本文選題：微光學 + 微光學元件��； 參考：《南京航空航天大學》2014年博士論文

【摘要】：自然界中昆蟲的復眼,例如蒼蠅的眼睛,是天然存在的多孔徑曲面光學探測系統(tǒng),也是天然存在的實時圖像分析和處理系統(tǒng),具有視場大、重量輕、體積小、對運動物體敏感等特點,是研究者們制作微光電傳感器、微光電探測器、微光電成像系統(tǒng)的極佳模型,因此對昆蟲復眼的結(jié)構(gòu)、功能等進行仿生也引起了眾多科學家、軍事學家、醫(yī)學家的興趣。因目前仿生復眼多采用微透鏡陣列、曲面小孔陣列等獨立元件進行高精度耦合得到,為了能進一步減小復眼光電系統(tǒng)的體積,降低耦合難度,本文提出了微透鏡、晶錐和波導一體化的仿生光學復眼的物理模型,并圍繞其光學性質(zhì)、制作工藝及應用展開了一定的研究工作。首先本文提出了一體化仿生光學復眼的物理模型,建立了微透鏡、晶錐和波導一體化的仿生光學小眼的物理結(jié)構(gòu),提出使用光線矩陣方法對一體化仿生復眼的光學性質(zhì)進行分析,經(jīng)過詳細的推導,得到其光線矩陣及主要基點參數(shù)。一體化仿生光學小眼的光線矩陣、基點等與圓柱形波導的長度有緊密聯(lián)系。不同的圓柱形波導長度導致了實像方焦點和虛像方焦點。使用光線追跡的方法對一體化仿生小眼和光學復眼進行了追跡模擬。然后本文采用時域有限差分方法對非線性光學聚合物中的自聚焦效應進行了模擬,證實了在非線性光學聚合物中利用自聚焦效應自寫入晶錐、波導一體化仿生小眼結(jié)構(gòu)的可能性�；跀�(shù)字掩模光刻系統(tǒng)的特點,提出使用FDTD方法對具有衍射面型的非線性聚合物光學薄膜的自聚焦效應進行了模擬與分析,因此本文對表面為平面,不帶任何微結(jié)構(gòu)、表面帶有微透鏡微結(jié)構(gòu)、表面帶有按底面半徑均勻量化衍射面型微結(jié)構(gòu)以及表面帶有按矢高均勻量化衍射面型微結(jié)構(gòu)共四種面型的薄膜進行了模擬。模擬結(jié)果表明:由折射率升高引起的自聚焦效應可以用來在非線性光學聚合物薄膜內(nèi)寫入波導結(jié)構(gòu);表面帶有微透鏡微結(jié)構(gòu)和表面按矢高高階均勻量化衍射面型微結(jié)構(gòu)的非線性光學聚合物薄膜在與敏感波長相互作用時,自寫入波導結(jié)構(gòu)的效果與一體化仿生光學小眼的物理模型最為接近。本文詳細給出了制作一體化仿生光學復眼的工藝流程,其中的光刻工藝分別采用了傳統(tǒng)鉻掩模版和數(shù)字掩模技術(shù)進行。提出采用具有一定曲率半徑的基底作為支撐,制作曲面一體化仿生光學復眼,這種方法增加了曲面復眼所在曲面的曲率半徑的確定性,降低了制作曲面仿生光學復眼的難度。對制作出的仿生復眼的三維形貌和光學性質(zhì)做了測試與分析。使用傅里葉光學方法得到一體化仿生光學小眼的點擴展函數(shù)的數(shù)學表達式,且實驗測試與模擬兩者的結(jié)果相符。本文最后討論了一體化仿生光學復眼在與其他光電器件集成中的應用。對一體化仿生光學復眼在與圖像傳感器集成方面進行了分析,另外對一體化仿生光學復眼在耦合半導體激光器與II光纖的應用做了討論,結(jié)果表明,當一體化仿生光學復眼的圓柱形波導長度在一定范圍內(nèi)變化時,對耦合效率有一定的影響。
[Abstract]:In nature, the compound eye of insects, such as the eye of the fly, is a natural multi aperture surface optical detection system. It is also a natural real-time image analysis and processing system. It has the characteristics of large field of view, light weight, small volume and sensitive to moving objects. It is the researchers making micro optical sensors, microphotodetectors, microphotoelectrical imaging. A good model of the system, so the bionics of the structure and function of the compound eye of insects has also aroused the interest of many scientists, militarists and physicians. Because of the high precision coupling of independent components such as microlens array and surface small aperture array, the volume of the compound eye optoelectronic system can be further reduced. In this paper, the physical model of microlens, crystal cone and waveguide integrated bionic optical compound eye is proposed, and a certain research work has been carried out on its optical properties, fabrication technology and application. Firstly, the physical model of integrated bionic optical compound eye is put forward, and the bionic optics of microlens, crystal cone and waveguide integration is built. The optical properties of the integrated bionic compound eye are analyzed by the ray matrix method, and the light matrix and the main base point parameters are obtained through detailed deduction. The light matrix and the base point of the integrated bionic optical small eye are closely related to the length of the cylindrical waveguide. The length guide of different cylindrical waveguides is different. In this paper, the autofocus effect in nonlinear optical polymers is simulated by using the finite difference time domain method, and the autofocus effect in non linear optical polymers is confirmed by using the finite difference time domain method. The possibility of integrating the crystal cone and the waveguide integrated biomimetic microstructure. Based on the characteristics of the digital mask photolithography system, the FDTD method is used to simulate and analyze the self focusing effect of the nonlinear polymer optical thin film with the diffraction pattern. Therefore, the surface is plane, without any microstructures, with microlens microjunction on the surface. The surface has a uniform quantization of the diffractive surface microstructures with the radius of the bottom surface and the surface with a total of four types of surfaces, which are uniformly quantized by the vector. The simulation results show that the self focusing effect caused by the rise of the refractive index can be used to write the waveguide structure in the nonlinear optical polymer film; A nonlinear optical polymer film with microlens microstructures and a high order of high order on the surface of the diffractive facet is the most close to the physical model of an integrated bionic optical eye when interacting with the sensitive wavelengths. The effect of the self written waveguide structure is close to the physical model of an integrated bionic optical eye. In the process, the photolithography process in which the traditional chrome mask and digital mask technology are used respectively. Using the base of a certain radius of curvature as the support, the surface integrated bionic optical compound eye is made. This method increases the determination of the curvature radius of the surface of the compound surface, and reduces the bionic optical compound eye of the surface. The three-dimensional morphology and optical properties of the bionic compound eye are tested and analyzed. The mathematical expression of the point spread function of the integrated bionic optical eye is obtained by Fourier optics, and the experimental test is in agreement with the simulation results. Finally, the integrated bionic optical compound eye is discussed with other optoelectronic eyes. The integration of the integrated bionic optical compound with the image sensor is analyzed. In addition, the application of the integrated bionic optical compound in the coupled semiconductor laser and II fiber is discussed. The results show that when the length of the circular cylindrical waveguide of the integrated bionic optical compound eye changes in a certain range, it is shown that the optical compound eye of the integrated bionic optical compound eye is changed in a certain range. The coupling efficiency has a certain influence.
【學位授予單位】：南京航空航天大學
【學位級別】：博士
【學位授予年份】：2014
【分類號】：R318.18

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