【摘要】：多晶硅生成工藝中的副產(chǎn)物氯硅烷殘液,具有腐蝕性強(qiáng)、產(chǎn)量大等特點(diǎn)。采用多晶硅副產(chǎn)物氯硅烷殘液為原料進(jìn)行水解反應(yīng)生成二氧化硅。研究了以不同水解方式在不同水解體系中引入位阻劑及該位阻劑的時(shí)效性對(duì)二氧化硅團(tuán)聚的影響以及機(jī)理研究。結(jié)果表明:氣-液反應(yīng)的水解方式產(chǎn)出的二氧化硅呈現(xiàn)顆粒狀具有顆粒特性;水解體系中引入位阻劑后產(chǎn)物二氧化硅分散性好,顆粒均勻、粒徑大小在2μm左右;并且證實(shí)了位阻劑的位阻作用具有時(shí)效性。
[Abstract]:The by-product chlorosilane residual liquid in polysilicon formation process has the characteristics of strong corrosion and large output. The polysilicon by-product chlorosilane residue was used as raw material for hydrolysis to form silica. The effect of introducing potential inhibitor and its timeliness on silica agglomeration in different hydrolysis systems by different hydrolysis methods and its mechanism were studied. The results show that the silica produced by the hydrolysis method of gas-liquid reaction has the characteristics of particles, and the product silica has good dispersion, uniform particle size and particle size of about 2 渭 m when the potential resistance agent is introduced into the hydrolysis system, and it is confirmed that the steric hindrance of steric resistance agent has timeliness.
【作者單位】： 昆明理工大學(xué)環(huán)境科學(xué)與工程學(xué)院;
【基金】：國(guó)家自然科學(xué)基金(41261079)
【分類號(hào)】：X78

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相關(guān)碩士學(xué)位論文 前3條

1 張?chǎng)?氯硅烷殘液水解制備二氧化硅并副產(chǎn)鹽酸的工藝研究[D];昆明理工大學(xué);2016年

2 李銀光;混合氯硅烷酸性水解研究[D];昆明理工大學(xué);2016年

3 楊勁;多晶硅生產(chǎn)中氯硅烷殘液的資源化處理與利用[D];天津大學(xué);2013年

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