【摘要】：精密和超精密加工技術(shù)己經(jīng)成為現(xiàn)代機(jī)械制造中重要的組成部分和發(fā)展方向,為了滿足零件曲面的復(fù)雜性和表面精度,對(duì)精密機(jī)床的加工精度要求已越來(lái)越高。平動(dòng)軸作為機(jī)床的關(guān)鍵部件,它的精度直接影響加工精度。由光柵尺定位、直線導(dǎo)軌導(dǎo)向、直線電機(jī)驅(qū)動(dòng)提高了平動(dòng)軸的精度,但內(nèi)部熱源與環(huán)境溫度的變化會(huì)造成平動(dòng)軸熱變形,產(chǎn)生的熱誤差對(duì)平動(dòng)軸精度造成很大影響。因此有必要對(duì)其精度進(jìn)行分析,對(duì)熱誤差產(chǎn)生原因和變化規(guī)律進(jìn)行研究,并建立精度較高的數(shù)學(xué)模型,為誤差補(bǔ)償提供準(zhǔn)確的數(shù)據(jù)。本文以光柵尺定位、直線導(dǎo)軌導(dǎo)向、直線電機(jī)驅(qū)動(dòng)的平動(dòng)軸為研究對(duì)象,主要從以下幾方面內(nèi)容進(jìn)行了研究：1)對(duì)平動(dòng)軸誤差元素進(jìn)行分析,分析產(chǎn)生熱誤差的原因,利用齊次變換矩陣對(duì)誤差的運(yùn)動(dòng)學(xué)關(guān)系進(jìn)行解析,建立包含三項(xiàng)熱漂移誤差的誤差傳遞矩陣,通過(guò)對(duì)熱漂移誤差的分離,建立了只包含熱漂移誤差的空間誤差模型,找到熱漂移誤差影響平動(dòng)軸精度的機(jī)理。2)利用有限元方法分別對(duì)直線導(dǎo)軌和光柵尺進(jìn)行熱特性分析,通過(guò)仿真結(jié)果分析得到兩者熱變形引起熱漂移誤差的大小及變化規(guī)律,并得到光柵尺對(duì)于溫度的變化極為敏感,熱變形產(chǎn)生的熱漂移誤差會(huì)極大的改變平動(dòng)軸的定位誤差。3)通過(guò)檢測(cè)平動(dòng)軸不同狀態(tài)下的直線度誤差與定位誤差得到熱漂移誤差,來(lái)驗(yàn)證仿真結(jié)果。通過(guò)熱漂誤差大小的比較,得到由光柵尺熱變形引起的熱漂移誤差是熱誤差的主要部分。4)結(jié)合光柵尺熱膨脹對(duì)定位誤差影響的機(jī)理,通過(guò)實(shí)驗(yàn)數(shù)據(jù)完成平動(dòng)軸定位誤差中幾何誤差與熱漂誤差的分離,并建立熱漂移誤差模型,驗(yàn)證得到模型精度較高,此模型可以作為誤差補(bǔ)償?shù)幕A(chǔ)。
[Abstract]:Precision and ultra-precision machining technology has become an important part and development direction in modern mechanical manufacturing. In order to meet the complexity and surface accuracy of parts surface, the precision of precision machine tools has been more and more demanding. As the key component of machine tool, the accuracy of the translational shaft directly affects the machining accuracy. The accuracy of the translational shaft is improved by the orientation of the grating ruler, the guide of the linear guideway and the driving of the linear motor. However, the change of the internal heat source and the ambient temperature will cause the thermal deformation of the translational shaft, and the thermal error will have a great influence on the accuracy of the translational shaft. Therefore, it is necessary to analyze its accuracy, to study the cause and variation of thermal error, and to establish a mathematical model with high accuracy to provide accurate data for error compensation. In this paper, the position of grating ruler, the guide of linear guideway and the translational shaft driven by linear motor are taken as the research object. The main contents are as follows: 1) the error elements of the translational shaft are analyzed, and the causes of thermal error are analyzed. The kinematics relation of the error is analyzed by using the homogeneous transformation matrix, and the error transfer matrix containing three thermal drift errors is established. By separating the thermal drift error, a spatial error model containing only the thermal drift error is established. The mechanism that the thermal drift error affects the accuracy of the translational shaft is found. 2) the thermal characteristics of the linear guideway and the grating ruler are analyzed by the finite element method, and the magnitude and variation of the thermal drift error caused by the thermal deformation are obtained by the simulation results. It is also obtained that the grating ruler is very sensitive to the change of temperature, and the thermal drift error caused by thermal deformation will greatly change the positioning error of the translational shaft. 3) the thermal drift error is obtained by detecting the straightness error and the positioning error of the translational axis in different states. To verify the simulation results. By comparing the magnitude of the thermal drift error, the thermal drift error caused by the thermal deformation of the grating ruler is the main part of the thermal error. 4) the mechanism of the influence of the thermal expansion of the grating ruler on the positioning error is obtained. The separation of the geometric error and the thermal drift error in the positioning error of the translational axis is completed by the experimental data, and the thermal drift error model is established to verify that the accuracy of the model is high. This model can be used as the basis for error compensation.
【學(xué)位授予單位】：廣東工業(yè)大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2015
【分類號(hào)】：TG502.3

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