本文選題：氣體潤滑　切入點(diǎn)：擠壓膜　出處：《南京航空航天大學(xué)》2012年碩士論文　論文類型：學(xué)位論文

【摘要】：氣體擠壓膜潤滑是一種新型的潤滑方式，它通過壓電陶瓷或者其他方式使得兩表面發(fā)生法線方向的高頻振動(dòng)，使其中的氣體受到不斷的擠壓從而產(chǎn)生較大的氣膜壓力。相對于其他潤滑方式，具有結(jié)構(gòu)簡單、有自適應(yīng)能力等優(yōu)點(diǎn)，但由于氣體擠壓膜的承載能力相對較小，因而多應(yīng)用于輕載、精密儀器以及微電子系統(tǒng)行業(yè)等。氣體擠壓膜潤滑有著廣闊的應(yīng)用前景，對氣體擠壓膜的研究具有重要的意義。隨著微細(xì)加工和微型機(jī)械技術(shù)的發(fā)展，氣體潤滑中的氣膜厚度越來越小，甚至達(dá)到納米級(jí)別，在這種情況下，必須考慮表面粗糙度以及氣體稀薄效應(yīng)對于氣體擠壓膜的影響。 本課題首先建立了氣體擠壓膜潤滑的基本理論模型，并通過數(shù)值方法對氣體擠壓膜雷諾方程進(jìn)行了求解，得到了氣體擠壓膜的承載能力，并分析了激振振幅、氣膜厚度、激振頻率等因素對于氣體擠壓膜承載能力的影響。隨后針對粗糙表面，根據(jù)平均膜厚模型和平均流量模型對氣體擠壓膜雷諾方程進(jìn)行了修正，討論了不同的表面粗糙度對于氣體擠壓膜承載能力的影響。對于極薄的氣膜，通過壁面速度滑移條件，分析得到了氣體稀薄效應(yīng)影響下氣膜壓力的變化情況。最后研究了表面粗糙度和氣體稀薄效應(yīng)的綜合影響。 實(shí)驗(yàn)部分，在理論分析的基礎(chǔ)上，對氣體擠壓膜的性能進(jìn)行了實(shí)驗(yàn)測試，，包括實(shí)驗(yàn)臺(tái)和氣膜承載力測量裝置的設(shè)計(jì)、實(shí)驗(yàn)裝置的選擇和調(diào)試以及實(shí)驗(yàn)數(shù)據(jù)的獲取與處理等。 理論和實(shí)驗(yàn)的結(jié)果表明，超聲振動(dòng)可以形成具有一定承載能力的氣體擠壓膜，其承載能力由多因素決定，其中比較重要的是激振的振幅和氣膜的厚度。此外通過選取合適的加工方法，在氣體擠壓膜上下表面得到一定的紋理，可以一定程度的增大氣膜承載力。而當(dāng)氣體擠壓膜膜厚達(dá)到亞微米甚至納米量級(jí)時(shí)，氣體稀薄效應(yīng)對于氣體擠壓膜的影響非常明顯。
[Abstract]:Gas extrusion film lubrication is a new type of lubrication, which causes high frequency vibration in the normal direction of the two surfaces through piezoelectric ceramics or other means. Compared with other lubrication methods, it has the advantages of simple structure and adaptive ability, but the bearing capacity of the gas extrusion film is relatively small. Therefore, it is widely used in light load, precision instruments and microelectronic system industries. The lubrication of gas extrusion film has a broad application prospect, which is of great significance to the study of gas extrusion film. With the development of micro machining and micro mechanical technology, The thickness of gas film in gas lubrication is becoming smaller and smaller, even to the nanometer level. In this case, the effect of surface roughness and gas rarefaction on the gas extrusion film must be considered. In this paper, the basic theoretical model of gas extrusion film lubrication is established, and the Reynolds equation of gas extrusion film is solved by numerical method. The bearing capacity of gas extrusion film is obtained, and the amplitude of exciting vibration and the thickness of gas film are analyzed. The effect of exciting frequency on the bearing capacity of gas extrusion film is studied. Then the Reynolds equation of gas extrusion film is modified according to the average film thickness model and the average flow rate model for the rough surface. The influence of different surface roughness on the bearing capacity of gas extrusion film is discussed. The variation of film pressure under the influence of gas rarefaction effect is obtained. Finally, the comprehensive effect of surface roughness and gas rarefaction effect is studied. In the experimental part, based on the theoretical analysis, the performance of the gas extrusion film is tested, including the design of the test bench and the measuring device for the bearing capacity of the film, the selection and debugging of the experimental device, the acquisition and processing of the experimental data, etc. The theoretical and experimental results show that ultrasonic vibration can form a gas extrusion film with certain bearing capacity, and its bearing capacity is determined by many factors. The amplitude of the excitation and the thickness of the film are more important. In addition, a certain texture is obtained on the upper and lower surface of the gas extrusion film by selecting the appropriate processing method. When the thickness of gas extrusion film reaches sub-micron or even nanometers, the effect of gas rarefaction on gas extrusion film is very obvious.
【學(xué)位授予單位】：南京航空航天大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2012
【分類號(hào)】：TH117.2

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