【摘要】：對Zr-4合金表面分別進(jìn)行多弧離子鍍TiAlSiN涂層和TiAlN涂層。利用掃描電鏡對涂層進(jìn)行表面微觀形貌觀察;利用ImageJ對涂層大顆粒分布進(jìn)行統(tǒng)計和分析;利用X射線衍射儀對涂層進(jìn)行物相分析;利用自動劃痕儀對涂層的力學(xué)性能進(jìn)行檢測;利用高溫?zé)崽幚頎t對涂層試樣進(jìn)行800℃高溫抗氧化實驗。結(jié)果表明:TiAlSiN涂層表面的大顆粒數(shù)較TiAlN涂層的少。TiAlSiN涂層中除了與TiAlN涂層共同擁有的Ti_2N、Ti_3AlN物相外,還生成了AlN物相和非晶相Si_3N_4。由于Si元素的加入引起殘余應(yīng)力,TiAlSiN涂層的膜基結(jié)合力低于TiAlN涂層。TiAlSiN涂層試樣的氧化增重遠(yuǎn)低于TiAlN涂層的氧化增重。
[Abstract]:Multi-arc ion plating TiAlSiN coating and TiAlN coating were carried out on the surface of Zr-4 alloy. The microstructure of the coating was observed by scanning electron microscope (SEM), the distribution of large particles was analyzed by ImageJ, the phase of coating was analyzed by X-ray diffractometer, and the mechanical properties of the coating were tested by automatic scratch tester. The oxidation resistance of coating samples was studied at 800 鈩，

本文編號：2374704