本文選題：拉曼散射 + 表面拉曼增強光譜��； 參考：《浙江大學》2016年碩士論文

【摘要】：表面增強拉曼光譜(SERS)技術具有很高的靈敏度,能夠對各種低濃度分子進行檢測,因此被廣泛用于生物、化學和食品探測等領域。SERS增強基底的制備是實現高靈敏度探測的關鍵因素,而制備具有高增強效果、高穩(wěn)定性以及容易制備的活性SERS基底更是一種挑戰(zhàn)。硅納米線陣列制備技術由于和現代集成電路工藝相兼容,使得其能夠利用現有的成熟刻蝕工藝實現大批量生產。通過在硅納米線陣列表面濺射貴金屬(金、銀等),就可以實現固態(tài)活性SERS基底,并且具有低成本、高靈敏度的特點。本文首先研究了拉曼散射的基本原理,并且對表面拉曼增強效應的產生機制進行了詳細的介紹,并對其中物理機制和化學機制對增強效果的影響進行了分析,利用局域場增強的思想,進行模型仿真。本文詳細介紹了一種改進的單層微球掩膜自組裝方法,并以此制備了大面積的聚苯乙烯小球掩膜,以微球掩膜代替了傳統的光刻膠工藝,簡化了工藝步驟并且實現百納米級尺度的圖形刻蝕,成功制備大面積的硅納米線有序陣列,并以此為基礎,利用磁控濺射機對襯底鍍金,使其能夠用于拉曼增強傳感測試。本文還利用時域有限差分方法,對金膜硅納米線陣列的表面電場分布和反射率進行了分析,并結合金納米球顆粒設計了一種新型的表面拉曼增強基底,通過電場分布和反射率曲線的對比,我們得出新型的SERS基底具有更好的局域電磁場增強,這表明基底能夠產生更好的拉曼信號。在仿真的基礎上,本文成功制備了這兩種SERS基底,并對其測試了拉曼信號譜,通過對比相同波數下的特征峰值,從實驗上驗證了數值仿真的結果,證明了金納米球與金膜硅納米線的混合型基底具有更好的拉曼增強效果。
[Abstract]:Surface enhanced Raman spectroscopy (SERS) is widely used in biology because of its high sensitivity and the ability to detect all kinds of low concentration molecules. The preparation of SERS enhanced substrates in the fields of chemistry and food detection is the key factor to achieve high sensitivity detection. The preparation of active SERS substrates with high enhancement effect, high stability and easy preparation is a challenge. The fabrication technology of silicon nanowire array is compatible with modern integrated circuit technology, which makes it possible to use the existing mature etching process to achieve mass production. Solid active SERS substrates can be realized by sputtering precious metals (gold, silver, etc.) on the surface of silicon nanowire arrays, and have the characteristics of low cost and high sensitivity. In this paper, the basic principle of Raman scattering is studied, and the mechanism of surface Raman enhancement is introduced in detail, and the influence of physical and chemical mechanisms on the enhancement effect is analyzed. The model is simulated by using the idea of local field enhancement. In this paper, an improved self-assembly method of monolayer microsphere mask is introduced in detail, and a large area polystyrene microsphere mask is prepared. The traditional photoresist process is replaced by the microsphere mask. The process steps are simplified and the hundreds of nanoscale scale graphic etching is realized. A large area ordered array of silicon nanowires is successfully fabricated. On this basis, the substrate is gold-plated by magnetron sputtering machine, which can be used for Raman enhanced sensing testing. The surface electric field distribution and reflectivity of gold film silicon nanowire arrays are also analyzed by using finite-difference time-domain method, and a novel surface-Raman enhanced substrate is designed in combination with gold nanospheres. By comparing the electric field distribution with the reflectivity curve, we find that the new SERS substrate has better local electromagnetic field enhancement, which indicates that the substrate can produce better Raman signal. On the basis of simulation, the two SERS substrates are successfully prepared, and the Raman signal spectra are tested. The numerical simulation results are verified by comparing the characteristic peaks under the same wave number. It is proved that the mixed substrate of gold nanospheres and gold film silicon nanowires has better Raman enhancement effect.
【學位授予單位】：浙江大學
【學位級別】：碩士
【學位授予年份】：2016
【分類號】：TB383.1;O657.37

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