【摘要】：隨著微電子技術(shù)、通信、航天和生物工程等學(xué)科的迅速發(fā)展,人們對(duì)精密機(jī)床的加工精度要求越來(lái)越高。其中,微進(jìn)給工作臺(tái)系統(tǒng)是精密機(jī)床加工的重要部件之一,目前已成為熱點(diǎn)研究方向。已研制的微進(jìn)給系統(tǒng)往往實(shí)現(xiàn)了單一技術(shù)指標(biāo),無(wú)法廣泛應(yīng)用于實(shí)際工程中。本論文對(duì)此開(kāi)展的研究工作是:研制一套差動(dòng)式微進(jìn)給實(shí)驗(yàn)工作臺(tái)系統(tǒng),三維建模與仿真,對(duì)系統(tǒng)開(kāi)環(huán)下誤差進(jìn)行檢測(cè)和標(biāo)定,分析采樣雙閉環(huán)的誤差補(bǔ)償方法,研究基于誤差建模和差動(dòng)控制的自適應(yīng)補(bǔ)償方法,實(shí)現(xiàn)誤差的動(dòng)態(tài)補(bǔ)償。本文首先綜述了國(guó)內(nèi)外微進(jìn)給系統(tǒng)研究現(xiàn)狀,討論了各類(lèi)微進(jìn)給系統(tǒng)特點(diǎn)及發(fā)展趨勢(shì),通過(guò)對(duì)目前各種大行程超精密定位系統(tǒng)的分析比較,根據(jù)低成本和高速度的原則,確定了運(yùn)動(dòng)控制卡、交流伺服電機(jī)加差動(dòng)疊加數(shù)控工作臺(tái)的設(shè)計(jì)方案,進(jìn)行了相應(yīng)的軟、硬件設(shè)計(jì),完成系統(tǒng)安裝和調(diào)試。其次,闡述了滾珠絲杠副的特點(diǎn)和誤差規(guī)律,分析了伺服進(jìn)給系統(tǒng)機(jī)械特性和動(dòng)、靜態(tài)特性,研究了差動(dòng)式微進(jìn)給系統(tǒng)數(shù)學(xué)模型,使用Solid Works軟件建立三維模型,討論在單一摩擦因素下Adams運(yùn)動(dòng)仿真結(jié)果。然后,分析了系統(tǒng)定位誤差的來(lái)源、影響因素和補(bǔ)償方法,研究了采樣雙閉環(huán)的補(bǔ)償原理,實(shí)驗(yàn)結(jié)果表明采樣雙閉環(huán)的補(bǔ)償方法能夠有效提高系統(tǒng)靜態(tài)定位精度。最后,探究了誤差動(dòng)態(tài)補(bǔ)償問(wèn)題,在分析了常見(jiàn)的誤差動(dòng)態(tài)補(bǔ)償方法基礎(chǔ)上,考慮一種結(jié)合誤差建模和差動(dòng)控制的自適應(yīng)補(bǔ)償方法;采用灰色理論的誤差建模方法所需統(tǒng)計(jì)數(shù)據(jù)少,計(jì)算量小,可以有效預(yù)測(cè)系統(tǒng)誤差,通過(guò)軟件程序控制系統(tǒng)差動(dòng),工作臺(tái)可以在電機(jī)最佳轉(zhuǎn)速范圍內(nèi)按照預(yù)測(cè)路徑快速補(bǔ)償系統(tǒng)誤差,實(shí)現(xiàn)自適應(yīng)補(bǔ)償。通過(guò)理論研究和實(shí)驗(yàn)分析,基于誤差建模和差動(dòng)控制的自適應(yīng)補(bǔ)償方法,可以實(shí)現(xiàn)誤差動(dòng)態(tài)補(bǔ)償,有效提高系統(tǒng)精度和靈敏度,該方法成本低、實(shí)用性強(qiáng),無(wú)需建立復(fù)雜數(shù)學(xué)模型和補(bǔ)償模型,給工程應(yīng)用提供了一種有效提高精度的方法,可以在現(xiàn)有條件下應(yīng)用不同的結(jié)構(gòu)設(shè)計(jì)和合適的補(bǔ)償方法滿足整個(gè)系統(tǒng)對(duì)高精度和大行程的雙重要求,并為微進(jìn)給機(jī)構(gòu)的設(shè)計(jì)提供了新的思路。
[Abstract]:With the rapid development of microelectronics, communication, spaceflight and bioengineering, the precision of precision machine tools is becoming more and more important. Among them, micro-feed table system is one of the important parts of precision machine tool processing, and has become a hot research direction. The developed micro-feed system often realizes a single technical index and can not be widely used in practical engineering. The research work of this thesis is as follows: develop a set of differential micro-feed experiment bench system, 3D modeling and simulation, detect and calibrate the system error under open loop, analyze the error compensation method of sampling double closed loop. The adaptive compensation method based on error modeling and differential control is studied to realize dynamic error compensation. In this paper, the current research situation of micro-feed system at home and abroad is reviewed, and the characteristics and development trend of various micro-feed systems are discussed. Through the analysis and comparison of various large-stroke ultra-precision positioning systems, according to the principle of low cost and high speed, The design scheme of the motion control card, AC servo motor plus differential superposition NC worktable is determined. The corresponding software and hardware are designed, and the system is installed and debugged. Secondly, the characteristics and error law of ball screw pair are expounded, the mechanical characteristics and dynamic and static characteristics of servo feed system are analyzed, the mathematical model of differential micro-feed system is studied, and the three-dimensional model is established by using Solid Works software. The simulation results of Adams motion under a single friction factor are discussed. Then, the source, influencing factors and compensation method of the positioning error of the system are analyzed, and the compensation principle of the sampling double closed loop is studied. The experimental results show that the compensation method of the sampling double closed loop can effectively improve the static positioning accuracy of the system. Finally, the problem of dynamic error compensation is discussed. Based on the analysis of common error dynamic compensation methods, an adaptive compensation method combining error modeling and differential control is considered. The error modeling method based on grey theory requires less statistical data and less calculation, so it can effectively predict the system error and control the system differential by software program. The table can quickly compensate the system error according to the predicted path in the range of the best speed of the motor and realize adaptive compensation. Through theoretical research and experimental analysis, the adaptive compensation method based on error modeling and differential control can realize dynamic error compensation and improve system precision and sensitivity effectively. This method has the advantages of low cost and strong practicability. There is no need to establish complex mathematical model and compensation model, which provides an effective method to improve the accuracy of engineering application. Different structural designs and appropriate compensation methods can be applied to meet the dual requirements of the whole system for high precision and large stroke under the existing conditions. It also provides a new way of thinking for the design of micro feed mechanism.
【學(xué)位授予單位】：上海工程技術(shù)大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2015
【分類(lèi)號(hào)】：TG502.3

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