【摘要】：單點(diǎn)金剛石超精密加工能夠獲得納米級(jí)的低粗糙度表面。進(jìn)一步的實(shí)驗(yàn)表明,采用該工藝進(jìn)行退火態(tài)無氧銅切削,已加工表面在刀痕基礎(chǔ)上還會(huì)出現(xiàn)清晰的晶界浮凸現(xiàn)象。傳統(tǒng)的粗糙度概念無法有效表征與區(qū)分含有晶界浮凸信息的超精加工表面微觀形貌。引入分形維數(shù)概念,采用該理論中尺碼法對(duì)無氧銅超精加工表面的微觀形貌進(jìn)行分形維數(shù)計(jì)算;為降低切削刀痕信號(hào)干擾、突出晶界浮凸信息,設(shè)計(jì)表面信號(hào)帶阻濾波方法。計(jì)算結(jié)果表明,超精加工后的表面分形維數(shù)包含了加工刀痕與晶界浮凸信息,由于兩者尺度相近,傳統(tǒng)的粗糙度測(cè)量無法區(qū)分其差異;采用帶阻濾波與尺碼法耦合方式,能夠有效識(shí)別晶界浮凸特點(diǎn),定量地反映微觀尺度下超精加工表面的形貌特征信息。
[Abstract]:Single-point diamond ultra-precision machining can obtain nano-scale low roughness surface. Further experiments show that there is a clear grain boundary bump phenomenon on the machined surface on the basis of the cutter mark when the annealed oxygen-free copper cutting is carried out by this process. The traditional concept of roughness can not effectively characterize and distinguish the micro-morphology of ultra-precision machined surfaces with grain boundary bump information. The concept of fractal dimension is introduced and the fractal dimension of the surface morphology of oxygen-free copper superfinishing is calculated by using the method of scale in the theory. In order to reduce the interference of cutting tool mark signal and highlight the convex information of grain boundary, the band-stop filtering method of surface signal is designed. The calculation results show that the surface fractal dimension after ultra-precision machining contains machining tool mark and grain boundary bump information. Because of the similarity of the two scales, the traditional roughness measurement can not distinguish the difference between the machining tool marks and grain boundary buoyancy information. The coupling method of band-stop filter and scale method can effectively identify the characteristics of grain boundary bumps and quantitatively reflect the morphology information of ultra-precision machined surfaces at micro-scale.
【作者單位】： 表面物理與化學(xué)重點(diǎn)實(shí)驗(yàn)室;清華大學(xué)精密超精密制造裝備及控制北京市重點(diǎn)實(shí)驗(yàn)室;
【基金】：北京市自然科學(xué)基金面上項(xiàng)目(3152013) 清華大學(xué)摩擦學(xué)國家重點(diǎn)實(shí)驗(yàn)室自主科研重點(diǎn)項(xiàng)目(SKLT2013A01)
【分類號(hào)】：TG506

【相似文獻(xiàn)】

相關(guān)期刊論文 前10條

1 施紹裘;張懋炯;施國勇;;斷裂表面的分形維數(shù)及其測(cè)量[J];寧波大學(xué)學(xué)報(bào)(理工版);1992年02期

2 徐龍君，張代鈞，鮮學(xué)福;煤微孔表面的分形維數(shù)及其變化規(guī)律的研究[J];燃料化學(xué)學(xué)報(bào);1996年01期

3 陳三強(qiáng),劉永忠,程光旭,黃昌斌;用壓汞法計(jì)算凍干物料的表面分形維數(shù)[J];食品科學(xué);2004年07期

4 景貴成,劉福海,俞理;天然低滲巖芯分形維數(shù)變化原因分析[J];巖石力學(xué)與工程學(xué)報(bào);2005年06期

5 劉明芹;張曉光;;一種計(jì)算圖像分形維數(shù)的有效方法[J];西安科技大學(xué)學(xué)報(bào);2009年03期

6 穆在勤,龍期威;由面積-周長關(guān)系測(cè)量的分形維數(shù)與材料韌性的關(guān)系[J];材料科學(xué)進(jìn)展;1989年02期

7 蘇輝,張玉貴,閻振h，

本文編號(hào)：2443411