【摘要】：液體在固體表面潤濕性的研究是制備超疏水表面的理論基礎,因具有良好的應用前景而受到廣泛的關注。目前,人們對固液接觸潤濕性的研究多集中于微結(jié)構(gòu)參數(shù)變化對潤濕狀態(tài)的影響,且沒有形成較為統(tǒng)一的理論方法。本文在考慮了接觸線線張力的基礎上,結(jié)合微結(jié)構(gòu)其他特征參數(shù)對固液接觸表面的潤濕性進行了研究。本文首先分析了接觸線線張力在固液接觸潤濕中的重要性,并提出了類圓度的概念,得出接觸線上線張力對固液接觸時能量變化的影響。對微結(jié)構(gòu)相關參數(shù)進行研究,得出參數(shù)變化對固液接觸時接觸角和潤濕性轉(zhuǎn)變的影響規(guī)律。推導出考慮線張力的接觸角預測方程。利用L-edit設計不同微結(jié)構(gòu)的形貌和尺寸用于光刻掩膜版的制作。利用等離子刻蝕機在硅表面加工所設計的形貌和特征尺寸,并在部分微結(jié)構(gòu)表面形成一層C4F8鈍化膜用以后續(xù)實驗的對比分析。利用激光共聚焦顯微鏡對所加工表面的微結(jié)構(gòu)形貌和特征尺寸進行觀察測量,為實驗結(jié)果分析提供參考。對所制備出的表面測量10μl液滴在其上的接觸角,發(fā)現(xiàn)微結(jié)構(gòu)的存在顯著提升了接觸角值。對實驗測量的接觸角數(shù)據(jù)進行分析,發(fā)現(xiàn)10μl液滴在含鈍化膜的微結(jié)構(gòu)表面,當間距相同時,三棱柱狀微結(jié)構(gòu)表面接觸角最大,正六棱柱狀微結(jié)構(gòu)表面次之,方柱狀微結(jié)構(gòu)表面最小。證明所提出類圓度概念的實驗正確性,減小類圓度K可以提升接觸角。同時發(fā)現(xiàn)隨著固液接觸面積分數(shù)的增大,接觸角整體呈現(xiàn)減小趨勢。最后驗證了提出的接觸角測公式的合理性。
[Abstract]:The research on the wettability of liquid on solid surface is the theoretical basis of preparing superhydrophobic surface. At present, the research on wettability of solid-liquid contact is mainly focused on the influence of the change of microstructure parameters on the wetting state, and there is no unified theory and method. In this paper, the wettability of solid-liquid contact surface has been studied based on the tension of contact line and other characteristic parameters of microstructure. In this paper, the importance of contact line tension in solid-liquid contact wetting is analyzed, and the concept of quasi-roundness is put forward, and the influence of contact line tension on the energy change of solid-liquid contact is obtained. The influence of the change of parameters on the contact angle and wettability transition during solid-liquid contact was studied. The contact angle prediction equation considering linear tension is derived. The morphologies and sizes of different microstructures were designed by L-edit for the fabrication of photolithographic mask plates. The surface morphology and characteristic size of silicon were fabricated by plasma etching machine, and a layer of C4F8 passivation film was formed on the surface of some microstructures for the comparison and analysis of subsequent experiments. The microstructure and characteristic size of the machined surface were observed and measured by laser confocal microscope, which provides a reference for the analysis of experimental results. The contact angle of 10 渭 l droplets on the prepared surface was measured, and it was found that the existence of microstructures significantly increased the contact angle. By analyzing the contact angle data measured by experiments, it is found that 10 渭 l droplets are on the surface of microstructures containing passivated films. When the spacing is the same, the contact angle of triangular columnar structures is the largest, and that of hexagonal cylindrical microstructures is the second. The surface of square columnar microstructures is the smallest. The experimental correctness of the proposed concept of roundness is proved, and the contact angle can be increased by reducing the degree of roundness K. It is also found that the contact angle decreases with the increase of solid-liquid contact area fraction. Finally, the rationality of the proposed formula is verified.
【學位授予單位】：西安理工大學
【學位級別】：碩士
【學位授予年份】：2017
【分類號】：O647.1

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