【摘要】：在一些高精密光學(xué)檢測(cè)中,例如高反射鏡、超光滑光學(xué)表面的散射率的檢測(cè),一般大氣環(huán)境中存在大量散射粒子,粒子的散射光會(huì)對(duì)測(cè)量結(jié)果產(chǎn)生一定干擾,如果檢測(cè)信號(hào)非常微弱時(shí),這樣的影響將不能忽略�，F(xiàn)階段對(duì)環(huán)境的評(píng)估方法主要是對(duì)環(huán)境中粒子濃度進(jìn)行測(cè)量,但是這些方法要么測(cè)量過程復(fù)雜,難以推廣,要么對(duì)測(cè)量粒子要求苛刻,實(shí)用性不高。針對(duì)以上問題,本文設(shè)計(jì)了一種大氣環(huán)境散射率測(cè)量裝置,主要通過測(cè)量環(huán)境的散射率,以達(dá)到評(píng)估環(huán)境的目的。本散射率測(cè)量系統(tǒng)是以穩(wěn)功率激光器為光源。當(dāng)光束穿過存有粒子的積分球空腔時(shí)散射光被收集在積分球內(nèi),并利用光電倍增管測(cè)量收集到的散射光。系統(tǒng)采用鎖相放大器進(jìn)行信號(hào)處理,有效的去除背景噪聲。測(cè)量系統(tǒng)主要由光源、光路、探測(cè)、數(shù)據(jù)處理等部分組成。光源部分以半導(dǎo)體激光器作為核心器件,設(shè)計(jì)了半導(dǎo)體激光器的驅(qū)動(dòng)電路以及調(diào)制電路,實(shí)現(xiàn)了激光器功率的穩(wěn)定輸出和電調(diào)制;光路部分主要完成了光束的轉(zhuǎn)折、衰減和雜散光消除等;探測(cè)部分完成了散射光收集,使用光電倍增管完成光電信號(hào)轉(zhuǎn)換和信號(hào)放大;數(shù)據(jù)處理部分利用鎖相放大器實(shí)現(xiàn)了相關(guān)檢測(cè)技術(shù),有效的提高了信噪比。使用單片機(jī)作為控制芯片,設(shè)計(jì)了 A/D轉(zhuǎn)換及顯示電路等相關(guān)輔助電路。通過上述方案,搭建了散射率測(cè)量系統(tǒng),對(duì)實(shí)驗(yàn)室環(huán)境進(jìn)行了散射率測(cè)量,并對(duì)實(shí)驗(yàn)數(shù)據(jù)進(jìn)行了認(rèn)真分析。實(shí)驗(yàn)表明該測(cè)量系統(tǒng)達(dá)到了測(cè)量1～100ppm的設(shè)計(jì)要求。實(shí)現(xiàn)了激光環(huán)境散射率的準(zhǔn)確測(cè)量,且精度高、測(cè)試方便迅速、適用范圍廣。
[Abstract]:In some high precision optical detection, such as high reflector, the detection of scattering rate of ultra-smooth optical surface, there are a large number of scattered particles in general atmospheric environment, the scattering light of particles will produce certain interference to the measurement results. If the detection signal is very weak, this effect can not be ignored. At present, the main methods of environmental assessment are to measure the concentration of particles in the environment. However, these methods are either complicated and difficult to be popularized, or they are demanding to measure particles and are not practical. Aiming at the above problems, this paper designs a measuring device for the scattering rate of atmospheric environment, mainly by measuring the scattering rate of the environment, in order to achieve the purpose of evaluating the environment. The scattering rate measurement system is based on a stable power laser as a light source. When the beam passes through the cavity of the integrated sphere containing particles, the scattered light is collected in the integral sphere and measured by photomultiplier tube. The system uses a phase-locked amplifier for signal processing to effectively remove background noise. The measurement system is mainly composed of light source, optical path, detection, data processing and so on. In the light source part, the semiconductor laser is used as the core device, the driving circuit and modulation circuit of the semiconductor laser are designed, the stable output and electric modulation of the laser power are realized. Attenuation and stray light elimination; detection part completed the collection of scattered light, using photomultiplier tube to complete the photomultiplier signal conversion and signal amplification; the data processing part of the use of phase-locked amplifier to achieve the correlation detection technology, effectively improve the signal-to-noise ratio. Using single chip computer as control chip, the auxiliary circuits such as A / D conversion and display circuit are designed. Through the above scheme, a scattering rate measurement system is set up, the scattering rate of the laboratory environment is measured, and the experimental data are carefully analyzed. Experiments show that the system meets the design requirements of 1~100ppm measurement. The accurate measurement of laser scattering rate is realized, with high accuracy, convenient and rapid measurement and wide range of application.
【學(xué)位授予單位】：西安工業(yè)大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2017
【分類號(hào)】：O436.2

【參考文獻(xiàn)】

相關(guān)期刊論文 前10條

1 侯宏錄;崔凱;陳海濱;劉凱;;激光差分探測(cè)的懸浮物濃度測(cè)量技術(shù)研究[J];西安工業(yè)大學(xué)學(xué)報(bào);2015年10期

2 熊興隆;劉春媛;蔣立輝;李猛;馬愈昭;臺(tái)宏達(dá);;多次散射影響下激光大氣透射儀測(cè)量誤差研究[J];光電子·激光;2015年10期

3 葉超;孟睿;葛寶臻;;基于光散射的粒子測(cè)量方法綜述[J];激光與紅外;2015年04期

4 宋楠;隋越;董明;李國(guó)林;鄭傳濤;王一丁;;基于虛擬鎖相放大器的中紅外CO檢測(cè)系統(tǒng)[J];光電子·激光;2014年12期

5 孫冬嬌;劉清`，

本文編號(hào)：2225151