【摘要】：使用自主研發(fā)的鎢系統(tǒng)中頻感應(yīng)加熱爐對AlN粉料進(jìn)行了燒結(jié)提純處理實驗,并用XRD、SEM、IGA和GDMS等表征方法分析了燒結(jié)后的樣品。實驗發(fā)現(xiàn),高溫(2 250℃)長時間(50h)燒結(jié)提純工藝效果顯著,但AlN粉料損耗高達(dá)47.37%;而低溫(小于2 000℃)分段式短時間(每段10h)燒結(jié)提純工藝粉料損耗低于2%,但是提純效果一般。通過對實驗結(jié)果的綜合分析,提出了一種AlN粉料燒結(jié)提純的改進(jìn)工藝,最終得到了氧含量僅238ppm、碳含量135ppm的高質(zhì)量AlN單晶生長原料,并且顯著增加了原料的利用率。
[Abstract]:The sintering purification experiment of AlN powder was carried out by using the medium frequency induction heating furnace of tungsten system, and the sintered samples were analyzed by XRD,SEM,IGA and GDMS. It was found that the high temperature (2 250 鈩，

本文編號：2437626