本文選題：氧化銦 + 水熱法��； 參考：《太原理工大學(xué)》2017年碩士論文

【摘要】：氧化銦(In_2O_3)作為一種禁帶寬度為3.55-3.75 eV的n型半導(dǎo)體金屬氧化物材料,由于其具有較好的催化活性、較高的電導(dǎo)率和較寬的禁帶寬度,作為氣敏材料被廣泛應(yīng)用于氣體傳感器領(lǐng)域。近年來,研究發(fā)現(xiàn)通過摻雜改性可有效提高In_2O_3氣體傳感器的氣敏性能。本文采用水熱法制備了In_2O_3微結(jié)構(gòu),通過摻雜貴金屬、金屬氧化物來研究In_2O_3氣體傳感器的氣敏性能。利用XRD、SEM、EDS、TEM和XPS對合成的樣品的晶體結(jié)構(gòu)、微觀形貌、元素組成及價態(tài)進行表征分析。同時,對制備的In_2O_3氣體傳感器進行了氣敏特性測試,實驗結(jié)果表明:(1)采用水熱法合成In_2O_3空心微球結(jié)構(gòu),表征結(jié)果表明制備的In_2O_3為立方體型結(jié)構(gòu)。氣敏特性實驗結(jié)果表明:在最佳工作溫度(300℃)下,傳感器對100 ppm異丙醇的氣敏響應(yīng)達到10.3,響應(yīng)恢復(fù)分別時間為2 s/7 s,最低檢測極限僅為500 ppb;(2)制備出了不同濃度(0 mol%,1 mol%,3 mol%和5 mol%)Au摻雜花狀I(lǐng)n_2O_3微結(jié)構(gòu),分析結(jié)果證明Au摻雜的引入對In_2O_3微結(jié)構(gòu)的形貌沒有影響。氣敏特性實驗結(jié)果顯示,Au摻雜In_2O_3不但降低了傳感器的最佳工作溫度(250℃),而且提高了傳感器的響應(yīng)。尤其,3 mol%Au摻雜In_2O_3氣體傳感器對100 ppm丙酮的最大氣敏響應(yīng)可達23.1;(3)合成了純的和不同濃度(1 mol%,3 mol%和5 mol%)Mo摻雜花狀I(lǐng)n_2O_3結(jié)構(gòu);研究了傳感器對乙醇的氣敏特性。氣敏實驗表明,在最佳工作溫度(185℃)下,3 mol%Mo摻雜In_2O_3傳感器(Mo3In)對100 ppm乙醇的響應(yīng)可達7,是純In_2O_3氣體傳感器(Mo0In)響應(yīng)的1.8倍。同時,Mo摻雜的引入也有效的改善了傳感器的響應(yīng)恢復(fù)時間、選擇性、穩(wěn)定性等性能。同時,本文對傳感器的氣敏機理也進行了討論于分析,貴金屬(Au)摻雜不但可以增大材料的電導(dǎo)率,而且又能起到催化作用,改善傳感器的氣敏性能;普通金屬氧化物的引入,可形成異質(zhì)結(jié)結(jié)構(gòu),拓寬耗盡層的寬度,有效的提高元件的氣敏特性。
[Abstract]:As an n-type semiconductor metal oxide material with a band gap of 3.55-3.75eV, Inn _ 2O _ 3) has been widely used in gas sensors because of its good catalytic activity, high conductivity and wide band gap. In recent years, it has been found that doping modification can effectively improve the gas sensitivity of In_2O_3 gas sensors. In this paper, In_2O_3 microstructures were prepared by hydrothermal method. The gas-sensing properties of In_2O_3 gas sensors were studied by doping precious metals and metal oxides. The crystal structure, microstructure, elemental composition and valence state of the synthesized samples were characterized by TEM and XPS. At the same time, the gas sensing characteristics of the prepared In_2O_3 gas sensor were tested. The experimental results show that the In_2O_3 hollow microspheres were synthesized by hydrothermal method. The characterization results show that the prepared In_2O_3 is cubic. The experimental results of gas sensitivity show that the optimum operating temperature is 300 鈩，

本文編號：1818492