本文關(guān)鍵詞： 干涉儀 電子密度診斷 電容耦合等離子體　出處：《中國(guó)科學(xué)技術(shù)大學(xué)》2017年碩士論文　論文類型：學(xué)位論文

【摘要】：等離子體是一個(gè)復(fù)雜的多參量體系,對(duì)電子密度,電子溫度、活性粒子密度、電子能量分布等參量進(jìn)行診斷,是低溫等離子體研究的重要工作。在等離子體診斷技術(shù)中,利用微波和等離子體相互作用的等離子體參數(shù)診斷技術(shù)具有無擾動(dòng)、時(shí)間分辨率高等特點(diǎn);不同的相互作用機(jī)制發(fā)展出了多樣化的微波診斷方法,其在等離子體特性研究中發(fā)揮著越來越重要的作用。本文設(shè)計(jì)構(gòu)建了零拍微波干涉儀診斷系統(tǒng),并用其對(duì)電容耦合等離子體密度進(jìn)行了測(cè)量,對(duì)干涉儀系統(tǒng)的性能進(jìn)行了分析。利用質(zhì)量能量分析儀對(duì)氫氣等離子體離子特征進(jìn)行了診斷,研究了氫氣分子束流引入對(duì)ECR氫等離子體中離子特征的影響。根據(jù)待測(cè)等離子體的密度范圍及尺寸,我們選用10 GHz的微波作為干涉儀系統(tǒng)的工作頻率,并根據(jù)系統(tǒng)中各部分功率的損耗,確定出我們所選擇的干涉儀器件,系統(tǒng)使用聚焦喇叭天線發(fā)射和接收微波。利用所搭建干涉儀對(duì)氬氣等離子體密度測(cè)量,實(shí)驗(yàn)中測(cè)量結(jié)果顯示干涉儀相位噪聲標(biāo)準(zhǔn)差為0.057度,對(duì)應(yīng)的弦平均電子密度誤差為3.37×107cm~(-3)。利用脈沖調(diào)制的400kHz射頻放電,在放電功率80 W、氣壓100 Pa和占空比50%條件下,測(cè)量的氬氣等離子體密度為5.9×109cm~(-3),等離子體達(dá)到最大密度需要的時(shí)間為2.5ms,而功率上升沿的時(shí)間為3 μs,利用質(zhì)量能量分析儀對(duì)等離子體的離子種類和離子能量進(jìn)行了研究,在電子回旋共振氫氣放電中,探測(cè)到了 H+、H2+和H3+三種離子,其中以H2+離子為主,離子密度和離子平均能量都隨輸入功率的增加而增加,實(shí)驗(yàn)發(fā)現(xiàn)在等離子體下游引入氫氣束流會(huì)導(dǎo)致離子通量迅速減少,而離子的平均能量增加。探測(cè)到的三種離子的相對(duì)含量也隨引入束流的增大而變化。
[Abstract]:Plasma is a complex multi-parameter system. The parameters such as electron density, electron temperature, active particle density and electron energy distribution are diagnosed. It is an important work in the research of low temperature plasma. In the plasma diagnosis technology, the plasma parameter diagnosis technology using the interaction of microwave and plasma has the characteristics of no disturbance, high time resolution and so on. Different interaction mechanisms have developed a variety of microwave diagnostic methods, which play an increasingly important role in the study of plasma characteristics. In this paper, a zero-beat microwave interferometer diagnosis system is designed and constructed. The density of capacitance-coupled plasma is measured, the performance of interferometer system is analyzed, and the ion characteristics of hydrogen plasma are diagnosed by using mass and energy analyzer. The influence of the introduction of hydrogen molecular beam on the ion characteristics in ECR hydrogen plasma was studied. The density range and size of the plasma to be measured were studied. We choose the microwave of 10 GHz as the operating frequency of the interferometer system, and according to the power loss of each part of the system, we select the interferometer device. The focused horn antenna is used to transmit and receive microwave, and the interferometer is used to measure the density of argon plasma. The experimental results show that the standard deviation of phase noise of interferometer is 0.057 degrees. The corresponding average electron density error is 3.37 脳 10 ~ 7 cm ~ (-1) ~ (-1) ~ (-1). The pulse modulated 400kHz RF discharge is carried out at a discharge power of 80 W. The measured argon plasma density is 5.9 脳 10 ~ 9 cm ~ (-1) ~ (-1) C ~ (-3) at 100 Pa and duty cycle 50%, and the time required for the plasma to reach the maximum density is 2.5 Ms. The time of power rise was 3 渭 s. The ion species and ion energy of plasma were studied by mass energy analyzer. The H was detected in the electron cyclotron resonance hydrogen discharge. The ion density and average energy of H _ 2 and H _ 3 increase with the increase of input power. It is found that the introduction of hydrogen beam downstream of the plasma leads to a rapid decrease in ion flux and an increase in the average energy of ions, and the relative contents of the detected three ions vary with the increase of the introduced beam current.
【學(xué)位授予單位】：中國(guó)科學(xué)技術(shù)大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2017
【分類號(hào)】：O536;TH744.3

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本文編號(hào)：1486143