material, and considering the particularity of the sculpture film, the equivalent refractive index model suitable for the sculpture film is established, and the formula suitable for calculating the optical constant of the single layer sculpture film is derived. Ti02 and Si02 thin films were deposited at 65 擄, 70 擄, 75 擄, 80 擄and 85 擄deposition angles on Prutai coating machine. the effects of different process parameters on the refractive index and thickness of these films were obtained by spectral analysis. The anisotropy of sculpture film was analyzed by ellipsometer, and the microstructure of sculpture film was characterized by simulation. The equivalent refractive index model established earlier is tested by ellipsometric measurement results, the results are analyzed, and the shortcomings of the experimental results in this subject are pointed out, and the prospect of sculptural thin films is prospected.
【學(xué)位授予單位】：南京理工大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2013
【分類號】：O484.1

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本文編號：2501984