本文選題：空氣靜壓導(dǎo)軌 + 自激振動��； 參考：《昆明理工大學》2017年碩士論文

【摘要】：空氣靜壓導(dǎo)軌具有低摩擦,高精度,清潔無污染等優(yōu)點,被廣泛應(yīng)用于IC制造、三坐標測量機、精密制造等設(shè)備中。傳統(tǒng)對空氣靜壓導(dǎo)軌的研究主要對空氣靜壓導(dǎo)軌的靜態(tài)特性(如承載力、靜剛度等)進行研究。通過求解氣膜流動的N-S方程,得到滿足使用要求的結(jié)構(gòu)參數(shù)和工作條件。隨著精度要求的不斷提高,當空氣靜壓導(dǎo)軌氣膜間隙降至10μm以下時,基于穩(wěn)態(tài)流動和層流假設(shè)的研究方 ·法受到挑戰(zhàn),氣浮支撐內(nèi)部的自激振動成為制約靜壓導(dǎo)軌進一步發(fā)展的關(guān)鍵問題。本文基于沖擊射流理論,建立單自由度軸承自激振動模型,求得系統(tǒng)的振動微分方程,利用大渦模擬(LES)方法結(jié)合實驗研究,對潤滑氣膜內(nèi)的流態(tài)進行分析。通過對氣浮微振動形成機理的深入研究,豐富空氣靜壓導(dǎo)軌設(shè)計和分析的理論方法和研究經(jīng)驗。本文主要研究內(nèi)容如下:(1)基于沖擊射流理論,建立空氣靜壓導(dǎo)軌湍流高壓區(qū)的流動分區(qū)模型。根據(jù)流場內(nèi)速度矢量特征和壓力分布規(guī)律,將進氣孔附近高壓湍流區(qū)域劃分為:自由射流區(qū)、滯止區(qū)、過渡區(qū)和出口壁面射流區(qū)。明確各區(qū)域的流動特性和能量傳遞特征,給出各區(qū)域相應(yīng)的控制方程。并明確提出引起氣膜波動的成因與主旋、次旋和出口渦量之間的關(guān)系。(2)借助有限元分析軟件,對氣膜微振動問題進行數(shù)值分析。首先,利用雷諾平均數(shù)值模擬(RANS)方法求得氣浮支撐流場穩(wěn)態(tài)解,作為保證流場迭代穩(wěn)定收斂的初始值;然后,利用三維大渦模擬(3DLES)方法分析不同時刻流場的特征,將氣旋形成和渦脫的瞬態(tài)過程與氣膜波動聯(lián)系到一起,從動態(tài)的角度揭示微振動成因;接下來分析氣旋的強度、移動速度和穩(wěn)定位置對氣膜微振動的影響;最后得到不同工作參數(shù)和結(jié)構(gòu)參數(shù)對氣膜微振動強度的作用效果和影響規(guī)律。(3)搭建空氣靜壓導(dǎo)軌微振動實驗測試平臺,驗證理論分析和數(shù)值計算結(jié)果的可靠性和有效性,并對實驗誤差進行了分析。觀測不同工作參數(shù)和結(jié)構(gòu)參數(shù)下軸承內(nèi)部非線性自激微振動的固有頻率、時均振幅,驗證氣膜內(nèi)氣旋現(xiàn)象與軸承非線性自激振動之間的關(guān)系。
[Abstract]:Air static pressure guideway has the advantages of low friction, high precision, clean and pollution-free, and is widely used in IC manufacturing, CMM, precision manufacturing and so on. The traditional research on aerostatic guide rail is mainly focused on the static characteristics (such as bearing capacity, static stiffness, etc.) of the aerostatic guide rail. By solving the N-S equation of gas film flow, the structure parameters and working conditions are obtained. With the improvement of precision, the research method based on steady flow and laminar flow assumption is challenged when the gap of air film decreases to less than 10 渭 m. The self-excited vibration inside the air-bearing support is a key problem restricting the further development of the hydrostatic guideway. Based on impinging jet theory, the self-excited vibration model of single degree of freedom bearing is established, and the vibration differential equation of the system is obtained. The flow state in lubricating gas film is analyzed by means of large eddy simulation (les) method combined with experimental study. Through the deep research on the formation mechanism of air flotation micro vibration, the theoretical method and research experience in the design and analysis of air static pressure guideway are enriched. The main contents of this paper are as follows: (1) based on impinging jet theory, a flow zonation model of turbulent high pressure region of air static guideway is established. According to the characteristics of velocity vector and pressure distribution in the flow field, the high pressure turbulent region near the inlet pore is divided into free jet zone, stagnation zone, transition zone and exit wall jet region. The flow characteristics and energy transfer characteristics of each region are clarified, and the corresponding governing equations of each region are given. The relationship between the cause of film fluctuation and the principal rotation, secondary rotation and exit vorticity is put forward. (2) with the help of finite element analysis software, the film micro-vibration problem is numerically analyzed. Firstly, the Reynolds mean numerical simulation (rans) method is used to obtain the steady state solution of the flow field supported by air floatation as the initial value to ensure the steady convergence of the flow field, and then the 3D large eddy simulation (3DLES) method is used to analyze the characteristics of the flow field at different times. The transient process of cyclone formation and vortex detachment is connected with the film fluctuation to reveal the causes of micro-vibration from the dynamic point of view, and then the influence of cyclone intensity, moving speed and stable position on the film micro-vibration is analyzed. Finally, the effects of different working parameters and structural parameters on the micro vibration intensity of the gas film are obtained. (3) the experimental test platform for the micro vibration of the air static guide rail is built to verify the reliability and validity of the theoretical analysis and numerical calculation results. The experimental error is analyzed. The natural frequency and time-averaged amplitude of nonlinear self-excited micro-vibration in bearing under different working parameters and structural parameters were observed to verify the relationship between the phenomenon of cyclone in film and the nonlinear self-excited vibration of bearing.
【學位授予單位】：昆明理工大學
【學位級別】：碩士
【學位授予年份】：2017
【分類號】：TH113.1

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