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  本文關(guān)鍵詞：非線性微質(zhì)量傳感器設(shè)計　出處：《大連理工大學(xué)》2016年碩士論文　論文類型：學(xué)位論文

  更多相關(guān)文章： 非線性 閾值開關(guān) 稱重型 微質(zhì)量傳感器

【摘要】：壓電諧振式微質(zhì)量傳感器可以根據(jù)諧振頻率變化稱重微小質(zhì)量,在生物分子、微小顆粒、環(huán)境污染和液體成分識別與檢測等領(lǐng)域具有廣泛的應(yīng)用前景。借助尺寸微型化方法可以極大的提升懸臂梁式微傳感器的靈敏度,但隨著尺寸的不斷減小,傳感器的使用環(huán)境要求(如真空環(huán)境)也極為苛刻。為此,需要展開新型微質(zhì)量傳感器設(shè)計方面的研究。本文利用雙穩(wěn)態(tài)結(jié)構(gòu)的參激振動分岔現(xiàn)象設(shè)計具有稱重和閾值質(zhì)量監(jiān)測功能的新型微質(zhì)量傳感器,具體包括：(1)設(shè)計了具有稱重和閾值質(zhì)量感應(yīng)功能的新型微質(zhì)量傳感器,利用激勵載荷(幅值、位置和頻率)對余弦梁結(jié)構(gòu)動態(tài)特性的影響關(guān)系,提出基于載荷變換的微質(zhì)量傳感器工作模式切換方法,實現(xiàn)了微質(zhì)量稱重與閾值質(zhì)量感應(yīng)功能的轉(zhuǎn)換。研究了質(zhì)量吸附位置、激勵載荷對傳感器靈敏度和最小檢測閾值的影響關(guān)系,建立了多參數(shù)耦合作用的傳感器最小檢測閾值優(yōu)化模型,得到了具有最高檢測靈敏度的雙穩(wěn)態(tài)結(jié)構(gòu)參數(shù)和激勵載荷參數(shù)。研究結(jié)果表明,在質(zhì)量稱重工作區(qū)域,所提出的傳感器較兩端固支梁式傳感器靈敏度提升了4.25倍；在閾值質(zhì)量檢測區(qū)域,借助吸附質(zhì)量變化引起的響應(yīng)幅值突變特性,無需阻抗分析儀即可實現(xiàn)微質(zhì)量的快速檢測。同時,利用雙穩(wěn)態(tài)結(jié)構(gòu)的閾值跳躍特性,提出基于配重法的極微閾值質(zhì)量檢測方法。(2)提出了基于組合梁結(jié)構(gòu)的非線性傳感器設(shè)計方法,利用線性懸臂梁和非線性余弦梁組合結(jié)構(gòu),提出了基于幅值突變的跳躍頻率檢測方法,借助吸附質(zhì)量前后跳躍頻率的變化量來確定被測質(zhì)量,不僅有效減小了環(huán)境阻尼的影響,并且簡化測量過程無需復(fù)雜的檢測電路即可實現(xiàn)微質(zhì)量快速檢測。研究了質(zhì)量吸附位置、激勵頻率與激勵幅值對系統(tǒng)跳躍頻率響應(yīng)的影響關(guān)系,得到了具有最高探測靈敏度的最優(yōu)組合梁構(gòu)型、激勵載荷和吸附位置。
[Abstract]:The piezoelectric resonant micro mass sensor according to the change in resonant frequency of small weighing quality, in the biological molecules, tiny particles, and has wide application prospect areas of environmental pollution and the liquid component identification and detection. With the help of micro size cantilever lifting method can greatly weakened the sensitivity of the sensor, but with the continuous reduction of the size, the use of sensors environmental requirements (such as vacuum) is extremely harsh. Therefore, the need of new micro mass sensor design. The Vibration Bifurcation Phenomena of bistable structure design has the weight and threshold quality monitoring function of the new micro mass sensor, including: (1) design with weighing and quality threshold the induction function of the new micro mass sensor, using excitation (amplitude, frequency and position) influence on the dynamic characteristics of Yu Xianliang structure, put forward Micro mass sensor working mode switching method of load based on transformation, to realize micro quality weighing conversion and threshold quality sensing function was studied. The quality of adsorption sites, the relationship between incentive effect of load on the sensor sensitivity and minimum detection threshold, an optimization model of multi parameter coupling sensor minimum detection threshold function, the bistable structure and parameters excitation parameters have the highest detection sensitivity is obtained. The results show that the quality of work in the weighing area, the proposed sensor is fixed beam sensor sensitivity is improved by 4.25 times; in the quality threshold detection area, with the characteristics of mutation response amplitude caused by the change of the adsorption quality, achieve rapid detection of micro mass without impedance analyzer can at the same time, the bistable structure threshold jump characteristics, the minimal threshold quality detection method based on weight Method. (2) proposed a nonlinear sensor design method of composite beam structure based on linear and nonlinear cantilever beam Yu Xianliang composite structure, put forward the jump frequency detection method based on amplitude, to determine the quality by means of variation of adsorption quality before and after the jump frequency, not only to reduce the impact of the environmental damping, and simplified the measurement process without complex detection circuit can realize rapid detection of micro quality. The quality of adsorption sites, excitation frequency and excitation amplitude influence system jump frequency response, obtained with the optimal combination of the highest detection sensitivity of beam type, load and adsorption sites.

【學(xué)位授予單位】：大連理工大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2016
【分類號】：TP212

【參考文獻】

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本文編號：1385797