【摘要】：介電型EAP(Electro-active Polymer)是一種超彈性絕緣材料,具有應(yīng)變大、柔性好和質(zhì)量輕等優(yōu)點(diǎn),可實(shí)現(xiàn)柔性傳感,能適應(yīng)被測(cè)對(duì)象的形狀,不會(huì)阻礙被測(cè)對(duì)象的運(yùn)動(dòng)。論文基于介電型EAP的電容式傳感原理,研究了介電型EAP的位移傳感特性,在柔性機(jī)器人及康復(fù)訓(xùn)練等領(lǐng)域具有潛在的應(yīng)用前景。分析了介電型EAP電容式位移傳感器的工作原理,設(shè)計(jì)了傳感單元的結(jié)構(gòu),通過單敏感單元與雙敏感單元(面對(duì)面)的電容量分析,發(fā)現(xiàn)面對(duì)面單元的電容量差與位移之間的線性關(guān)系,由此確定采用差分測(cè)量法,以提高傳感單元靈敏度和線性度。分析了傳感單元的制造與安裝誤差對(duì)傳感性能的影響,確定了傳感單元的尺寸,完成了傳感單元的制作。測(cè)試了用于電容量計(jì)算的相對(duì)介電常數(shù),用于理論靈敏度計(jì)算。構(gòu)建了傳感單元的靜態(tài)特性測(cè)試平臺(tái),利用最小二乘法擬合測(cè)試數(shù)據(jù),進(jìn)行了單自由度和二自由度位移傳感標(biāo)定。結(jié)果表明:敏感單元的電容量差與單自由度位移之間的線性度好,靈敏度分別為63.21 pF/mm(X向)和63.08 pF/mm(Y向);面對(duì)面敏感單元的電容量差只與該方向的位移呈線性關(guān)系,與另一方向位移基本無關(guān),且標(biāo)定結(jié)果與分析結(jié)果較吻合。在此基礎(chǔ)上分析了安裝誤差對(duì)標(biāo)定的影響,證明了差分測(cè)量法的可行性。在分析基礎(chǔ)上,探究傳感單元應(yīng)用如下:將兩個(gè)傳感單元內(nèi)框固連,采用差分法測(cè)量Z方向位移,其靈敏度為66.44pF/mm;基于該傳感單元設(shè)計(jì)了二自由度角位移傳感器,建立該傳感器的電容量與繞X、Y軸角位移之間的關(guān)系,該傳感器繞X和Y軸的靈敏度為111.28pF/(°)和114.76pF/(°);利用兩個(gè)傳感單元制作了一種四自由度位移傳感器,用于檢測(cè)導(dǎo)桿在X、Y方向位移和繞X、Y軸角位移,得到導(dǎo)桿末端誤差在0.25%之內(nèi)。
[Abstract]:Dielectric EAP (Electro-active Polymer) is a kind of superelastic insulating material, which has the advantages of large strain, good flexibility and light mass. It can realize flexible sensing and can adapt to the shape of the object under test, and will not hinder the movement of the object under test. Based on the capacitive sensing principle of dielectric EAP, the displacement sensing characteristics of dielectric EAP are studied in this paper. It has potential application prospect in flexible robot and rehabilitation training. The working principle of dielectric EAP capacitive displacement sensor is analyzed, and the structure of sensor unit is designed. The linear relationship between the capacitance difference and the displacement of the face to face unit is found, and the differential measurement method is adopted to improve the sensitivity and linearity of the sensor unit. The effect of the manufacturing and installation error of the sensor unit on the sensing performance is analyzed. The size of the sensor unit is determined and the fabrication of the sensor unit is completed. The relative dielectric constant used to calculate the capacitance and the theoretical sensitivity were measured. The static characteristic test platform of the sensor unit is constructed, and the measurement data are fitted by the least square method, and the displacement sensing calibration of single and two degrees of freedom is carried out. The results show that the sensitivity is 63.21 pF/mm (X) and 63.08 pF/mm (Y), respectively. The capacitance difference of the face to face sensitive cell is only linearly related to the displacement in this direction, but not to the displacement in the other direction, and the calibration results are in good agreement with the analytical results. On this basis, the effect of installation error on calibration is analyzed, and the feasibility of differential measurement method is proved. On the basis of the analysis, the application of the sensor unit is as follows: the sensitivity is 66.44pF / mm by using the difference method to measure the displacement of Z direction by fixing the inner frame of the two sensing units; Based on the sensor unit, a two-degree-of-freedom angular displacement sensor is designed, and the relationship between the capacitance of the sensor and the angular displacement around the X and Y axis is established. The sensitivity of the sensor is 111.28pF/ (擄) and 114.76pF/ (擄) around the X and Y axes. A four-degree-of-freedom displacement sensor is fabricated by using two sensing units, which is used to detect the displacement of the guide rod in the direction of XY and the angular displacement around the XY axis. The error of the end of the guide rod is within 0.25%.
【學(xué)位授予單位】：南京航空航天大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2017
【分類號(hào)】：TP212

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