本文選題：硅片傳輸 + 真空腔室�。� 參考：《組合機(jī)床與自動(dòng)化加工技術(shù)》2017年08期

【摘要】：文章設(shè)計(jì)一種300mm硅片真空傳輸系統(tǒng),滿足市場對硅片傳輸過程高精度,高潔凈度,高效率的需求。其中硅片傳輸腔室采用真空設(shè)計(jì),并優(yōu)化了真空腔室的結(jié)構(gòu)以適應(yīng)300mm硅片傳輸,真空度可達(dá)2×10~(-7)Torr。真空機(jī)械手采用對稱連桿直驅(qū)機(jī)械手,大氣機(jī)械手采用R-θ型機(jī)械手,其重復(fù)精度均為±0.1mm。設(shè)計(jì)了AWC糾偏檢測系統(tǒng),利用光電對射傳感器,實(shí)現(xiàn)對硅片的實(shí)時(shí)檢測及位置糾正。通過驗(yàn)證性試驗(yàn)數(shù)據(jù)分析,得到整個(gè)系統(tǒng)的整體精度、潔凈度、真空度和真空變化值滿足工作要求,驗(yàn)證了設(shè)計(jì)的合理性。
[Abstract]:In this paper, a 300mm wafer vacuum transmission system is designed to meet the market demand for high precision, high cleanliness and high efficiency in wafer transmission process. The silicon wafer transfer chamber is designed by vacuum, and the structure of the vacuum chamber is optimized to fit the 300mm wafer transmission. The vacuum degree can reach 2 脳 10 ~ (-1) -7 脳 10 ~ (-1) Torr. The vacuum manipulator adopts symmetrical connecting rod direct drive manipulator, and the atmospheric manipulator adopts R- 胃 type manipulator. The repetition accuracy of vacuum manipulator is 鹵0.1mm. A AWC detecting system is designed to detect and correct the position of silicon wafer in real time by using optoelectronic emitter sensor. Through the analysis of the verification test data, the overall accuracy, cleanliness, vacuum and vacuum variation values of the whole system are obtained, and the rationality of the design is verified.
【作者單位】： 沈陽新松機(jī)器人自動(dòng)化股份有限公司;
【基金】：國家科技重大專項(xiàng)02專項(xiàng)(2014ZX02103005)
【分類號】：TQ127.2
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本文編號：1834451