本文關(guān)鍵詞： 薄膜晶體管液晶顯示器 色斑 線寬 像素間距　出處：《液晶與顯示》2017年04期 　論文類型：期刊論文

【摘要】：TFT-LCD面板在屏幕上有斑點(diǎn)或波浪狀Mura,影響液晶顯示器的品質(zhì),經(jīng)過圖形匹配,缺陷與曝光機(jī)機(jī)臺(tái)形貌匹配。通過對(duì)異常區(qū)域特性分析,發(fā)現(xiàn)異常區(qū)域的BM CD、BM像素間距存在異常。對(duì)原因進(jìn)行模型分析:玻璃在曝光機(jī)基臺(tái)上局部區(qū)域發(fā)生彎曲,曝光距離變短,致使BM PR受光區(qū)域變小,BM CD會(huì)偏小,進(jìn)而導(dǎo)致區(qū)域性透過光不均一產(chǎn)生Mura;玻璃彎曲后BM像素間距相對(duì)于設(shè)計(jì)位置也會(huì)發(fā)生變化,從而導(dǎo)致漏光產(chǎn)生Mura。經(jīng)過實(shí)驗(yàn)驗(yàn)證,BM CD和像素間距的偏差主要由機(jī)臺(tái)凸起導(dǎo)致glass彎曲引起,可以通過降低吸附壓力和研磨機(jī)臺(tái),來改善CD差異和像素間距偏移,同時(shí)像素間距偏移漏光,也可以通過增加CD來改善。最終通過BM CD增加、研磨機(jī)臺(tái)和降低吸附壓力措施,Stage Mura不良率由10.05%下降至0.11%。
[Abstract]:The TFT-LCD panel has spots or wavy Mura on the screen, which affects the quality of liquid crystal display. After the figure matching, the defect and the appearance of the exposure machine are matched. The characteristics of the abnormal area are analyzed. It is found that there is abnormal pixel spacing in BM CDN BM in abnormal area. The model analysis shows that the glass bends in the local area of the base stage of the exposure machine, and the exposure distance becomes shorter. As a result, BM PR light receiving region becomes smaller and BM CD becomes smaller, which leads to the regional light transmission heterogeneity to produce Mura; When the glass is bent, the distance between BM pixels and the design position will also change, which will lead to the leakage of light to produce Mura. it has been verified by experiments. The deviation between BM CD and pixel spacing is mainly caused by the bending of glass caused by the raised machine. The difference of CD and the offset of pixel spacing can be improved by reducing the adsorption pressure and grinding machine. At the same time the pixel spacing offset leakage can also be improved by increasing CD. Finally increasing BM CD grinding machine and reducing adsorption pressure measures. The Stage Mura rate fell from 10.05% to 0.11.
【作者單位】： 北京京東方顯示技術(shù)有限公司;
【分類號(hào)】：TN873.93
【正文快照】： (Beijing BOE Display Technology Co.,Ltd.,Beijing100176,China)薄膜晶體管液晶顯示器(TFT-LCD)能夠產(chǎn)生色彩的變化,主要是來自彩色濾光片(ColorFilter,即CF)。液晶面板是通過驅(qū)動(dòng)集成電路(IC)的電壓改變,使液晶分子排列呈站立或扭轉(zhuǎn)狀,形成閘門來選擇背光源光線穿透與否,并

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