本文選題：FTO薄膜 + Ag/FTO薄膜�。� 參考：《江蘇大學(xué)》2017年碩士論文

【摘要】：摻氟二氧化錫(FTO)透明導(dǎo)電薄膜具有無(wú)毒、易于激光刻蝕、抗酸堿且可實(shí)現(xiàn)大面積生產(chǎn)等優(yōu)點(diǎn),應(yīng)用前景廣泛。隨著光電器件產(chǎn)業(yè)的快速發(fā)展,高性能且低成本薄膜材料的需求也在逐漸提高,因此許多研究者提出運(yùn)用激光輻照的方法來(lái)提高薄膜性能以滿足實(shí)際應(yīng)用需求。現(xiàn)有關(guān)于激光輻照的研究主要集中于激光器種類(lèi)的選擇和激光參數(shù)的優(yōu)化,而針對(duì)采用超聲振動(dòng)輔助激光處理FTO改善薄膜性能的研究鮮有報(bào)道。基于此,本文提出在激光輻照FTO基薄膜的過(guò)程中引入超聲振動(dòng),著重研究了超聲振動(dòng)與激光輻照的耦合作用對(duì)薄膜的影響,并獲得了有意義的研究結(jié)果。1、采用超聲振動(dòng)輔助激光退火處理FTO薄膜,考察了激光能量密度和振動(dòng)功率對(duì)薄膜結(jié)構(gòu)、形貌和性能的影響,同時(shí)探討了超聲振動(dòng)輔助激光退火作用機(jī)理。實(shí)驗(yàn)發(fā)現(xiàn),在激光退火過(guò)程中引入超聲振動(dòng)可使薄膜隨著超聲波換能器一起沿法線方向發(fā)生周期性上下位移而引起激光聚焦?fàn)顩r發(fā)生連續(xù)變化,保證薄膜處于最佳退火范圍內(nèi),同時(shí)還可使薄膜表面激光熔融區(qū)域的顆粒被振動(dòng)分散,由此抑制顆粒間的團(tuán)簇現(xiàn)象,最終提高薄膜表面的均勻性、致密度和平整度,并降低薄膜的厚度和表面粗糙度。結(jié)果表明,在0.6 J/cm~2的激光能量密度和300 W的振動(dòng)功率下,薄膜表面顆粒的均勻性、致密度和平整度最佳,此時(shí)在400~800 nm波段的平均透光率為84.7%,方塊電阻為9.0Ω/sq,品質(zhì)因子為2.11×10~(-2)Ω~(-1),相比未處理FTO薄膜(1.13×10~(-2)Ω~(-1))明顯提高。2、采用直流磁控濺射法在FTO薄膜表面沉積不同厚度的Ag層,再采用超聲振動(dòng)輔助激光退火處理Ag/FTO薄膜,考察了Ag層厚度以及光斑重疊率(SOR)和掃描線重疊率(LOR)對(duì)薄膜的結(jié)構(gòu)、形貌和性能的影響。結(jié)果表明,在5 nm的Ag層厚度下,當(dāng)SOR和LOR分別為90%和80%時(shí),薄膜的表面顆粒最為均勻、致密,此時(shí)綜合光電性能最佳,平均透光率為81.8%,方塊電阻為6.3Ω/sq,品質(zhì)因子為2.16×10~(-2)Ω~(-1),與超聲振動(dòng)輔助激光退火處理單層FTO薄膜相比,其導(dǎo)電性顯著提升,但透光性略有降低。3、采用超聲振動(dòng)輔助激光織構(gòu)化處理Ag/FTO薄膜,研究了超聲振動(dòng)對(duì)薄膜表面光柵結(jié)構(gòu)形成的影響。實(shí)驗(yàn)發(fā)現(xiàn),超聲振動(dòng)的引入可使激光激發(fā)的Ag顆粒表面等離子體波作周期性微小變化,從而更易與入射激光發(fā)生干涉,同時(shí)可使激光輻照區(qū)域的薄膜材料分布得更為均勻,確保形成完整、規(guī)則且均勻的光柵結(jié)構(gòu)。結(jié)果表明,在0.6 J/cm~2的激光能量密度下,薄膜的平均透光率為85.5%,方塊電阻為6.4Ω/sq,品質(zhì)因子為3.26×10~(-2)Ω~(-1),與超聲振動(dòng)輔助激光退火處理Ag/FTO薄膜相比,綜合光電性能提升顯著。
[Abstract]:Fluorine-doped tin dioxide (FTO) transparent conductive thin films have the advantages of non-toxic, easy to be etched by laser, anti-acid and alkali-resistant, and can be used in a wide range of applications. With the rapid development of optoelectronic device industry, the demand for high performance and low cost thin film materials is increasing gradually. Therefore, many researchers have proposed the method of laser irradiation to improve the film performance to meet the practical application needs. The current researches on laser irradiation mainly focus on the selection of laser types and optimization of laser parameters, but there are few reports on improving the performance of thin films by ultrasonic vibration assisted laser treatment of FTO. In this paper, ultrasonic vibration is introduced in the process of laser irradiation on FTO based thin films, and the effect of coupling of ultrasonic vibration and laser irradiation on the films is studied. Significant results were obtained. 1. The effects of laser energy density and vibration power on the structure, morphology and properties of FTO thin films were investigated by ultrasonic vibration assisted laser annealing. The mechanism of ultrasonic vibration assisted laser annealing is also discussed. It is found that the ultrasonic vibration during laser annealing can make the film move up and down periodically along the normal direction with the ultrasonic transducer and cause the continuous change of the laser focusing state, which ensures that the film is in the best annealing range. At the same time, the particles in the laser melting region on the film surface can be vibrated and dispersed, which can suppress the cluster phenomenon between the particles, improve the uniformity, density and smoothness of the film surface, and reduce the thickness and surface roughness of the film. The results show that at the laser energy density of 0.6 J / cm ~ (2) and the vibration power of 300 W, the uniformity, density and smoothness of the particles on the surface of the film are the best. The average transmittance at 800 nm is 84.7, the square resistance is 9.0 惟 / sqand the quality factor is 2.11 脳 10 ~ (-2) 惟 ~ (-1). Compared with the untreated FTO film (1.13 脳 10 ~ (-2) 惟 ~ (-1), the Ag layer with different thickness is deposited on the surface of FTO film by DC magnetron sputtering. The effects of Ag layer thickness, spot overlap ratio (sor) and scanning line overlap ratio (LOR) on the structure, morphology and properties of Ag- / FTO thin films were investigated by ultrasonic vibration assisted laser annealing. The results show that when sor and LOR are 90% and 80% respectively, the surface particles of the films are the most uniform and compact at the Ag thickness of 5 nm, and the comprehensive optoelectronic properties are the best. The average transmittance is 81.8, the square resistance is 6.3 惟 / sqand the quality factor is 2.16 脳 10 ~ (-2) 惟 ~ (-1). Compared with the single-layer FTO film treated by ultrasonic vibration assisted laser annealing, its electrical conductivity is significantly improved, but the transmittance is slightly decreased by 0.3. The influence of ultrasonic vibration on the formation of grating structure on the surface of thin film was studied. It is found that the introduction of ultrasonic vibration can make the surface plasma waves of Ag particles excited by laser make periodic small changes, thus it is easier to interfere with the incident laser, and at the same time, the film materials in the region irradiated by laser can be distributed more evenly. Ensure a complete, regular and uniform grating structure. The results show that the average transmittance, square resistance and quality factor are 85.5, 6.4 惟 / sqand 3.26 脳 10 ~ (-2) 惟 ~ (-1) at 0.6 J / cm ~ 2 laser energy density.
【學(xué)位授予單位】：江蘇大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2017
【分類(lèi)號(hào)】：TB383.2

【參考文獻(xiàn)】

相關(guān)期刊論文 前6條

1 王連軍;周蓓瑩;顧士甲;江莞;;硅基氧化物發(fā)光玻璃及其制備技術(shù)研究進(jìn)展[J];無(wú)機(jī)材料學(xué)報(bào);2016年10期

2 Yundan Yu;Zhenlun Song;Hongliang Ge;Guoying Wei;;Preparation of CoP films by ultrasonic electroless deposition at low initial temperature[J];Progress in Natural Science:Materials International;2014年03期

3 陳蔚;劉陽(yáng)橋;羅建強(qiáng);靳喜海;孫靜;高濂;;柔性染料敏化太陽(yáng)能電池TiO_2光陽(yáng)極的制備[J];無(wú)機(jī)材料學(xué)報(bào);2014年06期

4 楊西;楊玉華;;化學(xué)氣相沉積技術(shù)的研究與應(yīng)用進(jìn)展[J];甘肅水利水電技術(shù);2008年03期

5 張忠模;;美國(guó)透明導(dǎo)電薄膜材料研究獲重大進(jìn)展[J];功能材料信息;2005年02期

6 洪新華,李保國(guó);溶膠-凝膠(Sol-Gel)方法的原理與應(yīng)用[J];天津師范大學(xué)學(xué)報(bào)(自然科學(xué)版);2001年01期

相關(guān)博士學(xué)位論文 前3條

1 黃立靜;金屬?gòu)?fù)合雙層/多層透明導(dǎo)電薄膜的制備及其光電性能研究[D];江蘇大學(xué);2015年

2 李保家;FTO透明導(dǎo)電薄膜表面處理及其復(fù)合膜的研究[D];江蘇大學(xué);2012年

3 劉艷雄;超聲波輔助大塑性變形細(xì)化材料晶粒研究[D];武漢理工大學(xué);2012年

相關(guān)碩士學(xué)位論文 前4條

1 肖敏;ZnO/Cu_2ZnSnS_4 P-N結(jié)和ZnS緩沖層的制備和光學(xué)性能研究[D];廣西大學(xué);2014年

2 李珂;磁控濺射制備SnO_2:F薄膜及其透明導(dǎo)電性能研究[D];武漢科技大學(xué);2014年

3 張立志;脈沖激光沉積法制備氟鎵共摻氧化鋅透明導(dǎo)電薄膜及其物性研究[D];東北師范大學(xué);2014年

4 胡雪梅;透明導(dǎo)電氧化物半導(dǎo)體的制備及電學(xué)性質(zhì)研究進(jìn)展[D];東北師范大學(xué);2009年

，

本文編號(hào)：2099395