本文選題：K9光學玻璃 + 濕式化學機械磨削�。� 參考：《大連理工大學》2015年碩士論文

【摘要】：K9光學玻璃的物理、化學性能穩(wěn)定,尤其具有良好光學加工性能,因此被廣泛應用于光學儀器、高檔工藝品等多個領域。其表面精度直接影響到儀器的使用的性能。然而由于K9光學玻璃的硬脆特性,使得傳統(tǒng)的加工方法極難獲得高質量的光潔表面。本文為獲取高表面精度的K9光學玻璃,研究了潮濕環(huán)境下的化學機械磨削(Chemical Mechanical Grinding, CMG)加工方法。本文首先研究了磨具的制作工藝,之后針對K9光學玻璃的材料特性進行了干式化學機械磨削試驗。使用三維表面輪廓儀測取K9光學玻璃的表面粗糙度,通過精密電子天平稱量,間接獲得工件的材料去除率。然后在干式化學機械磨削的基礎上采用超聲霧化去離子水等液體的方法為潮濕試驗創(chuàng)造環(huán)境,對比干式、潮濕環(huán)境下的試驗結果對磨具配方進行了調整。通過向一定量的去離子水中添加不同質量的NaHC03來控制水霧的堿性,然后針對調整后的配方制成的磨具開展不同潮濕環(huán)境下的化學機械磨削試驗。開展了多因素正交試驗,研究霧化液的堿性、工件轉速、磨具轉速等因素對優(yōu)選出的Ce02型CMG磨具磨削K9玻璃的磨削效果的影響規(guī)律。結果表明在磨削液為弱堿性、磨具轉速為600r/min、工件轉速為250r/min時取得最佳的磨削效果,得到的工件表面最小粗糙度為Ra 0.515nm,獲取的最大材料去除率為95.37nm/min。磨削參數(shù)對工件表面粗糙度影響程度為：霧化液酸堿度最強,磨具轉速次之,工件轉速最弱；對平均材料去除率的影響程度為：霧化液酸堿度最強,工件轉速次之,磨具轉速最弱。潮濕環(huán)境下磨削后的K9光學玻璃的加工表面檢測后無劃痕等缺陷；并在潮濕環(huán)境下磨屑的成分中發(fā)現(xiàn)新的物質產(chǎn)生,驗證了磨削過程中發(fā)生化學反應。最后提出了潮濕環(huán)境下CMG磨具加工K9光學玻璃過程中的材料去除模型。
[Abstract]:K9 optical glass has stable physical and chemical properties, especially good optical processing properties, so it is widely used in many fields such as optical instruments, high-grade handicrafts and so on. The surface accuracy directly affects the performance of the instrument. However, due to the hard and brittle properties of K9 optical glass, it is very difficult to obtain high quality smooth surface by traditional processing methods. In order to obtain K9 optical glass with high surface accuracy, the chemical mechanical grinding method for chemical Mechanical grinding (CMG) was studied in this paper. In this paper, the manufacturing process of grinding tools is studied firstly, and then dry chemical mechanical grinding experiments are carried out for K9 optical glass. The surface roughness of K9 optical glass was measured by using 3D surface profilometer, and the material removal rate of the workpiece was obtained indirectly by weighing the precision electronic balance. On the basis of dry chemical mechanical grinding, ultrasonic atomizing deionized water and other liquids are used to create the environment for wet test. The formula of grinding tools is adjusted by comparing the test results under dry and wet conditions. The alkalinity of water mist was controlled by adding NaHC03 of different quality to a certain amount of deionized water, and then the chemical mechanical grinding experiments were carried out under different wet conditions for the abrasives made by adjusting the formula. Multi-factor orthogonal test was carried out to study the influence of atomization solution alkalinity, workpiece speed and grinding tool speed on the grinding effect of Ce02 type CMG grinding tool for grinding K9 glass. The results show that the best grinding effect is obtained when the grinding fluid is weak alkaline, the rotational speed of grinding tool is 600r / min, and the rotational speed of workpiece is 250r/min. The minimum surface roughness of the workpiece is Ra 0.515 nm, and the maximum material removal rate is 95.37 nm / min. The degree of influence of grinding parameters on workpiece surface roughness is as follows: the acidity and basicity of atomized liquid is the strongest, the rotation speed of grinding tool is the second, the speed of workpiece is the weakest, and the influence on the average material removal rate is as follows: the acidity of atomized liquid is the strongest, and the rotation speed of workpiece is the second. Grinding tools rotate at the weakest speed. There are no scratches and other defects in the machined surface of K9 optical glass after grinding in wet environment, and new substances are found in the components of grinding debris in wet environment, which verifies the chemical reaction in grinding process. Finally, the material removal model of K 9 optical glass processing with CMG abrasives in wet environment is proposed.
【學位授予單位】：大連理工大學
【學位級別】：碩士
【學位授予年份】：2015
【分類號】：TQ171.734

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本文編號：1785174