本文選題：嵌段共聚物　切入點：誘導自組裝　出處：《寧夏大學》2017年碩士論文　論文類型：學位論文

【摘要】：摩爾定律指出,芯片上可容納的元器件數(shù)目每兩年就會翻一倍,這意味著集成電路對半導體制造工藝的要求不斷提升。而半導體制造工藝中的刻蝕過程往往需要特定或長程有序結構的納米模版,傳統(tǒng)光刻技術由于物理極限問題已經(jīng)難以滿足低于10nm的尺寸要求。因此,研究者將目光轉向了嵌段共聚物自組裝技術。嵌段共聚物指由兩種或兩種以上均聚物嵌段通過共價鍵結合起來的高分子,可通過自組裝形成周期性排列的納米結構(5-100nm)。然而,作為典型的軟物質,嵌段共聚物容易受到體系熱漲落的影響,自組裝形態(tài)往往含有大量缺陷,這限制了嵌段共聚物自組裝結構的應用。因此,通過調控自組裝過程抑制缺陷的產生或消除缺陷以形成大尺度有序納米結構成為研究者關注的熱點話題之一。通過引入受限環(huán)境或在基底引入特定分布的幾何結構或化學圖案以控制目標結構的取向,從而提高自組裝結構有序程度的誘導自組裝技術,是實現(xiàn)長程有序結構的最有效方法。本文利用含時金茲堡朗道理論系統(tǒng)地研究了矩形受限下AB兩嵌段共聚物與均聚物C共混體系(AB/C)的異相成核過程。我們通過設計誘導條件得到了長程有序的六角柱狀結構,克服了六角與矩形的角度不匹配問題,給出了實現(xiàn)有序結構的相關參數(shù)以及各參數(shù)的容忍度,同時,也對體系中缺陷的動力學行為進行了分析。第一章,我們介紹了嵌段共聚物誘導自組裝的研究進展。第二章,我們簡單介紹了嵌段共聚物的常用研究方法,詳細給出了本文所用的含時金茲堡朗道(TDGL)理論的動力學演化方程,并介紹了結合元胞動力學(CDS)的計算模擬方法。第三章,我們利用TDGL理論系統(tǒng)地研究了 AB/C體系在矩形受限下的自組裝動力學過程,在受限于矩形的共混體系中通過異相成核形成了長程有序結構。首先考察了正方形受限下兩嵌段共聚物在各邊相同外場的誘導下異相成核的過程,在不同的場強下,觀察到了角誘導和邊誘導的異相成核過程,發(fā)現(xiàn)了自組裝結構均由于取向不匹配形成晶界缺陷,同時也提示我們在矩形受限條件下,兩組對邊的外場需有強度的差異才可能形成長程有序的六角結構。因此,我們設定x方向的兩組對邊場強大于另外兩組對邊場強,使水平方向外場作為主導誘導產生平行于x方向排列的六角柱,而豎直方向的外場只起到輔助作用。然后,我們詳細考察了形成長程有序六角結構的外場條件。此外,我們還對矩形尺寸的容忍度進行了探討,發(fā)現(xiàn)六角排列的柱狀相對受限矩形的尺寸并不敏感,即尺寸的變化對體系的有序度影響極小。這一結果為實驗中制備大尺度有序結構提供了一定的理論指導。第四章,我們簡單介紹了嵌段共聚物自組裝的層狀相與六角柱狀相中的常見缺陷。依據(jù)缺陷的動力學演化過程,我們將六角柱狀結構中的五七缺陷對分為了兩類:滑移型與攀移型。本章給出了每類缺陷的樣本,并研究了不同類型缺陷之間的反應,研究結果為消除長程有序結構中的缺陷提供了新思路。
[Abstract]:Moore pointed out that the number of components on a chip can hold every two years will be doubled, which means that the requirements of integrated circuit of semiconductor manufacturing process of continuous improvement. And the etching process of semiconductor manufacturing process often requires specific or long-range ordered nanostructure templates, conventional lithography due to physical limits has been difficult to meet the problem of less than 10nm size requirements. Therefore, the researchers turned to the self-assembly of block copolymers. Block copolymer polymer composed of two or more than two kinds of homopolymer block by covalent bond together, can be formed through the self-assembly of nano structure of the periodic arrangement (5-100nm). However, as a typical soft matter the block copolymer is easily affected by system thermal fluctuations, the self-assembly morphology often contains a lot of defects, which limits the self-assembly of block copolymer structure application. Therefore, by Regulate the self-assembly process suppress the defect or eliminate the defects to form a large scale ordered nano structure has become one of the hot topic of researchers. By introducing the limited environment or geometric structure or chemical pattern into a specific distribution in the substrate to control the orientation of the target structure, thereby enhancing the self-assembly structure order degree induced self-assembly technique is the most effective method to achieve long-range ordered structure. The time-dependent Ginzburg Landau theory system of rectangular constrained AB two block copolymer and homopolymer C blends (AB/C) by using the heterogeneous nucleation process. We obtained six induction conditions through the design of columnar long-range ordered structure, overcomes six the rectangular angle and angle matching problem, given the realization of the relevant parameters of ordered structure and the parameters of tolerance, at the same time, also the dynamical behavior of system defects in For the analysis. In the first chapter, we introduce the research progress of block copolymer induced self-assembly. In the second chapter, we briefly introduce the research methods commonly used block copolymers, with the time-dependent Ginzburg Landau used this paper (TDGL) theory of dynamic evolution equation, and introduces the combination of cellular dynamics (CDS) simulation. In the third chapter, we use the self-assembly kinetics of TDGL theory to study AB/C system in rectangular constrained, in the blends are limited to rectangular through heterogeneous nucleation forming long-range ordered structure. First examines the square constrained two block copolymer in the process induced by each side of the same the field of heterogeneous nucleation, in different electric field intensity, observed angle of induction and edge induced nucleation process, self-assembly structures were formed due to the orientation does not match the boundary defects found at the same time. We suggest that in rectangular restricted conditions, two groups of the edge of the field to be formed between the strength of the long-range order of the six corner structure. Therefore, we set the X direction of the two groups of edge strength greater than the other two groups on the edge of the field intensity, so that the horizontal direction field six prism as the leading production line in X induced life the direction and the vertical direction of the field, only play a supporting role. Then, we studied the formation of outfield long-range ordered six corner structure. In addition, we are also on the size of the rectangle tolerance is discussed, that column six corner arrangement relatively limited rectangle size is not sensitive, that is minimal the size of the change order degree of system. This result provides some theoretical guidance in the experiment of preparation of large scale ordered structures. The fourth chapter, we introduce the layered and six columnar self-assembly of block copolymer phase. The common defects. According to defects of the dynamic evolution process, we will have 57 defects on six columnar structure in two types: sliding and climbing type. This chapter gives each kind of fault samples, and studied the reaction between different types of defects, this result provides a new approach to eliminate the defects of long Cheng Youxu in the structure.

【學位授予單位】：寧夏大學
【學位級別】：碩士
【學位授予年份】：2017
【分類號】：O631

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本文編號：1577126