本文關(guān)鍵詞： 多波長(zhǎng) 表面形貌 形貌拼接 ICP算法　出處：《湖北工業(yè)大學(xué)》2017年碩士論文　論文類(lèi)型：學(xué)位論文

【摘要】：在微機(jī)電系統(tǒng)快速發(fā)展的今天,各行業(yè)對(duì)微小結(jié)構(gòu)的加工精度要求逐漸提高,往往需要獲得對(duì)微表面表面輪廓信息�？偟膩�(lái)看微機(jī)電系統(tǒng)在尺寸方面具有毫米級(jí)和微米級(jí)的特點(diǎn),對(duì)此在進(jìn)行微表面形貌測(cè)量時(shí)應(yīng)同時(shí)滿足大尺寸、高分辨率的特點(diǎn)。本文在對(duì)三維形貌拼接的方法和多波長(zhǎng)干涉測(cè)量方法研究的基礎(chǔ)上,設(shè)計(jì)了多波長(zhǎng)表面形貌的干涉測(cè)量系統(tǒng),通過(guò)控制二維平移臺(tái)的移動(dòng),實(shí)現(xiàn)兩兩相鄰的形貌圖像之間具有較好的重合區(qū)域來(lái)進(jìn)行拼接。從而獲得大尺寸、空間高分辨率的完整三維形貌圖像。本文主要完成的內(nèi)容有:(1)針對(duì)三維形貌圖像數(shù)據(jù)的獲取,討論了相移干涉測(cè)量、雙波長(zhǎng)干涉測(cè)量和多波長(zhǎng)干涉測(cè)量的原理并且分析了它們的優(yōu)缺點(diǎn),從而引出了本文采用的多波長(zhǎng)干涉與相移掃描相結(jié)合的形貌測(cè)量方法。(2)依據(jù)現(xiàn)有的干涉測(cè)量系統(tǒng),為獲得大尺寸高分辨率的三維表面形貌,引入了二維平移臺(tái)控制系統(tǒng),搭建了多波長(zhǎng)表面形貌干涉測(cè)量系統(tǒng),并且分析了系統(tǒng)結(jié)構(gòu)的組成。介紹了在本文拼接算法研究中需要的二維平移臺(tái)控制系統(tǒng)主要包括二維平移臺(tái)、驅(qū)動(dòng)電機(jī)、運(yùn)動(dòng)控制卡等。(3)研究了目前關(guān)于三維形貌的拼接方法,分析了在多波長(zhǎng)干涉測(cè)量系統(tǒng)下測(cè)量的三維形貌的誤差來(lái)源來(lái)尋找合適的三維形貌圖像的拼接方法,將傳統(tǒng)的ICP算法進(jìn)行改進(jìn)并且給出了本文三維形貌的拼接方法及具體步驟。(4)用搭建的多波長(zhǎng)表面形貌干涉測(cè)量系統(tǒng)進(jìn)行量實(shí)驗(yàn)。分別使用方波多刻線樣板、正弦波多刻線樣板進(jìn)行形貌恢復(fù)的實(shí)驗(yàn),并計(jì)算其Ra的值與中國(guó)計(jì)量院的結(jié)果相比,相對(duì)誤差分別為4.03%和4.16%,表明了本文的多波長(zhǎng)表面形貌干涉測(cè)量系統(tǒng)的可行性。并且研究了重合區(qū)域的選取對(duì)拼接后形貌圖像的影響。
[Abstract]:With the rapid development of MEMS, the machining precision of micro structure has been gradually improved in various industries. It is often necessary to obtain the profile information of the micro surface. Generally speaking, the micro electromechanical system has the characteristics of millimeter and micron in size, which should be satisfied with the large size in the measurement of the micro surface topography at the same time. The characteristics of high resolution. Based on the research of 3D topography splicing method and multi-wavelength interferometry method, a multi-wavelength surface topography interferometry system is designed, which can control the movement of two-dimensional translation platform. It is realized that there is a good overlap region between the two adjacent morphologies to be spliced to obtain the large size. The main content of this paper is: 1) aiming at the acquisition of 3D image data, phase shift interferometry is discussed. The principle of dual-wavelength interferometry and multi-wavelength interferometry are analyzed and their advantages and disadvantages are analyzed. Therefore, the method of multi-wavelength interferometry combined with phase-shift scanning is introduced in this paper. According to the existing interferometric measurement system, 3D surface topography with large size and high resolution is obtained. The control system of two-dimensional translation platform is introduced, and a multi-wavelength surface topography interferometry system is built. And the composition of the system structure is analyzed. The control system of the two-dimensional translation platform which is needed in the research of the splicing algorithm in this paper is mainly composed of the two-dimensional translation platform and the driving motor. Motion control card, etc.) the present methods of 3D morphology stitching are studied. The error source of 3D topography measured in multi-wavelength interferometry system is analyzed to find a suitable method of 3D image stitching. The traditional ICP algorithm is improved and the stitching method of 3D topography and its concrete steps are given. The multi-wavelength surface topography interferometry system was used to carry out quantitative experiments. Square wave multi-line template was used respectively. The experiment of the shape recovery of sinusoidal multi-line template is carried out, and the relative errors of Ra are 4.03% and 4.16%, respectively, compared with the results of the Chinese Institute of Metrology. The feasibility of the multi-wavelength surface topography interferometry system is demonstrated, and the influence of the coincidence region on the stitched image is studied.
【學(xué)位授予單位】：湖北工業(yè)大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2017
【分類(lèi)號(hào)】：TH-39;TP391.41

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