本文關(guān)鍵詞：三維金屬微結(jié)構(gòu)模具的疊層擬合成形與應(yīng)用　出處：《深圳大學(xué)》2015年博士論文　論文類型：學(xué)位論文

  更多相關(guān)文章： 微細加工 微模具 飛秒激光 線切割 微細電阻滑焊 熱擴散焊 微制件

【摘要】：隨著微機電系統(tǒng)(MEMS)的發(fā)展和應(yīng)用,微制件已廣泛應(yīng)用于微電子器件、精密機械、生物醫(yī)療以及航空航天等領(lǐng)域。微制件的結(jié)構(gòu)尺寸微小,重量極輕,很難用普通加工方法對其加工。隨著國際該領(lǐng)域研究的深入,出現(xiàn)了一系列面向微制件的微細加工技術(shù):例如LIGA/UV-LIGA、微細電火花、微細電解、雙光子成形以及飛秒激光微細加工技術(shù)等。上述工藝對微制件的制備做出了較大貢獻,但對于制備含復(fù)雜特征的三維金屬微結(jié)構(gòu)均存在各自的技術(shù)瓶頸。本文針對上述技術(shù)瓶頸,在國家自然科學(xué)基金(No.51175348、51375315、51405306)的資助下,遵循“化整為零,擬直逼曲,以簡代繁,積零為整”的微積分學(xué)術(shù)思想,提出三維金屬微結(jié)構(gòu)模具的疊層擬合成形工藝。該方法以分層實體制造工藝(LOM)和微型雙工位疊層成形方法(Micro-DLOM)為基礎(chǔ),通過多層二維金屬微結(jié)構(gòu)疊層擬合成形三維金屬微模具,圍繞二維金屬微結(jié)構(gòu)精密成形、形位公差精確控制、三維金屬微模具重構(gòu)等關(guān)鍵技術(shù)開展系統(tǒng)研究,較好地解決了具有復(fù)雜曲面特征和深寬比不受限制的三維微結(jié)構(gòu)的加工科學(xué)問題,成功制備了金屬箔微脹形件和微小型塑件。三維金屬微型腔模具、金屬微脹形件以及微小型塑件的成功制備驗證了該工藝的可行性和先進性,開創(chuàng)了三維金屬微型腔模具制造的新領(lǐng)域。本文的主要研究內(nèi)容如下:(1)通過雙溫模型結(jié)合有限差分的Crank-Nicolson方法對飛秒激光燒蝕金屬箔的一維溫度場進行了數(shù)值模擬,從而為飛秒激光燒蝕金屬箔,控制精密二維金屬微結(jié)構(gòu)成形提供理論依據(jù)。研究發(fā)現(xiàn)材料的電子和飛秒激光的光子相互作用時,存在一個飽和功率密度和飽和時間。同時對影響材料電子—晶格能量耦合時間的因素進行了分析,發(fā)現(xiàn)激光能量密度和電子—晶格能量耦合參數(shù)是對電子—晶格能量耦合時間產(chǎn)生影響的主要因素。(2)在疊層模具制造過程中,為了切割方便,將待加工金屬箔的另一端向上彈性彎曲,正加工金屬箔平鋪,已加工金屬箔向下彈性彎曲,這種創(chuàng)新性的彎曲結(jié)構(gòu)有利于廢料的自動脫落。本文也對這種彎曲結(jié)構(gòu)的金屬箔變形情況進行了分析。(3)采用上述金屬箔彎曲結(jié)構(gòu),對二維金屬箔飛秒激光切割與三維金屬微型腔模具微細電阻滑焊組合重構(gòu)工藝進行了系統(tǒng)研究,提出了最佳工藝參數(shù)。以10μm厚的0Cr18Ni9不銹鋼箔為模具基材,在120m W的飛秒激光功率、50μm/s的切割速度以及0.75μm的切割補償量,0.21V的焊接電壓,0.2MPa的焊接壓強,100ms的預(yù)壓時間,10ms的放電時間以及160次滑焊放電情況下,利用該工藝制備了尺寸精度和表面質(zhì)量好的二級、三級階梯金屬微齒輪腔模具。(4)提出線切割與熱擴散焊組合方法制備三維金屬微模具工藝。通過線切割實驗研究了線切割放電電壓、放電電流、脈沖寬度以及脈沖間隔對二維金屬箔切割質(zhì)量的影響規(guī)律;通過真空壓力熱擴散焊實驗研究了熱擴散時間以及熱擴散壓力對三維金屬微模具重構(gòu)焊接質(zhì)量的影響規(guī)律,從而獲得一組較好的工藝參數(shù)用于制備表面質(zhì)量、尺寸精度和整體機械性能較好的微模具。(5)通過實驗研究了超聲波功率、超聲波作用時間以及超聲波壓強對金屬微成形件、微小型塑件成形質(zhì)量的影響規(guī)律,獲得較優(yōu)的超聲波工作參數(shù)。利用疊層擬合成形工藝制造的三維金屬微凹模型腔,應(yīng)用超聲波塑化疊層模具腔內(nèi)粉末、驅(qū)動熔融樹脂脹形制備了T2紫銅箔微結(jié)構(gòu)件。該工藝方法所制備的微脹形件的結(jié)構(gòu)尺寸主要取決于凹模。與傳統(tǒng)工藝相比,該工藝不存在凹凸模定位不準(zhǔn)的問題。以疊層工藝制備的三維金屬微模具為凹模,采用超聲塑化熔融聚合物粉末顆粒(micro-UPM)的方法制備了微小型塑件,并對凹模內(nèi)超聲塑化熔融過程的作用機理進行了分析。
[Abstract]:With the development of microelectromechanical system (MEMS) development and application of micro parts has been widely used in microelectronics, precision machinery, medical and aerospace fields. The structure size of micro parts is small, light weight, difficult to work with ordinary processing methods on the research in this field. With the deepening of international, the micro machining a series of techniques for micro parts such as: LIGA/UV-LIGA, micro EDM, micro electrolysis, two-photon forming and femtosecond laser micromachining technology. The process of preparation of micro parts to make a greater contribution, but for the preparation of three-dimensional metal containing complex characteristics of micro structures are found. According to their technical bottleneck the technical bottleneck in the National Natural Science Foundation (No.511753485137531551405306) funding, follow the "quasi hit song, to break up the whole into parts, in behalf of the fan, accumulating the academic thought of calculus Think of laminated fitting forming process of metal micro structure mould is proposed. This method in LOM Process (LOM) and micro double stacked molding method (Micro-DLOM) as the foundation, through multi-layer two-dimensional metal micro structure of laminated metal fitting forming 3D micro mold, metal micro structure around the two-dimensional shape of precision forming the precise control of position tolerance system, researching on the key technologies of 3D reconstruction of micro metal mold, solved with complex surface features and wide deep processing science problems than unrestricted three-dimensional micro structure, fabricated metal foil micro bulging parts and micro plastic parts. 3D micro metal mold cavity. Metal micro bulging parts and micro plastic parts were successfully prepared to verify the feasibility of the technology and advanced, and created a new field of 3D micro metal mold manufacture. The main research contents of this paper are as follows: (1) through The two temperature model with Crank-Nicolson finite difference method of one-dimensional temperature field of femtosecond laser ablation of metal foil was simulated to femtosecond laser ablation of metal foil, the control precision of two-dimensional metal micro structure forming and provide a theoretical basis. The study found the electronic materials and femtosecond laser photon interactions, the existence of a saturated power the density and saturation time. At the same time, the influence factors of electron lattice coupling time energy materials were analyzed, found that laser energy density and electron lattice coupling energy parameters are the main factors influence the electron lattice energy coupling time. (2) in the laminated mould manufacturing process, in order to facilitate the cutting, the other end the processing of metal foil to the elastic bending processing, metal foil tile, machined metal foil elastic bending bending down, this innovative structure is beneficial to waste The automatic fall off. The metal foil on this structure bending deformation was analyzed. (3) the structure of two-dimensional curved metal foil, metal foil femtosecond laser cutting were studied with 3D metal micro cavity mold micro resistance welding combined sliding reconstruction process, the optimum parameters in 0Cr18Ni9 stainless steel foil. 10 m thick mold base, in the femtosecond laser power of 120m W, the cutting speed is 50 m/s and cut compensation amount of 0.75 m, voltage 0.21V welding, welding pressure 0.2MPa, 100ms preloading time, 10ms discharge time and the 160 slip welding discharges, preparation the size accuracy and surface quality of the two level by this process, three steps of metal micro gear cavity die. (4) proposed line cutting and heat diffusion welding combination preparation method of metal micro mould process. Experimental study on the cutting line by line cutting Electric voltage, discharge current, influence of pulse width and pulse interval on the two-dimensional cutting quality of metal foil by vacuum diffusion welding; thermal stress experiment of thermal diffusion and thermal diffusion time pressure on metal micro mold reconstruction of the welding quality, so as to obtain a better set of process parameters for the preparation of the surface quality. The size of the overall accuracy and good mechanical properties of micro mold. (5) through the experimental study of ultrasonic power, ultrasonic time and ultrasonic pressure on metal micro forming, micro plastic forming quality of the influence of ultrasonic parameters better. Forming three-dimensional metal manufacturing process of micro cavity using stack fitting, application of ultrasonic plasticizing laminated mould cavity powder, driving the molten resin bulge forming T2 copper foil micro structure. The micro expansion process for preparing shaped parts The structure size depends on the die. Compared with the traditional process, this process does not exist die positioning problem. Based on 3D metal laminate preparation for micro mould die, using ultrasonic plasticizing melt polymer powder particles (micro-UPM) were prepared by means of micro plastic parts, and the mechanism of the melting process of ultrasonic plasticizing die are analyzed.

【學(xué)位授予單位】：深圳大學(xué)
【學(xué)位級別】：博士
【學(xué)位授予年份】：2015
【分類號】：TG76;TH-39

【參考文獻】

相關(guān)期刊論文 前10條

1 蔣炳炎;吳旺青;胡建良;沈龍江;;微注射成型中聚合物熔融塑化技術(shù)[J];工程塑料應(yīng)用;2007年11期

2 張永華,丁桂甫,彭軍,蔡炳初;LIGA相關(guān)技術(shù)及應(yīng)用[J];傳感器技術(shù);2003年03期

3 酈羽;白基成;王燕青;李浩洲;;組合式微細電火花電極制作工藝試驗研究[J];電加工與模具;2012年03期

4 李劍忠;欒紀(jì)杰;虞慧嵐;張余升;余祖元;;微細電火花三維加工中電極損耗補償新方法[J];大連理工大學(xué)學(xué)報;2011年04期

5 胡洋洋;朱荻;李寒松;曾永彬;明平美;;UV-LIGA與微細電火花加工組合制造微細電解陣列電極[J];東南大學(xué)學(xué)報(自然科學(xué)版);2010年01期

6 席慶標(biāo);董湘懷;;微拉深成形工藝及模具設(shè)計研究[J];鍛壓技術(shù);2007年04期

7 郭斌;王春舉;單德彬;周健;;基于微塑性成形的微型零件批量制造技術(shù)[J];功能材料與器件學(xué)報;2008年01期

8 董賢子;段宣明;;雙光子三維微結(jié)構(gòu)快速制備技術(shù)[J];光學(xué)精密工程;2007年04期

9 賈振元;任小濤;劉巍;鄭新毅;;大深徑比微小孔快速電火花加工系統(tǒng)[J];光學(xué)精密工程;2009年12期

10 杜立群;莫順培;張余升;劉沖;;UV-LIGA和微細電火花加工技術(shù)組合制作三維金屬微結(jié)構(gòu)[J];光學(xué)精密工程;2010年02期

相關(guān)碩士學(xué)位論文 前1條

1 李林;超聲場下空化氣泡運動的數(shù)值模擬和超聲強化傳質(zhì)研究[D];四川大學(xué);2006年

，

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