本文關(guān)鍵詞： 三維角度誤差測量 軸錐鏡 莫爾條紋 無衍射光 圖像處理　出處：《湖北工業(yè)大學(xué)》2017年碩士論文　論文類型：學(xué)位論文

【摘要】：隨著現(xiàn)代工業(yè)的發(fā)展,各行業(yè)對于零件加工精度的要求越來越高,而測量工作臺在加工過程中的運(yùn)動誤差(包括直線度誤差和角度誤差)是保證加工精度的重要環(huán)節(jié)。本文利用無衍射光中心光斑能量集中、強(qiáng)度分布在傳輸過程中不隨距離改變等特性,再結(jié)合莫爾條紋對微小位移的高敏感性研究了一種針對單軸工作臺三維角度運(yùn)動誤差的測量方法。主要研究內(nèi)容如下:首先,在無衍射光及其干涉理論的基礎(chǔ)上,對無衍射光莫爾條紋的形成機(jī)理和特性進(jìn)行了分析。根據(jù)菲涅爾衍射公式,得到軸錐鏡后的光強(qiáng)分布,再結(jié)合干涉理論,得出了兩束無衍射光疊加產(chǎn)生莫爾條紋的數(shù)學(xué)模型,并給出了莫爾條紋數(shù)目與光斑中心距離的關(guān)系。將其與普通光柵莫爾條紋進(jìn)行了對比,說明無衍射光莫爾條紋能精確檢測微小誤差。其次,設(shè)計了誤差測量光路,并利用空間矢量運(yùn)算法則推導(dǎo)了誤差測量公式。測量光路采用雙CCD對比的檢測方法,對不同位置處CCD接收到的無衍射光斑,通過對光斑中心位置的變化量進(jìn)行比較和計算,最終得到三維角度誤差(俯仰角、偏擺角、滾轉(zhuǎn)角),并用ZEMAX軟件對光路進(jìn)行了仿真,得到的結(jié)果與理論推導(dǎo)的結(jié)果一致,證實(shí)了理論模型的合理性。第三,根據(jù)推導(dǎo)出的無衍射光莫爾條紋模型,設(shè)計了相應(yīng)的圖像處理方法以提取莫爾條紋信息。對采集到含有背景噪聲的無衍射光莫爾條紋,采用圖像增強(qiáng)手段提高圖像對比度,通過選擇合適的低通濾波器對無衍射光圖像中的高頻噪聲信號加以消除,再經(jīng)過二值化和平滑處理,使莫爾條紋的輪廓清晰,然后采用坐標(biāo)變換,將莫爾圖像轉(zhuǎn)換到極坐標(biāo)域,根據(jù)莫爾條紋在一周內(nèi)的突變特性,利用多次間隔掃描法對條紋數(shù)目進(jìn)行計數(shù)。最后,利用精密角度運(yùn)動臺對測量系統(tǒng)進(jìn)行了驗(yàn)證實(shí)驗(yàn),通過誤差測量公式和圖像處理算法計算出了最終結(jié)果,在1°范圍內(nèi)的測量誤差不超過0.05°。實(shí)驗(yàn)結(jié)果表明本文提出的方法能準(zhǔn)確測量三維角度誤差。
[Abstract]:With the development of modern industry, the requirement of parts machining precision is more and more high. The motion error (including straightness error and angle error) of the measuring table in the machining process is an important link to ensure the machining accuracy. In this paper, the energy concentration of the spot in the center of the non-diffractive light is used. The intensity distribution does not change with distance during transmission. Combined with the high sensitivity of moire fringes to the small displacement, a measurement method for the three-dimensional angular motion error of the single-axis worktable is studied. The main contents are as follows: first. On the basis of non-diffractive light and its interference theory, the formation mechanism and characteristics of moire fringe of non-diffractive light are analyzed. According to Fresnel diffraction formula, the intensity distribution behind axial cone mirror is obtained, and then the interference theory is combined. The mathematical model of producing moire fringes by superposition of two nondiffractive beams is obtained, and the relationship between the number of moire fringes and the distance between the center of the spot is given, which is compared with that of ordinary grating moire fringes. It shows that non-diffractive light moire fringes can accurately detect small errors. Secondly, an error measuring optical path is designed. The error measurement formula is derived by using the space vector algorithm. The measurement path uses the double CCD contrast detection method to detect the non-diffractive spot received by the CCD at different positions. Through the comparison and calculation of the center position of the spot, the three-dimensional angle error (pitch angle, deflection angle, roll angle) is obtained. The optical path is simulated with ZEMAX software. The obtained results are consistent with the theoretical results, which confirm the rationality of the theoretical model. Thirdly, according to the derivation of the non-diffractive light moire fringe model. The corresponding image processing method is designed to extract the moire fringe information. The image contrast is improved by image enhancement for the non-diffractive moire fringe with background noise. By selecting the appropriate low-pass filter to eliminate the high-frequency noise signal in the non-diffractive light image, the contour of moire fringe is made clear by binary and smooth processing, and then coordinate transformation is adopted. The moire images are converted to polar coordinates and the number of moire fringes is counted by multiple interval scanning method according to the abrupt change of moire fringes within one week. The precision angular motion table is used to verify the measurement system, and the final results are calculated by error measurement formula and image processing algorithm. The measurement error in the range of 1 擄is not more than 0.05 擄. The experimental results show that the proposed method can accurately measure the three-dimensional angle error.
【學(xué)位授予單位】：湖北工業(yè)大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2017
【分類號】：TP391.41;O436

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