本文關(guān)鍵詞： 時(shí)柵 自適應(yīng) 位移測(cè)量 比相 分辨率　出處：《重慶理工大學(xué)》2017年碩士論文　論文類型：學(xué)位論文

【摘要】：位移測(cè)量的精度水平是衡量現(xiàn)代工業(yè)領(lǐng)域先進(jìn)程度的重要指標(biāo)之一,位移傳感器是位移測(cè)量的關(guān)鍵部件,位移傳感器的精度直接決定位移測(cè)量的精度。目前,在精密位移測(cè)量領(lǐng)域,柵線刻劃式的位移傳感器被廣泛應(yīng)用,但存在測(cè)量精度與速度相互制約的問題。國外高精度傳感器的研究制造技術(shù)遠(yuǎn)超我國,我國大多使用的高精度傳感器都依賴進(jìn)口,但仍供不應(yīng)求。為趕超國外先進(jìn)水平,只能尋求新思路。時(shí)柵是由我國自主開發(fā)研制的位移傳感器,其本質(zhì)上是一種等時(shí)間采樣的靜態(tài)位移測(cè)量傳感器,因此,時(shí)柵在動(dòng)態(tài)測(cè)量中普遍存在分辨率隨被測(cè)物體運(yùn)動(dòng)速度變化的問題。時(shí)柵產(chǎn)品中,光場(chǎng)式時(shí)柵在抗電磁干擾和頻率響應(yīng)方面具有突出優(yōu)勢(shì),針對(duì)上述問題,本課題基于光場(chǎng)式直線時(shí)柵設(shè)計(jì)了一種自適應(yīng)動(dòng)態(tài)比相位移測(cè)量方法。該方法可在不改變激勵(lì)頻率的條件下,利用自適應(yīng)控制實(shí)現(xiàn)測(cè)量速度與時(shí)柵單位時(shí)間內(nèi)比相次數(shù)的自動(dòng)匹配調(diào)節(jié),進(jìn)而保證在原有精度基礎(chǔ)上,實(shí)現(xiàn)不同速度下的等分辨率位移測(cè)量。本文已取得的創(chuàng)新成果有以下幾點(diǎn):(1)在光場(chǎng)式直線時(shí)柵測(cè)量原理基礎(chǔ)上,分析其動(dòng)態(tài)測(cè)量中分辨率隨速度變化的問題,提出自適應(yīng)動(dòng)態(tài)比相測(cè)量方法。(2)分析自適應(yīng)控制算法,結(jié)合光場(chǎng)式直線時(shí)柵位移測(cè)量方法,推導(dǎo)自適應(yīng)動(dòng)態(tài)比相測(cè)量原理,并完成測(cè)量系統(tǒng)的設(shè)計(jì)與實(shí)現(xiàn)。(3)搭建實(shí)驗(yàn)平臺(tái),進(jìn)行實(shí)驗(yàn)研究,通過實(shí)驗(yàn)數(shù)據(jù)對(duì)比分析,驗(yàn)證自適應(yīng)動(dòng)態(tài)比相測(cè)量方法的可行性。實(shí)驗(yàn)研究表明:自適應(yīng)動(dòng)態(tài)比相測(cè)量方法在量程180mm,速度0~60mm/s的范圍內(nèi),實(shí)現(xiàn)了精度優(yōu)于±0.5μm的等空間位置反饋測(cè)量,同時(shí)保證了分辨率不變,為光場(chǎng)式直線時(shí)柵在不同速度下的測(cè)量分辨率變化問題提供了有效的解決方案。
[Abstract]:The precision level of displacement measurement is one of the important indexes to measure the advanced degree of modern industry. Displacement sensor is the key component of displacement measurement. The precision of displacement sensor directly determines the accuracy of displacement measurement. In the field of precision displacement measurement, grid-line displacement sensor is widely used, but there is the problem of measuring precision and velocity restricting each other. The research and manufacture technology of high-precision sensor in foreign countries is far superior to that in China. Most of the high precision sensors used in our country rely on imports, but the supply is still short of supply. In order to catch up with the advanced level of foreign countries, we can only seek new ideas. The time grating is a displacement sensor developed independently by our country. In essence, it is a static displacement sensor with equal time sampling. Therefore, there is a problem that the resolution varies with the moving velocity of the object in dynamic measurement. The light field time grating has the outstanding superiority in the aspect of resisting electromagnetic interference and frequency response, aiming at the above problems. In this paper, an adaptive dynamic phase contrast displacement measurement method is designed based on the light-field linear time-grating, which can be used to measure the displacement without changing the excitation frequency. The adaptive control is used to realize the automatic matching and adjusting of the measuring speed and the times of phase comparison in the unit time of the time grating, so as to ensure the original accuracy. The results of this paper are as follows: 1) based on the principle of light field linear time grating measurement. Based on the analysis of the problem that the resolution varies with the velocity in the dynamic measurement, an adaptive control algorithm is proposed, which is based on the adaptive dynamic phase comparison measurement method, and the grating displacement measurement method is combined with the light-field straight line method. The principle of adaptive dynamic phase contrast measurement is deduced, and the design and implementation of the measurement system is completed. The experimental platform is set up, and the experimental research is carried out, and the experimental data are compared and analyzed. The experimental results show that the adaptive dynamic phase comparison method is in the range of 180 mm and 0 ~ 60 mm / s. The equal-space position feedback measurement with precision better than 鹵0.5 渭 m is realized, and the resolution is invariant, which provides an effective solution to the measurement resolution change problem of the light-field straight line grating at different speeds.
【學(xué)位授予單位】：重慶理工大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2017
【分類號(hào)】：TP212

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