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高反射率精密測量技術(shù)研究

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【摘要】:光腔衰蕩技術(shù)是一種基于高精細(xì)度光學(xué)諧振腔的高精度、高靈敏度光學(xué)檢測技術(shù)。自上世紀(jì)70年代以來,經(jīng)過多年發(fā)展,該技術(shù)已經(jīng)在多個研究領(lǐng)域體現(xiàn)了重要作用,尤其是對于高反射率測量而言,是目前唯一能精密測量高反射率的方法。本論文著眼于光腔衰蕩高反射率測量技術(shù)的工程化和儀器化,針對光腔衰蕩時間常數(shù)提取和衰蕩腔調(diào)節(jié)這兩大問題,進(jìn)行了相關(guān)研究。本文分析了理想高斯噪聲條件下的光腔衰蕩時間常數(shù)提取問題,對典型提取算法進(jìn)行了理論分析和性能對比。著重關(guān)注了提取精度、提取準(zhǔn)確度和運(yùn)算量這三方面的性能。理論分析和對比表明,非線性最小二乘方法具有最好的提取精度和準(zhǔn)確度,但是運(yùn)算量開銷較大,提取光腔衰蕩時間常數(shù)的耗時較長。為了進(jìn)一步提升衰蕩時間常數(shù)的提取效率,對加權(quán)線性最小二乘算法進(jìn)行了改進(jìn),提出一種數(shù)據(jù)點(diǎn)篩選方法,實(shí)現(xiàn)了高精度、快速同時誤差較小的衰蕩時間提取。同時,探究了一種基于空間濾波平滑技術(shù)的信號預(yù)處理方法,改善了低信噪比信號的提取效果。本文進(jìn)一步考慮了光腔衰蕩系統(tǒng)對衰蕩信號的調(diào)制作用,分析了幾種典型調(diào)制因素對衰蕩時間提取的影響,比如系統(tǒng)上升時間、系統(tǒng)背景噪聲以及數(shù)據(jù)采集卡的采樣分辨率。系統(tǒng)上升時間將造成額外的衰蕩時間提取誤差,因此其調(diào)制影響最為明顯。理論推導(dǎo)發(fā)現(xiàn),加權(quán)線性最小二乘擬合算法的擬合偏差與系統(tǒng)上升時間偏移項(xiàng)造成的偏差在一定條件下能夠相互抵消,由此可以實(shí)現(xiàn)了高精度和高準(zhǔn)確度的衰蕩時間提取。另外,實(shí)際系統(tǒng)背景噪聲的分布形式十分復(fù)雜,其中包含高斯噪聲,也包含一定比重的泊松噪聲。針對不同分布形式的背景噪聲進(jìn)行了仿真分析,發(fā)現(xiàn)系統(tǒng)背景噪聲分布形式對衰蕩時間提取影響不大,只要保證信噪比,那么衰蕩時間的提取結(jié)果在不同噪聲背景下都基本一致。數(shù)據(jù)采集卡的采樣分辨率對信號分析有一定的影響,不過當(dāng)數(shù)據(jù)采集卡采樣深度在10bit以上時,影響在可承受范圍內(nèi)。在衰蕩腔調(diào)節(jié)方面,本文分析了腔參數(shù)失調(diào)導(dǎo)致的模式耦合,并利用角譜傳播理論分析了模式耦合導(dǎo)致的多橫模運(yùn)行對測量的影響。結(jié)果發(fā)現(xiàn)多橫模狀態(tài)和基橫模狀態(tài)的損耗在同一量級且差異較小,因此我們得出結(jié)論:多橫模運(yùn)行對腔損耗的測量影響有限。不過,腔參數(shù)失調(diào)仍會改變腔損耗大小,所以精密調(diào)腔十分必要。于是對現(xiàn)有調(diào)腔評價方法進(jìn)行了介紹和簡要討論,主要介紹了腔透射信號峰值、腔透射脈沖波形包絡(luò)和透射光相位延遲這3種調(diào)腔評價方法,尤其考慮了這些調(diào)腔方法的工程化適用性。對適于儀器化和自動化的調(diào)腔評價標(biāo)準(zhǔn)進(jìn)行了探究,對腔結(jié)構(gòu)優(yōu)化進(jìn)行了簡單考慮,提出一種基于平凹穩(wěn)定腔的腔結(jié)構(gòu)方案。本文著重分析了光腔衰蕩時間常數(shù)的提取,并初步探究了衰蕩腔調(diào)節(jié)問題,對于光腔衰蕩高反射率測量技術(shù)的工程化和儀器化具有指導(dǎo)意義,對于光腔衰蕩技術(shù)在其它領(lǐng)域的應(yīng)用也具備一定的參考作用。
[Abstract]:Cavity ring-down technology is a high-precision, high-sensitivity optical detection technology based on high-precision optical resonator. Since the 1970s, after years of development, this technology has played an important role in a number of research areas, especially for high-reflectivity measurement, is the only accurate method to measure high-reflectivity. This paper focuses on the engineering and instrumentalization of cavity ring-down high reflectivity measurement technology, and studies the extraction of cavity ring-down time constant and the adjustment of cavity ring-down time constant. The theoretical analysis and comparison show that the nonlinear least squares method has the best extraction accuracy and accuracy, but the computational cost is large, and the time-consuming of extracting the cavity ring-down time constant is longer. The extraction efficiency is improved by the weighted linear least squares algorithm, and a data point selection method is proposed to achieve high precision, fast and small error of the extraction of the decay time. At the same time, a signal pre-processing method based on spatial filtering and smoothing technology is explored to improve the low signal-to-noise ratio signal extraction effect. Considering the modulation effect of the cavity ring-down system on the ring-down signal, the influence of several typical modulation factors on the extraction of the ring-down time is analyzed, such as the rise time of the system, the background noise of the system and the sampling resolution of the data acquisition card. Theoretical deduction shows that the deviation caused by the fitting deviation of the weighted linear least squares fitting algorithm and the system rise time offset term can cancel each other under certain conditions, thus realizing the extraction of high precision and high accuracy of the ring down time. Noise also contains a certain proportion of Poisson noise. The simulation analysis of different distribution of background noise shows that the distribution of system background noise has little effect on the extraction of ring-down time. As long as the signal-to-noise ratio is guaranteed, the extraction results of ring-down time are basically the same in different noise background. Resolution has a certain influence on signal analysis, but when the sampling depth of the data acquisition card is above 10 bit, the influence is within the acceptable range. In the regulation of ring-down cavity, the mode coupling caused by cavity parameter misalignment is analyzed, and the influence of mode coupling caused by multi-transverse mode operation on measurement is analyzed by using angular spectrum propagation theory. Now the loss of multi-transverse mode and base transverse mode is the same order of magnitude and the difference is small, so we come to the conclusion that the influence of multi-transverse mode operation on cavity loss measurement is limited. However, the cavity parameter misalignment will still change the cavity loss, so it is necessary to adjust the cavity precisely. Three evaluation methods of cavity tuning are introduced, including peak value of cavity transmission signal, envelope of cavity transmission pulse and phase delay of transmitted light. Especially, the engineering applicability of these methods is considered. In this paper, the extraction of cavity ring-down time constant is emphatically analyzed, and the adjustment of cavity ring-down is preliminarily explored. It is of guiding significance for the engineering and instrumentalization of cavity ring-down high reflectivity measurement technology, and also has certain reference value for the application of cavity ring-down technology in other fields.
【學(xué)位授予單位】:中國科學(xué)院研究生院(光電技術(shù)研究所)
【學(xué)位級別】:博士
【學(xué)位授予年份】:2016
【分類號】:TP274

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