發(fā)布時間：2018-10-24 16:36

【摘要】：砂輪表面三維形貌的準(zhǔn)確測量對工件表面質(zhì)量的有效預(yù)測和控制極為重要。在目前砂輪離線測量中,需要砂輪從磨床上拆卸后重新定位測量,不僅可能改變原有的基準(zhǔn)面和基準(zhǔn)點,影響測量位置和測量精度,而且拆卸過程也增加了從在位到離線定位工作。為了獲得在位砂輪表面形貌參數(shù),從而獲得更為準(zhǔn)確地砂輪全壽命表面形貌變化過程,需研制在位檢測系統(tǒng)。然而為了實現(xiàn)這一功能,一方面需要檢測系統(tǒng)具備多自由度精確運(yùn)動功能,以適應(yīng)系列尺寸砂輪的表面檢測,另一方面還需要該系統(tǒng)在光學(xué)系統(tǒng)的光軸方向?qū)崿F(xiàn)亞微米級的精確定位。這些要求都為在位檢測設(shè)備的研制提出新的挑戰(zhàn)。本論文針對測量砂輪表面形貌的白光垂直掃描測量系統(tǒng)和景深層析測量系統(tǒng)集成測量平臺,旨在設(shè)計測量精密位移工作臺,從功能需求和精度需求上分析研究在位精密位移工作臺整體方案的布局,重點分析位移導(dǎo)向設(shè)計及關(guān)鍵部件的選型分析,以及工作臺主體結(jié)構(gòu)的有限元分析和優(yōu)化,最后進(jìn)行實驗測試驗證。主要研究工作包括:(1)從工作臺的檢測應(yīng)用背景分析,提出所設(shè)計工作臺的功能需求及工作臺技術(shù)指標(biāo)。研究在位精密位移工作臺整體方案的設(shè)計以及測量系統(tǒng)控制策略的實現(xiàn)。完成工作臺位移結(jié)構(gòu)的導(dǎo)向設(shè)計,針對關(guān)鍵部件導(dǎo)軌、絲桿、步進(jìn)電機(jī)、壓電陶瓷微定位平臺以及光柵計量反饋部件進(jìn)行選型分析,通過裝配尺寸鏈計算推導(dǎo)主要裝配部位相關(guān)零件加工尺寸公差,并指導(dǎo)加工。(2)對運(yùn)動機(jī)構(gòu)關(guān)鍵運(yùn)動自由度進(jìn)行有限元參數(shù)化優(yōu)化設(shè)計。完成精密位移工作臺主體結(jié)構(gòu)Z向立柱的有限元分析,分析立柱承受負(fù)載所允許最大變形位移量容許值,對立柱結(jié)構(gòu)改進(jìn)和優(yōu)化,提升了立柱的結(jié)構(gòu)性能,優(yōu)化后的最大變形位移量為5.62μm,且固有頻率基頻與優(yōu)化前相比提升了20.5%,立柱結(jié)構(gòu)的可靠性得到保證。同時完成精密位移工作臺的關(guān)鍵連接件結(jié)構(gòu)靜力學(xué)分析,判斷結(jié)構(gòu)的合理性和可行性。(3)加工制作了在位精密位移工作臺物理樣機(jī)并進(jìn)行測試驗證,包括工作臺位移定位精度測試評定、位移直線度測試評定,經(jīng)實驗測定,實現(xiàn)X方向定位精度達(dá)到4.50μm,Y方向定位精度達(dá)到6.97μm,Z方向粗級定位精度達(dá)到5.87μm,精級定位精度為0.08μm。且各軸直線度也達(dá)到了檢測系統(tǒng)測量要求。通過論文的理論分析和實驗研究,驗證了在位砂輪表面形貌測量系統(tǒng)精密位移工作臺滿足砂輪測量的要求。
[Abstract]:It is very important for the effective prediction and control of the surface quality of the grinding wheel to accurately measure the 3D surface topography of the grinding wheel. In the current off-line measurement of grinding wheel, it is necessary for the grinding wheel to be removed from the grinding machine and then repositioned for measurement. It is not only possible to change the original datum and datum point, but also to affect the measuring position and measuring precision. And the disassembly process also increases the work from on-line to off-line positioning. In order to obtain the surface morphology parameters of in-situ grinding wheel and obtain more accurate change process of the surface morphology of the grinding wheel throughout its lifetime, an in-situ detection system should be developed. However, in order to realize this function, on the one hand, it is necessary for the detection system to have the function of accurate motion of multiple degrees of freedom, so as to adapt to the surface detection of grinding wheel of series size. On the other hand, it is necessary for the system to realize the accurate positioning of sub-micron in the optical axis direction of the optical system. These requirements pose new challenges for the development of in-situ testing equipment. In this paper, the white light vertical scanning measuring system and the depth of field measurement system integrated measuring platform are used to measure the surface morphology of grinding wheel. The purpose of this paper is to design a precision displacement measuring table. In this paper, the layout of the overall scheme of the in-situ precision displacement table is analyzed from the aspects of function requirement and precision requirement, and the design of displacement orientation and the selection of key components, as well as the finite element analysis and optimization of the main structure of the table are analyzed. Finally, the experimental test is carried out. The main research works are as follows: (1) the functional requirements and technical specifications of the designed workbench are put forward by analyzing the background of the workbench detection and application. The design of the overall scheme of the precision displacement table and the realization of the control strategy of the measurement system are studied. The guide design of the displacement structure of the worktable is completed, and the selection and analysis of the guide rail, the wire rod, the stepping motor, the piezoelectric ceramic micro-positioning platform and the grating metering feedback parts are carried out. Through the calculation of assembly dimension chain, the machining dimension tolerance of the main assembly parts is deduced, and the machining is guided. (2) the finite element parameterized optimization design of the key kinematic degrees of freedom of the motion mechanism is carried out. The finite element analysis of the Z-direction column of the main structure of the precision displacement table is completed, and the allowable maximum deformation displacement of the column under load is analyzed. The structure of the column is improved and optimized, and the structural performance of the column is improved. The maximum deformation displacement after optimization is 5.62 渭 m, and the fundamental frequency of the natural frequency is 20.55.The reliability of the column structure is guaranteed. At the same time, the structural statics analysis of the key connectors of the precision displacement table is completed to judge the rationality and feasibility of the structure. (3) the physical prototype of the in-situ precision displacement table is manufactured and tested and verified. The results show that the accuracy of X-direction positioning is 4.50 渭 m / y and that of Z direction is 5.87 渭 m and 0.08 渭 m respectively, and the precision of X direction is 4.50 渭 m ~ (-1) 渭 m ~ (-1), which is 5.87 渭 m in Z direction and 0.08 渭 m in precision level. The straightness of each axis also meets the requirement of measuring system. Through theoretical analysis and experimental study, it is verified that the precision displacement table of in-situ grinding wheel surface topography measurement system can meet the requirements of grinding wheel measurement.
【學(xué)位授予單位】：華僑大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2016
【分類號】：TG580.2
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本文編號：2291927