本文關(guān)鍵詞：基于信號處理方法的微機(jī)械陀螺誤差補(bǔ)償技術(shù)的研究　出處：《華僑大學(xué)》2016年碩士論文　論文類型：學(xué)位論文

  更多相關(guān)文章： 微機(jī)械陀螺儀 Simulink模型 ANSYS模型 正交誤差 同相誤差

【摘要】：微機(jī)械陀螺儀以其在軍用和民用這兩個方面的應(yīng)用潛力,逐漸成為眾多機(jī)構(gòu)的重點研究方向,而靜電驅(qū)動電容式微機(jī)械陀螺又以其結(jié)構(gòu)簡單、靈敏度高、溫度漂移低等優(yōu)點成為研究熱點之一。但微機(jī)械陀螺傳感器存在著各種非理想效應(yīng),其中靜電驅(qū)動電容式微機(jī)械陀螺主要包括正交誤差和同相誤差這兩種非理想效應(yīng),這兩種非理想效應(yīng)會嚴(yán)重制約微機(jī)械陀螺儀的性能。首先,在理論上了解微機(jī)械陀螺儀非理想效應(yīng)產(chǎn)生的根本原因后,本文用ANSYS軟件分別建立雙質(zhì)量塊微機(jī)械陀螺儀模型和全對稱結(jié)構(gòu)微機(jī)械陀螺儀模型,仿真這兩種陀螺儀中非理想效應(yīng)產(chǎn)生的原理,通過陀螺儀理想狀態(tài)模型和存在非理想效應(yīng)模型的仿真我們可以看到陀螺儀工作時候的內(nèi)部運(yùn)動狀態(tài),以及對比分析陀螺儀非理想效應(yīng)對其性能產(chǎn)生的影響,仿真結(jié)果表明這兩種非理想效應(yīng)都會對微機(jī)械陀螺儀中心模塊的運(yùn)動產(chǎn)生影響,正交誤差使微機(jī)械陀螺儀中心模塊偏離理想位置的幅度遠(yuǎn)大于同相誤差產(chǎn)生的影響。其次,本文分析了兩種結(jié)構(gòu)微機(jī)械陀螺儀正交誤差、同相誤差產(chǎn)生的原因,根據(jù)分析的結(jié)果修改了微機(jī)械陀螺儀在驅(qū)動方向和檢測方向上的動力學(xué)方程,根據(jù)微機(jī)械陀螺儀動力學(xué)方程分別建立理想情況、只存在同相誤差時、只存在正交誤差時和同時存在兩種誤差時的Simulink模型并進(jìn)行仿真。Simulink模型的仿真結(jié)果顯示,正交誤差是微機(jī)械陀螺儀的主要干擾誤差,對陀螺儀性能有很大影響,而同相誤差的影響極其微弱,可以忽略不計。最后,本文基于微機(jī)械陀螺儀角速度信號提取原理,分析非理想效應(yīng)產(chǎn)生的干擾信號和有用角速度信號之間的區(qū)別,提出了分別消除微機(jī)械陀螺儀正交誤差和同相誤差產(chǎn)生的影響的方案,并將方案進(jìn)行綜合,使之可以同時消除正交誤差和同相誤差產(chǎn)生的影響,之后用MATLAB對方案進(jìn)行仿真,仿真結(jié)果表明該方案可以有效抑制這兩種非理想效應(yīng)產(chǎn)生的影響。本文研究成果有望大幅度提高微機(jī)械陀螺傳感器系統(tǒng)的整體性能,對于推動微機(jī)械陀螺傳感器的研究事業(yè)發(fā)展,加速其產(chǎn)業(yè)化進(jìn)程具有重要作用。
[Abstract]:Micromachined gyroscope (MSG) has become the key research direction of many institutions for its potential application in both military and civil fields, while electrostatic driven capacitive micromachined gyroscope (MSG) is characterized by its simple structure and high sensitivity. The advantages of low temperature drift have become one of the research hotspots, but there are various non-ideal effects in the micro-mechanical gyroscope sensor. The electrostatic driven capacitive micromachined gyroscope mainly includes two kinds of non-ideal effects, orthogonal error and in-phase error. These two non-ideal effects will seriously restrict the performance of micro-mechanical gyroscope. First of all. After understanding the fundamental causes of the non-ideal effect of micromachined gyroscopes in theory, a two-mass micromechanical gyroscope model and an all-symmetric micromachined gyroscope model are established by using ANSYS software. Through the simulation of the ideal state model and the non-ideal effect model of the gyroscope, we can see the internal motion state of the gyroscope. The simulation results show that both of the two non-ideal effects will affect the motion of the center module of the micro-mechanical gyroscope. The quadrature error causes the center module of micromachined gyroscope to deviate from the ideal position much more than the influence of the in-phase error. Secondly, this paper analyzes the causes of the orthonormal error and the in-phase error of two kinds of micromachined gyroscopes. According to the results of the analysis, the dynamic equations of the micromachined gyroscopes in the driving direction and the detecting direction are modified. According to the dynamic equations of the micromachined gyroscopes, the ideal conditions are established, and only the in-phase errors exist. When there are only orthogonal errors and two kinds of errors at the same time, the Simulink model is simulated. Orthogonal error is the main interference error of micromachined gyroscope, which has great influence on the performance of gyroscope, but the effect of in-phase error is very weak, which can be ignored. Based on the principle of extracting angular velocity signals from micromachined gyroscopes, this paper analyzes the difference between the interference signals produced by non-ideal effects and the useful angular velocity signals. A scheme to eliminate the effects of orthogonal and in-phase errors on micromachined gyroscopes is proposed, and the scheme is synthesized to eliminate the effects of orthogonal errors and in-phase errors at the same time. Then the scheme is simulated with MATLAB. Simulation results show that the proposed scheme can effectively suppress the effects of these two non-ideal effects. The research results in this paper are expected to greatly improve the overall performance of micro-mechanical gyroscope sensor system. It plays an important role in promoting the research of micro-mechanical gyroscope sensor and accelerating its industrialization.
【學(xué)位授予單位】：華僑大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2016
【分類號】：TN96
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本文編號：1401236