【摘要】：本文對以高頻等離子體為熱源,以天然高純石英粉料為原料,用固相外沉積方法制備光纖預制棒用大尺寸石英套管的沉積技術(shù)進行研究,并在研究的基礎(chǔ)上改進實驗裝置。熔制過程為:在高頻電磁場作用下,用氬氣引弧后引燃壓縮空氣,形成等離子火焰,合適微量元素含量和粒度分布的石英粉料通過供料系統(tǒng)自動傳輸?shù)降入x子燃燒器附近,經(jīng)等離子火焰高溫加熱熔融,熔融后的石英粉料附著在旋轉(zhuǎn)的中心基礎(chǔ)管上,使其直徑逐漸逐層沉積增長,最終制成一定規(guī)格尺寸及精度的大尺寸石英套管。設(shè)計開發(fā)改進的高頻等離子體感應設(shè)備的陽極范圍為10～12KV,熔制溫度1800～2100℃,沉積速率為21～23g/min。實驗結(jié)果表明,使用天然高純石英粉料利用高頻等離子體為熱源,采用固相外沉積方式可以制備出單模光纖預制棒用大尺寸石英套管。利用高頻等離子固相外沉積法熔制天然高純石英粉料制備的大尺寸石英套管,具有規(guī)格尺寸大(直徑≥150mm以上)、羥基含量低(OH≤1Oppm)、微量元素含量少(12種微量元素含量≤15ppm)、玻璃化程度高及折射率適宜等特點。制備出的大尺寸石英套管通過后續(xù)的制棒拉絲實驗,可以滿足光纖制備對大尺寸石英套管的需求。
[Abstract]:In this paper, the deposition technology of large size quartz casing for optical fiber preform rod by solid phase external deposition with high frequency plasma as heat source and natural high purity quartz powder as raw material is studied. The experimental device is improved on the basis of the research. The melting process is as follows: under the action of high frequency electromagnetic field, the compressed air is ignited by argon after arcing, and the plasma flame is formed. The quartz powder with suitable trace element content and particle size distribution is automatically transferred to the plasma burner through the feeding system. After the plasma flame is heated and melted at high temperature, the fused quartz powder is attached to the rotating central base tube, and its diameter is gradually increased layer by layer. Finally, a large size quartz casing with certain size and precision is made. The anodic range of the improved high frequency plasma induction equipment is 10 ~ 12 KV, the melting temperature is 1800 ~ 2100 鈩，

本文編號：2233773