半導(dǎo)體硅片企業(yè)MES系統(tǒng)研究與應(yīng)用
發(fā)布時(shí)間：2018-10-09 11:12
【摘要】：隨著國(guó)內(nèi)經(jīng)濟(jì)的不斷發(fā)展以及世界經(jīng)濟(jì)的一體化進(jìn)程的不斷加速,半導(dǎo)體硅片企業(yè)面臨的競(jìng)爭(zhēng)愈發(fā)激烈,半導(dǎo)體硅片企業(yè)只有不斷的提高自身的制造能力和適應(yīng)水平,并對(duì)客戶(hù)不斷變化的需求進(jìn)行滿(mǎn)足,才能夠在激烈的競(jìng)爭(zhēng)中立于不敗之地。因此,半導(dǎo)體硅片企業(yè)需要進(jìn)行MES系統(tǒng)(Manufacture Execute System制造執(zhí)行系統(tǒng))的完整解決方案的建立,以便能夠使得企業(yè)獲得必要的發(fā)展條件,并對(duì)信息溝通和適應(yīng)能力進(jìn)行提高�？梢哉f(shuō),MES系統(tǒng)已經(jīng)受到越來(lái)越多制造企業(yè)的關(guān)注,半導(dǎo)體硅片企業(yè)需要亟待建立一套符合企業(yè)特點(diǎn)的MES系統(tǒng)。本文進(jìn)行MES系統(tǒng)的研究與應(yīng)用是基于半導(dǎo)體硅片企業(yè)的生產(chǎn)實(shí)際進(jìn)行的,以滿(mǎn)足半導(dǎo)體硅片企業(yè)的MES管理為最終目標(biāo)。本文通過(guò)分析半導(dǎo)體硅片企業(yè)對(duì)于MES系統(tǒng)要求的特殊性和必要性基礎(chǔ)上,確立了研究的具體方向和范疇。系統(tǒng)的設(shè)計(jì)與實(shí)現(xiàn)融合了當(dāng)前先進(jìn)的面向?qū)ο笤O(shè)計(jì)、J2EE技術(shù)以及統(tǒng)一建模語(yǔ)言技術(shù)等。本文的主要研究重點(diǎn)和工作主要包括如下內(nèi)容:(1)對(duì)半導(dǎo)體硅片企業(yè)生產(chǎn)流程和特點(diǎn)進(jìn)行分析,確定當(dāng)前MES系統(tǒng)存在的缺陷和不足;(2)借助于統(tǒng)一建模語(yǔ)言技術(shù),對(duì)半導(dǎo)體企業(yè)MES系統(tǒng)的業(yè)務(wù)模型進(jìn)行分析和建立,確定系統(tǒng)的業(yè)務(wù)環(huán)境;(3)對(duì)半導(dǎo)體MES系統(tǒng)進(jìn)行功能結(jié)構(gòu)、體系結(jié)構(gòu)以及網(wǎng)絡(luò)結(jié)構(gòu)的設(shè)計(jì),并采用逐層深入的方式對(duì)MES系統(tǒng)的主要功能模塊進(jìn)行詳細(xì)設(shè)計(jì),建立對(duì)應(yīng)的數(shù)據(jù)模型;(4)在MES系統(tǒng)的生產(chǎn)控制環(huán)節(jié)引入JBPM工作流技術(shù),實(shí)現(xiàn)生產(chǎn)控制、質(zhì)量控制以及工藝控制的智能化和自動(dòng)化管理,規(guī)范生產(chǎn)流程和生產(chǎn)質(zhì)量;(5)借助于J2EE技術(shù)對(duì)MES系統(tǒng)的實(shí)現(xiàn)過(guò)程進(jìn)行分析,并通過(guò)測(cè)試用例的形式分析實(shí)現(xiàn)效果。通過(guò)對(duì)半導(dǎo)體企業(yè)進(jìn)行實(shí)施MES系統(tǒng),可以完善企業(yè)對(duì)于設(shè)備、質(zhì)量、生產(chǎn)流程的監(jiān)控,并逐步形成整套的追溯工具和平臺(tái),便于企業(yè)進(jìn)行各種信息的追溯,包括處理方法、處理結(jié)果、生產(chǎn)車(chē)間、操作人員、工序以及產(chǎn)生時(shí)間等。實(shí)施具有半導(dǎo)體企業(yè)特點(diǎn)的MES系統(tǒng),不但能夠?qū)τ谄髽I(yè)人員進(jìn)行促進(jìn)和鞭策,而且可以提高企業(yè)的生產(chǎn)效益。同時(shí),隨著本MES系統(tǒng)在半導(dǎo)體企業(yè)的實(shí)施和應(yīng)用,對(duì)于其他企業(yè)的研究與應(yīng)用有一定的借鑒意義。
[Abstract]:With the continuous development of domestic economy and the acceleration of the integration process of the world economy, semiconductor wafer enterprises are facing more and more fierce competition. Semiconductor wafer enterprises have to constantly improve their manufacturing capacity and adaptive level. And to meet the changing needs of customers, in order to be in an invincible position in the fierce competition. Therefore, semiconductor wafer enterprises need to set up a complete solution of MES system, (Manufacture Execute System manufacturing and execution system, in order to enable the enterprise to obtain the necessary development conditions, and to improve the ability of information communication and adaptability. It can be said that the mes system has attracted more and more attention of manufacturing enterprises. Semiconductor silicon wafer enterprises need to establish a set of MES system which accords with the characteristics of enterprises. In this paper, the research and application of MES system is based on the actual production of semiconductor wafer enterprises, with the ultimate goal of satisfying the MES management of semiconductor wafer enterprises. Based on the analysis of the particularity and necessity of semiconductor wafer enterprises' requirement for MES system, this paper establishes the specific direction and category of the research. The design and implementation of the system combines the current advanced object-oriented design J2EE technology and unified modeling language technology. The main research focus and work in this paper are as follows: (1) analyzing the production process and characteristics of semiconductor silicon wafer enterprises to determine the defects and shortcomings of the current MES system; (2) using the Unified Modeling language (UML) technology, The business model of semiconductor enterprise MES system is analyzed and established, and the business environment of the system is determined. (3) the function structure, architecture and network structure of semiconductor MES system are designed. The main function modules of MES system are designed in detail, and the corresponding data model is established. (4) introducing JBPM workflow technology to the production control link of MES system to realize production control. Quality control and intelligent and automatic management of process control to standardize production processes and production quality; (5) with the help of J2EE technology to analyze the implementation of the MES system, and through the form of test cases to analyze the effect of the implementation. By implementing the MES system for semiconductor enterprises, we can improve the monitoring of equipment, quality and production processes, and gradually form a complete set of traceability tools and platforms for enterprises to trace all kinds of information, including processing methods. Process results, workshop, operator, process and production time, etc. The implementation of the MES system with the characteristics of semiconductor enterprises can not only promote and motivate the personnel of enterprises, but also improve the production efficiency of enterprises. At the same time, with the implementation and application of this MES system in semiconductor enterprises, it has certain reference significance for the research and application of other enterprises.
【學(xué)位授予單位】：上海交通大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2015
【分類(lèi)號(hào)】：F426.63;TP311.52
本文編號(hào)：2259126
[Abstract]:With the continuous development of domestic economy and the acceleration of the integration process of the world economy, semiconductor wafer enterprises are facing more and more fierce competition. Semiconductor wafer enterprises have to constantly improve their manufacturing capacity and adaptive level. And to meet the changing needs of customers, in order to be in an invincible position in the fierce competition. Therefore, semiconductor wafer enterprises need to set up a complete solution of MES system, (Manufacture Execute System manufacturing and execution system, in order to enable the enterprise to obtain the necessary development conditions, and to improve the ability of information communication and adaptability. It can be said that the mes system has attracted more and more attention of manufacturing enterprises. Semiconductor silicon wafer enterprises need to establish a set of MES system which accords with the characteristics of enterprises. In this paper, the research and application of MES system is based on the actual production of semiconductor wafer enterprises, with the ultimate goal of satisfying the MES management of semiconductor wafer enterprises. Based on the analysis of the particularity and necessity of semiconductor wafer enterprises' requirement for MES system, this paper establishes the specific direction and category of the research. The design and implementation of the system combines the current advanced object-oriented design J2EE technology and unified modeling language technology. The main research focus and work in this paper are as follows: (1) analyzing the production process and characteristics of semiconductor silicon wafer enterprises to determine the defects and shortcomings of the current MES system; (2) using the Unified Modeling language (UML) technology, The business model of semiconductor enterprise MES system is analyzed and established, and the business environment of the system is determined. (3) the function structure, architecture and network structure of semiconductor MES system are designed. The main function modules of MES system are designed in detail, and the corresponding data model is established. (4) introducing JBPM workflow technology to the production control link of MES system to realize production control. Quality control and intelligent and automatic management of process control to standardize production processes and production quality; (5) with the help of J2EE technology to analyze the implementation of the MES system, and through the form of test cases to analyze the effect of the implementation. By implementing the MES system for semiconductor enterprises, we can improve the monitoring of equipment, quality and production processes, and gradually form a complete set of traceability tools and platforms for enterprises to trace all kinds of information, including processing methods. Process results, workshop, operator, process and production time, etc. The implementation of the MES system with the characteristics of semiconductor enterprises can not only promote and motivate the personnel of enterprises, but also improve the production efficiency of enterprises. At the same time, with the implementation and application of this MES system in semiconductor enterprises, it has certain reference significance for the research and application of other enterprises.
【學(xué)位授予單位】：上海交通大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2015
【分類(lèi)號(hào)】：F426.63;TP311.52
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