【摘要】：同步移相干涉測試技術(shù)通過采集同一時刻不同空間位置處具有一定相位差的多幅干涉圖,能有效避免環(huán)境振動帶來的影響,是目前抗振效果最好的干涉測量手段。其中斐索型同步移相干涉儀因其共光路的光學(xué)結(jié)構(gòu),大大提高了測量精度和應(yīng)用范圍。研究了一種基于四分之一波片的新型斐索型同步移相干涉原理和技術(shù)方法,采用四分之一波片作為參考鏡,得到一對正交偏振光,通過偏振光干涉,可同一時刻獲得相位依次相差π/2的四幅干涉圖,從而消除了振動對干涉測量的影響。研究了干涉圖像的位置配準方法,設(shè)計實現(xiàn)了兩種干涉圖位置配準算法:基于Hough變換的圓檢測方法以及相位相關(guān)方法。前者以圓域干涉背景圖為對象,通過域值分割、Canny邊緣檢測算子獲得干涉背景圖的輪廓,最后由Hough變換擬合出圓斑方程,以四幅干涉背景圖的圓心坐標作為配準依據(jù);后者同樣以干涉背景圖為對象,運用相位相關(guān)算法計算出四幅干涉背景圖的相對平移量,以此作為配準依據(jù)。兩種算法均通過實驗驗證其可靠性和精確性。研究了相位解包算法,設(shè)計實現(xiàn)了基于可靠度排序的解包算法,將實驗結(jié)果與ZYGO干涉儀的測量結(jié)果對比,得到面形誤差的PV值為0.004λ,RMS值為0.001λ,驗證了算法的準確性;提出了改進的基于全變分最小去噪的路徑無關(guān)解包算法,實驗結(jié)果表明,對殘差相位去噪后得到解包相位的PV值、RMS值誤差優(yōu)于未去噪的情況。
[Abstract]:Synchronous phase-shifted interferometry is the best interferometric method to avoid the influence of environmental vibration by collecting multiple interferograms with certain phase difference at different spatial positions at the same time. Because of the optical structure of the common optical path, the measurement precision and application range of the Fesso-type synchronous phase-shifting interferometer are greatly improved. In this paper, a new synchronous phase-shifted interference method based on 1/4 wave plate is studied. Using 1/4 wave plate as a reference mirror, a pair of orthogonal polarized light is obtained and interfered by polarized light. Four interferograms with 蟺 / 2 phase difference are obtained at the same time, thus the influence of vibration on interferometry is eliminated. The position registration method of interferogram is studied. Two kinds of interferogram registration algorithms are designed and implemented: circle detection method based on Hough transform and phase correlation method. In the former, the contour of the interference background image is obtained by domain value segmentation and Canny edge detection operator. Finally, the circular spot equation is fitted by the Hough transform, and the center coordinates of the four interferometric background images are used as the registration basis. The latter also takes the interference background image as the object, and calculates the relative translation amount of the four interference background images by using the phase correlation algorithm, which is used as the registration basis. The reliability and accuracy of the two algorithms are verified by experiments. The phase unwrapping algorithm is studied, and the unwrapping algorithm based on reliability ranking is designed and implemented. Comparing the experimental results with the measurement results of ZYGO interferometer, the PV value of surface shape error is 0.004 位 and the RMS value is 0.001 位, which validates the accuracy of the algorithm. An improved path independent unwrapping algorithm based on total variational minimum de-noising is proposed. The experimental results show that the error of RMS value is better than that of non-de-noising when the PV value of the de-noising phase is obtained after residual phase de-noising.
【學(xué)位授予單位】：南京理工大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2017
【分類號】：O436.1

【參考文獻】

相關(guān)期刊論文 前10條

1 吳杰;周皓;吳丹;趙宏波;顧濟華;;欠采樣條件下相位解包裹算法的研究[J];激光與光電子學(xué)進展;2016年05期

2 鄭東暉;陳磊;李金鵬;朱文華;李建欣;韓志剛;;動態(tài)干涉儀干涉圖位置配準及移相誤差校正[J];光學(xué)學(xué)報;2016年02期

3 盧丙輝;劉國棟;孫和義;劉炳國;陳鳳東;;基于誤差互補修正的微球干涉測量相位提取方法[J];中國激光;2015年05期

4 鄭東暉;陳磊;李博;李金鵬;烏蘭圖雅;;同步移相干涉儀中的延遲陣列移相特性研究[J];光學(xué)學(xué)報;2015年04期

5 田楓;白福忠;吳亞琴;徐永祥;梅秀莊;;基于統(tǒng)計分析方法的同步移相干涉圖位置配準[J];光學(xué)學(xué)報;2014年06期

6 郭媛;陳小天;;基于最小二乘相位解包裹改進算法的研究[J];中國激光;2014年05期

7 王華英;劉佐強;廖薇;于夢杰;高亞飛;;基于最小范數(shù)的四種相位解包裹算法比較[J];中國激光;2014年02期

8 何光宏;禮四同;王茂林;鄭凱;;可靠度導(dǎo)引的相位解包裹算法[J];激光雜志;2012年03期

9 郭仁慧;李建欣;朱日宏;;基于DCT算法的種子點相位解包算法[J];光學(xué)學(xué)報;2012年02期

10 李立艷;吳冰;苑勇貴;魏勇;楊軍;苑立波;;單頻激光干涉儀非線性誤差補償方法研究[J];光學(xué)學(xué)報;2011年07期

相關(guān)博士學(xué)位論文 前1條

1 劉青;數(shù)字相移干涉術(shù)中圖像處理和波前再現(xiàn)誤差的分析及校正算法的研究[D];山東大學(xué);2005年

相關(guān)碩士學(xué)位論文 前3條

1 郝晶晶;波長移相干涉測量技術(shù)研究[D];南京理工大學(xué);2007年

2 方吉光;三維微表面相移干涉術(shù)研究[D];浙江大學(xué);2006年

3 張加濤;移相干涉測量中相位解包算法的研究[D];南京理工大學(xué);2006年

，

本文編號：2465076