【摘要】：鐵薄膜是目前激光狀態(tài)方程實(shí)驗(yàn)研究中重要的目標(biāo)材料,掌握其微觀結(jié)構(gòu)對于建立精密化制靶工藝及明確樣品初始物理狀態(tài)均具有基礎(chǔ)性意義。將冷軋態(tài)純鐵薄膜進(jìn)行不同溫度下的真空熱處理,采用X射線衍射儀、掃描電鏡及金相顯微鏡等儀器對樣品的微晶尺寸及微畸變、晶粒大小及取向、宏觀殘余應(yīng)力等微觀結(jié)構(gòu)參數(shù)進(jìn)行表征,研究了其微觀結(jié)構(gòu)的變化規(guī)律。結(jié)果顯示,550℃以內(nèi)樣品結(jié)構(gòu)變化以回復(fù)為主,表現(xiàn)為微晶長大、殘余應(yīng)力持續(xù)減小而晶粒形態(tài)及取向不變;550℃以上發(fā)生再結(jié)晶及晶粒長大,形成微米尺度的等軸晶,且結(jié)晶取向明顯變化;各樣品均未發(fā)生晶粒異常長大現(xiàn)象。
[Abstract]:Iron thin film is an important target material in the experimental study of laser equation of state at present. Mastering its microstructure is of fundamental significance for the establishment of precision target making process and the determination of the initial physical state of the sample. The cold rolled pure iron thin films were heat treated in vacuum at different temperatures. The microcrystal size, microdistortion, grain size and orientation of the samples were measured by X-ray diffractometer, scanning electron microscope and metallographic microscope. The microstructure parameters such as macroscopic residual stress were characterized, and the variation of microstructure was studied. The results show that the structural changes of the samples within 550 鈩，

本文編號(hào)：2490197