【摘要】：隨著微電子產(chǎn)業(yè)的大力發(fā)展,傳感器逐漸朝著小型化、高精度方向發(fā)展,正是基于此,本文著重研究一種新型的小型化電場式圓時柵傳感器。電場式圓時柵傳感器利用正交變化的電場構建運動參考系,直接用電場耦合的方式感應電信號,與傳統(tǒng)的時柵相比,減少了感應信號產(chǎn)生的中間環(huán)節(jié),抗干擾能力更強;采用MEMS微納加工工藝進行極片加工,保證了傳感器的加工精度。電場式圓時柵是一種新型的電容式位移傳感器,結構簡單,功耗低,信號的采集和處理過程簡單,利于傳感器的小型化和高度集成化。在傳感器小型化的同時,也要提高傳感器的測量精度,因此,要采用理論分析、模型仿真和實驗驗證三者相結合的方式,逐步形成一套具有指導意義的電場式圓時柵傳感器理論。本文主要圍繞電場式圓時柵位移傳感器的結構進行優(yōu)化。主要的工作如下:1.闡述了時空坐標轉換理論、機械式時柵原理和磁場式時柵原理,深入研究了電場式圓時柵傳感器雙列式結構和單列式結構,并對它們各自的工作原理進行了詳細闡述。2.以COMSOL Multiphysics多物理場仿真軟件為基礎,首先對傳感器雙列式結構進行了仿真,明確了雙列式結構內(nèi)外兩圈存在差異的原因,結合理論分析了這種差異會帶來二次誤差;為了消除這種差異,將傳感器的結構優(yōu)化成單列式結構,并對單列式結構進行仿真分析,確定了小型化傳感器的結構尺寸和對極數(shù),采用MEMS微納加工工藝對優(yōu)化后的傳感器進行加工制造。3.根據(jù)實驗要求,搭建實驗平臺,采用理論分析和仿真結果相結合的方式進行了大量的實驗驗證,首先對傳感器由雙列結構變單列結構的優(yōu)化進行了實驗驗證,然后根據(jù)單列結構中實驗誤差數(shù)據(jù)結合理論分析,找到誤差來源,并進行了結構優(yōu)化,分析了兩路駐波幅值不等、安裝傾斜、極片制造誤差等問題會帶來二次誤差;激勵信號幅值不等、兩路駐波相位非嚴格正交會產(chǎn)生一次或二次誤差;傳感器三次和五次諧波會帶來四次誤差。通過大量的實驗驗證和誤差分析,不斷的對傳感器的結構進行優(yōu)化,實驗結果表明,直徑為57mm的圓時柵傳感器最終的實驗精度為±10″,分辨力為0.2″。
[Abstract]:With the development of microelectronics industry, the sensor is gradually developing towards miniaturization and high precision. Based on this, this paper focuses on the study of a new type of miniaturized electric field-type circular time-gate sensor. The electric field circular time gate sensor uses the orthogonal electric field to construct the moving reference frame and directly uses the electric field coupling way to induce the electric signal. Compared with the traditional time gate, the electric field circular time gate sensor reduces the intermediate link of the induction signal and has stronger anti-jamming ability. The MEMS micro / nano machining technology is used to process the electrode plate, which ensures the precision of the sensor. Electric field circular time gate is a new type capacitive displacement sensor with simple structure, low power consumption, simple signal acquisition and processing process, which is conducive to the miniaturization and high integration of the sensor. In addition to the miniaturization of the sensor, it is necessary to improve the measurement accuracy of the sensor. Therefore, the combination of theoretical analysis, model simulation and experimental verification should be adopted. Gradually form a set of guiding electric field type circular time gate sensor theory. In this paper, the structure of grid displacement sensor based on electric field circle is optimized. The main work is as follows: 1. The space-time coordinate transformation theory, mechanical time-gate principle and magnetic field-type time-gate principle are described. The double-row structure and single-row structure of electric field-type circular time-gate sensor are deeply studied, and their working principles are described in detail. 2. Based on the COMSOL Multiphysics multi-physical field simulation software, the double-row structure of the sensor is simulated firstly, and the reason of the difference between the inner and outer two cycles of the double-row structure is clarified, and the secondary error is analyzed in combination with the theory. In order to eliminate this difference, the structure of the sensor is optimized into a single-row structure, and the single-row structure is simulated and analyzed, and the structure size and the number of antipods of the miniaturized sensor are determined. Fabrication of optimized sensors by MEMS micro / nano process. 3. According to the experimental requirements, the experimental platform is set up, and a lot of experiments are carried out by combining theoretical analysis and simulation results. Firstly, the optimization of the sensor from double-row structure to single-row structure is verified by experiments. Then, according to the experimental error data and theoretical analysis in the single-row structure, the error source is found, and the structure optimization is carried out. The secondary error will be brought about by the two standing wave amplitude difference, installation tilt, pole manufacturing error and so on. When the amplitude of the excitation signal is different, the two standing wave phases are not strictly orthogonal to produce one or two errors, and the third and fifth harmonics of the sensor will bring about four times errors. Through a lot of experimental verification and error analysis, the structure of the sensor is continuously optimized. The experimental results show that the final experimental accuracy of the circular time gate sensor with diameter of 57mm is 鹵10 "and the resolution is 0.2".
【學位授予單位】：重慶理工大學
【學位級別】：碩士
【學位授予年份】：2017
【分類號】：TP212

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