本文選題：多線切割機(jī) + 張力控制　； 參考：《武漢理工大學(xué)》2013年碩士論文

【摘要】：由于多線切割機(jī)具有效率高、工藝好、成本低的優(yōu)點(diǎn),它已經(jīng)成為半導(dǎo)體材料切割行業(yè)的主導(dǎo)設(shè)備,但是因?yàn)槎嗑€切割機(jī)的制造難度較大,國產(chǎn)設(shè)備的控制技術(shù)還不完善,其核心技術(shù)長期被外國的極少數(shù)公司所壟斷,國內(nèi)市場(chǎng)的多線切割機(jī)還主要依靠進(jìn)口,嚴(yán)重制約了我國半導(dǎo)體照明、光伏、集成電路制造等產(chǎn)業(yè)的發(fā)展。因此為了打破國外對(duì)我國高精度多線切割機(jī)技術(shù)和設(shè)備的壟斷,開發(fā)具有自主知識(shí)產(chǎn)權(quán)的多線切割技術(shù)及裝備,提高控制精度已成為增強(qiáng)我國高精度設(shè)備全球競(jìng)爭(zhēng)力的關(guān)鍵舉措。 張力控制技術(shù)是多線切割設(shè)備控制技術(shù)中最為關(guān)鍵之處,要想使我國多線切割設(shè)備向高速、高精度方向發(fā)展,張力控制技術(shù)就必須大幅度提高。由于大型機(jī)電張力設(shè)備結(jié)構(gòu)復(fù)雜、影響因素眾多,在不同工況下系統(tǒng)參數(shù)存在著較強(qiáng)的藕合性、非線性、時(shí)變性和不確定性；在基礎(chǔ)理論、檢測(cè)技術(shù)和控制策略等方面都還有許多問題尚需解決,因此,對(duì)多線切割機(jī)的張力控制系統(tǒng)進(jìn)行研究成為工程技術(shù)人員急需解決的重大研究課題之一。 本文分析了張力控制原理、方法和策略,建立了以PLC可編程控制器為主控單元,以交流數(shù)字伺服電機(jī)為執(zhí)行元件,采用其轉(zhuǎn)矩控制方式,以張力傳感器為反饋元件的閉環(huán)張力控制方案。還對(duì)張力系統(tǒng)組成進(jìn)行深入分析研究,對(duì)主要元件的參數(shù)的選取進(jìn)行了分析,建立了系統(tǒng)的數(shù)學(xué)模型,進(jìn)而獲得系統(tǒng)的傳遞函數(shù)。使用MATLAB的M文件編程方式和Simulink工具箱對(duì)系統(tǒng)進(jìn)行仿真分析。 考慮到引起多線切割機(jī)走線系統(tǒng)穩(wěn)定性各種不確定因素,指出多線切割機(jī)張力系統(tǒng)是一個(gè)非線性、時(shí)變、多輸出的復(fù)雜系統(tǒng)。針對(duì)張力控制系統(tǒng)的工作特點(diǎn),采用兩種控制算法：第一,積分分離的PID控制,并對(duì)參數(shù)進(jìn)行整定,以達(dá)到良好的控制效果；第二,模糊PID控制,結(jié)合常規(guī)PID控制和模糊控制,綜合兩者優(yōu)點(diǎn),既消除了常規(guī)模糊控制器的穩(wěn)態(tài)誤差,又具有模糊控制器動(dòng)態(tài)性能好的特點(diǎn),同時(shí)改善了PID控制器適應(yīng)能力差的缺點(diǎn),大大提高了控制系統(tǒng)的動(dòng)靜態(tài)特性和穩(wěn)定性。 除此以外,本文還對(duì)系統(tǒng)的軟件進(jìn)行設(shè)計(jì)分析,主要包括確定采樣頻率,設(shè)計(jì)數(shù)據(jù)采集和數(shù)字濾波,動(dòng)態(tài)數(shù)據(jù)存儲(chǔ),斷線報(bào)警以及兩種控制方法PLC的實(shí)現(xiàn)。在多線切割設(shè)備上進(jìn)行實(shí)驗(yàn)數(shù)據(jù)采集,并完成張力的標(biāo)定以及系統(tǒng)的動(dòng)態(tài)性的分析。
[Abstract]:Because of the advantages of high efficiency, good technology and low cost, multi-wire cutting machine has become the leading equipment in semiconductor material cutting industry. However, because of the difficulty of manufacturing multi-wire cutting machine, the control technology of domestic equipment is not perfect.Its core technology has been monopolized by a few foreign companies for a long time, and the multi-line cutting machines in domestic market mainly rely on imports, which seriously restricts the development of semiconductor lighting, photovoltaic, integrated circuit manufacturing and other industries in China.Therefore, in order to break the monopoly of foreign countries on the technology and equipment of high-precision multi-wire cutting machines in China, we have developed multi-wire cutting technology and equipment with independent intellectual property rights.Improving control accuracy has become a key measure to enhance the global competitiveness of high precision equipment in China.Tension control technology is the most important part of multi-wire cutting equipment control technology. In order to make the multi-wire cutting equipment develop to high speed and high precision, the tension control technology must be greatly improved.Because the structure of large electromechanical tension equipment is complex and the influence factors are numerous, the system parameters have strong coupling, nonlinear, time-varying and uncertainty under different working conditions.There are still many problems to be solved in detection technology and control strategy. Therefore, the research on tension control system of multi-wire cutting machine has become one of the most important research topics for engineers and technicians.In this paper, the principle, method and strategy of tension control are analyzed. The PLC programmable controller is used as the main control unit, and the AC digital servo motor is used as the actuator, and its torque control mode is adopted.A closed loop tension control scheme with tension sensor as feedback element.The composition of the tension system is analyzed, the parameters of the main components are selected, the mathematical model of the system is established, and the transfer function of the system is obtained.Using MATLAB M file programming mode and Simulink toolbox to simulate and analyze the system.Considering all kinds of uncertain factors causing the stability of multi-wire cutting machine running system, it is pointed out that the tension system of multi-wire cutter is a nonlinear, time-varying and multi-output complex system.According to the working characteristics of tension control system, two control algorithms are adopted: first, PID control with integral separation, and setting parameters to achieve good control effect; second, fuzzy PID control, combined with conventional PID control and fuzzy control,Combining the advantages of the two methods, the steady-state error of the conventional fuzzy controller is eliminated, and the dynamic performance of the fuzzy controller is good. At the same time, the disadvantage of the poor adaptability of the PID controller is improved.The dynamic and static characteristics and stability of the control system are greatly improved.In addition, the software of the system is designed and analyzed, including the determination of sampling frequency, the design of data acquisition and digital filtering, dynamic data storage, disconnection alarm and the realization of two control methods, PLC.The experimental data are collected on the multi-wire cutting equipment, and the tension calibration and the dynamic analysis of the system are completed.
【學(xué)位授予單位】：武漢理工大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2013
【分類號(hào)】：TN305;TP273

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