發(fā)布時(shí)間：2018-05-20 05:24

  本文選題：仿生復(fù)眼 + 微透鏡陣列��； 參考：《中國(guó)科學(xué)院大學(xué)(中國(guó)科學(xué)院光電技術(shù)研究所)》2017年碩士論文

【摘要】：生物復(fù)眼具有小眼孔徑小、數(shù)量多且緊密排布在曲面基底上的結(jié)構(gòu)特點(diǎn),所以它的視場(chǎng)角大、時(shí)間分辨率高、對(duì)運(yùn)動(dòng)物體敏感性強(qiáng)、能量利用率高,這些優(yōu)越的性能吸引了眾多國(guó)內(nèi)外學(xué)者對(duì)生物復(fù)眼進(jìn)行研究和仿生。從結(jié)構(gòu)上說生物復(fù)眼是分布在曲面基底上的高填充因子小孔徑微透鏡陣列結(jié)構(gòu),仿生難度較大,現(xiàn)有的制備方法難以同時(shí)滿足高填充因子、小孔徑、制備方法簡(jiǎn)便易行的要求。本文提出了一套高填充因子小孔徑仿生復(fù)眼結(jié)構(gòu)的制備方法,該方法首先將光刻膠熱熔法制作的小孔徑微透鏡陣列的填充因子提高到理論最大值,并以此為模板采用軟刻蝕技術(shù)將微透鏡陣列結(jié)構(gòu)制作在聚合物彈性薄膜的表面上,然后利用薄膜兩側(cè)氣壓差將平面微透鏡陣列結(jié)構(gòu)拉伸為(凹形)曲面基底上的微透鏡陣列結(jié)構(gòu),最后使用紫外固化膠填充凹形曲面彈性薄膜,固化后獲得高填充因子小孔徑的仿生復(fù)眼結(jié)構(gòu)。本文研究的主要內(nèi)容包括:(1)分析了生物復(fù)眼的結(jié)構(gòu)特點(diǎn)和工作機(jī)理,并對(duì)仿生復(fù)眼的應(yīng)用前景和制備方法進(jìn)行了討論。(2)對(duì)仿生復(fù)眼結(jié)構(gòu)的參數(shù)進(jìn)行了設(shè)計(jì),并分析了光刻膠熱熔法制作微透鏡陣列的工作機(jī)理和工藝過程,利用該方法制作了小眼孔徑為26um、周期為30um、填充因子為68.1%的小孔徑微透鏡陣列。(3)針對(duì)光刻膠熱熔法制作微透鏡陣列填充因子較低的情況,提出一種提高微透鏡陣列填充因子、擴(kuò)大可加工面形范圍的方法,并對(duì)其實(shí)驗(yàn)機(jī)理、面形影響因素做了詳細(xì)分析;然后使用該方法將微透鏡陣列的小眼孔徑由26um提高到30um、填充因子由68.1%提高到理論最大值90.6%,驗(yàn)證了該方法用于制作高填充因子小孔徑微透鏡陣列的可行性。(4)針對(duì)曲面基底微透鏡陣列難以制作的現(xiàn)狀,提出一種制備仿生復(fù)眼結(jié)構(gòu)的新方法——拓?fù)溆成浞?該方法利用氣壓差將平面微透鏡陣列結(jié)構(gòu)轉(zhuǎn)為曲面基底上的仿生復(fù)眼結(jié)構(gòu),并且不同氣壓差下可以獲得不同的曲面基底面形。首先,利用有限元分析軟件ANSYS15.0對(duì)彈性薄膜的受力形變情況進(jìn)行分析,獲得不同壓力下彈性薄膜的位移云圖,初步確定合適的內(nèi)外氣壓差。然后,研究軟刻蝕技術(shù)的工作機(jī)理及制作工藝,并利用該技術(shù)制備了表面帶有微透鏡陣列結(jié)構(gòu)的聚合物彈性薄膜。最后,設(shè)計(jì)并搭建實(shí)驗(yàn)系統(tǒng),利用拓?fù)溆成浞▽⑵矫嫖⑼哥R陣列結(jié)構(gòu)轉(zhuǎn)為底面直徑4mm、高度1.21mm、曲面基底上共有1.6萬個(gè)小眼(孔徑為30um)的仿生復(fù)眼結(jié)構(gòu)。對(duì)仿生復(fù)眼結(jié)構(gòu)的面形和成像效果進(jìn)行了測(cè)試,結(jié)果表明,該方法制備的仿生復(fù)眼結(jié)構(gòu)均勻性良好、面形光滑、成像清晰,驗(yàn)證了拓?fù)溆成浞ㄖ苽浞律鷱?fù)眼結(jié)構(gòu)的可行性。
[Abstract]:Biological compound eye has the characteristics of small aperture, large number and compact arrangement on curved surface, so it has large field of view, high time resolution, strong sensitivity to moving objects, and high energy utilization rate. These superior properties have attracted many domestic and foreign scholars to study and bionics biological compound eye. The biological compound eye is a microlens array with high filling factor and small aperture distributed on the curved surface, which is difficult to be bionic. The existing preparation methods are difficult to meet the requirements of high filling factor, small aperture and easy to be prepared at the same time. In this paper, a method of preparing bionic compound eye structure with high filling factor and small aperture is proposed. The filling factor of the small aperture microlens array fabricated by hot melt photoresist method is increased to the theoretical maximum. The structure of microlens array was fabricated on the surface of polymer elastic film by soft etching technique. Then the planar microlens array structure is stretched into the microlens array structure on the (concave) curved surface by using the pressure difference between the two sides of the film. Finally, the concave curved surface elastic film is filled with UV curable glue. The bionic compound eye structure with high filling factor and small pore size was obtained after curing. The main contents of this paper are as follows: (1) the structural characteristics and working mechanism of bionic compound eye are analyzed, and the application prospect and preparation method of bionic compound eye are discussed. (2) the parameters of bionic compound eye structure are designed. The working mechanism and process of fabricating microlens array by photolithographic hot melt method are also analyzed. A small aperture microlens array with a aperture of 26um. a period of 30um. and a filling factor of 68.1% was fabricated by using this method. A new method was proposed to improve the filling factor of microlens array for the case of low filling factor of microlens array fabricated by photolithographic hot melt method. The method of expanding the range of machinable surface is analyzed in detail, and its experimental mechanism and influencing factors are analyzed in detail. Then, the aperture of microlens array is raised from 26um to 30 uma, the filling factor is increased from 68.1% to the theoretical maximum of 90.6, and the feasibility of this method for fabricating microlens array with high filling factor is verified. The current situation that microlens arrays on surface substrates are difficult to fabricate, A new method for fabricating bionic compound eye structure is presented, which uses the air pressure difference to transform the planar microlens array structure into the bionic compound eye structure on the curved surface. And different surface shapes can be obtained under different pressure difference. Firstly, the deformation of elastic film is analyzed by using finite element analysis software ANSYS15.0, and the displacement cloud map of elastic film under different pressures is obtained, and the suitable pressure difference between internal and external pressure is preliminarily determined. Then, the working mechanism and fabrication technology of soft etching technology are studied, and the polymer elastic thin films with microlens array structure on the surface are prepared by the technology. Finally, the experimental system is designed and built. The planar microlens array structure is transformed into 4mm bottom diameter and 1.21mm height by using topological mapping method. There are 16000 bionic compound eye structures with aperture of 30 umps on the surface substrate. The surface shape and imaging effect of bionic compound eye structure are tested. The results show that the structure of bionic compound eye prepared by this method has good uniformity, smooth surface shape and clear imaging, which verifies the feasibility of preparing bionic compound eye structure by topological mapping method.
【學(xué)位授予單位】：中國(guó)科學(xué)院大學(xué)(中國(guó)科學(xué)院光電技術(shù)研究所)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2017
【分類號(hào)】：Q811

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