本文選題：金屬玻璃膜 + 相變特性　； 參考：《華中科技大學》2015年博士論文

【摘要】：Mg-基金屬玻璃材料在其非晶態(tài)具有異常高的硬度,晶化后的物理特性則會發(fā)生根本性的改變。本文以Mg-基金屬玻璃膜的工程應用為未來目標,研究了其相變特性和機械性能。 本文首先通過磁控濺射方法成功制備出了Mg-Cu-Y金屬玻璃膜。磁控濺射中使用不同的濺射氬氣壓可制備出元素比例不同的Mg-基金屬玻璃膜。其晶化后電阻率和反射率會發(fā)生變化。經(jīng)研究對比發(fā)現(xiàn),0.5Pa氬氣壓濺射沉積的Mg58Cu29Y13金屬玻璃膜在非晶態(tài)和晶態(tài)間有最大的電阻率差異(36.4%)和反射率差異,因此其有潛力成為相變存儲器的記錄層。 進一步研究發(fā)現(xiàn),Mg58Cu29Y13金屬玻璃膜在玻璃轉(zhuǎn)變溫度以上會發(fā)生相分離現(xiàn)象,富Mg區(qū)的產(chǎn)生使得形核激活能大大降低,在晶化溫度以上的形核速率得到了大大提升。這種Mg58Cu29Y13金屬玻璃膜具有的高速相變特性對于相變存儲器應用有重要意義。 在傳統(tǒng)Mg合金上沉積Mg-基金屬玻璃膜可以提高Mg合金的耐磨和耐腐蝕特性。對Mg合金進行機械研磨處理(SMAT)可以在Mg合金的表面引入硬化層,從而減弱金屬玻璃膜與基體硬度不匹配的程度,并且由于基底表面擴散活性的提升,金屬玻璃膜與基底的吸附能力會得到增強。硬度不匹配程度的減弱與吸附能力的增強使得這種沉積Mg-基金屬玻璃膜的SMAT處理的Mg合金具有抗高載荷磨損及沖擊特性。 在拉伸實驗中,沉積在SMAT處理的Mg合金表面的Mg-基金屬玻璃膜還可以有效抑制裂紋的擴展,從而使Mg合金的拉伸塑性得到大大提升。 論文對Mg-基金屬玻璃膜的納米級異質(zhì)性結(jié)構(gòu)進行了驗證。為減少金屬玻璃膜中的這種異質(zhì)結(jié)構(gòu),我們在磁控濺射過程中采用低速沉積、基片適當加熱并同時施加基片負偏壓的方法制備出了超硬的Mg-基金屬玻璃膜,使其硬度從5.18GPa提升至6.25GPa。由于超硬金屬玻璃膜中納米級異質(zhì)結(jié)構(gòu)的較少,從TTT相圖分析還可看出其還具備超快晶化特性。因此,這種超硬金屬玻璃膜對其機械應用及制備超快相變存儲器有重要意義。 當采用晶態(tài)Mg合金做襯底時,可制備出具有顆粒狀結(jié)構(gòu)的Mg-基金屬玻璃膜,主要原因是由于同質(zhì)沉積的結(jié)果。通過提高磁控濺射過程中的基片負偏壓,可以使顆粒的尺寸由幾微米減小直至觀察不到顆粒。使用SMAT處理的Mg合金作為基底,還可制備出顆粒尺寸為～25nm的Mg-基金屬納米玻璃。這種納米玻璃在疏水性及催化特性研究方面有重要意義。
[Abstract]:Mg-based metallic glass materials have extremely high hardness in amorphous state, and the physical properties of Mg-based metallic glass materials after crystallization will be fundamentally changed. In this paper, the phase transformation and mechanical properties of Mg- based metallic glass film are studied. In this paper, Mg-Cu-Y metallic glass films were successfully prepared by magnetron sputtering. Mg-based metallic glass films with different proportion of elements can be prepared by using different sputtering argon pressure in magnetron sputtering. The resistivity and reflectivity will change after crystallization. It is found that the Mg58Cu29Y13 metallic glass films deposited by ar pressure sputtering at 0.5 Pa have the greatest difference in resistivity and reflectivity between amorphous and crystalline states, so they have the potential to be the recording layer of phase change memory. It is further found that phase separation occurs in the Mg58Cu29Y13 metallic glass film above the glass transition temperature, and the nucleation activation energy decreases greatly due to the formation of Mg-rich region, and the nucleation rate above the crystallization temperature is greatly increased. The high-speed phase change characteristics of the Mg58Cu29Y13 metallic glass film are of great significance for the application of phase change memory. The wear resistance and corrosion resistance of mg alloy can be improved by deposition of mg-base metallic glass film on traditional mg alloy. Mechanical grinding of mg alloy can introduce hardening layer on the surface of mg alloy, thus reducing the mismatch between metallic glass film and substrate hardness, and because of the enhancement of diffusion activity on the substrate surface, The adsorption ability of the metallic glass film to the substrate will be enhanced. Due to the weakening of hardness mismatch and the enhancement of adsorption ability, the mg alloy treated with SMAT deposited by Mg-based metallic glass film has the characteristics of high load wear and impact resistance. In the tensile test, the Mg-based metallic glass film deposited on the surface of mg alloy treated with SMAT can also effectively inhibit the crack growth, thus greatly improving the tensile plasticity of mg alloy. The nanoscale heterogeneity of Mg- based metallic glass films was verified in this paper. In order to reduce the heterogeneity in metallic glass films, superhard Mg-based metallic glass films were prepared by magnetron sputtering with the method of low speed deposition, proper heating of the substrate and negative bias of the substrate at the same time. The hardness was raised from 5.18GPa to 6.25GPa. Because there are few nanoscale heterostructures in the superhard metal glass film, it can be seen from the TTT phase diagram that it also has ultrafast crystallization characteristics. Therefore, this kind of superhard metallic glass film is of great significance for mechanical application and preparation of ultrafast phase change memory. When the crystalline mg alloy is used as the substrate, the Mg-based metallic glass film with granular structure can be prepared, which is mainly due to the result of homogeneous deposition. By increasing the negative bias of the substrate during the magnetron sputtering process, the particle size can be reduced from several microns until the particles can not be observed. Using mg alloy treated with SMAT as substrate, Mg-based metallic nanocrystalline glass with particle size of 25 nm can also be prepared. This kind of nanocrystalline glass is of great significance in hydrophobicity and catalytic properties.
【學位授予單位】：華中科技大學
【學位級別】：博士
【學位授予年份】：2015
【分類號】：TG139.8

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