本文關鍵詞：TOF-SIMS數(shù)據(jù)采集系統(tǒng)的研制　出處：《吉林大學》2017年碩士論文　論文類型：學位論文

  更多相關文章： TOF-SIMS 數(shù)據(jù)采集系統(tǒng) FPGA 時間數(shù)字轉換 PCIE總線

【摘要】：飛行時間二次離子質譜(TOF-SIMS)結合了二次離子質譜(SIMS)和飛行時間質量分析器(TOF)的技術特點,是一種無需對樣品進行化學處理、對樣品近乎無損、分析速度快、質量范圍寬、質量分辨率好的表面分析技術。目前TOF-SIMS儀器已廣泛應用于生命科學、材料科學、地質學和宇宙科學等領域。數(shù)據(jù)采集系統(tǒng)是TOF-SIMS儀器的重要組成部分,獲取TOF-SIMS離子檢測器輸出信號時間信息并形成TOF-SIMS質譜圖,完成樣品質譜分析。根據(jù)“同位素地質學專用TOF-SIMS科學儀器”項目對數(shù)據(jù)采集系統(tǒng)的需求,結合TOF-SIMS儀器特點及離子檢測器的信號特征,完成了TOF-SIMS數(shù)據(jù)采集系統(tǒng)的總體方案設計,并確定了時間測量范圍大于340微秒、時間分辨率小于60納秒、與上位機實際數(shù)據(jù)傳輸速度大于200兆字節(jié)每秒等性能指標。TOF-SIMS數(shù)據(jù)采集系統(tǒng)采用時間數(shù)字轉換技術,硬件部分主要由定時甄別與電平轉換模塊、時間數(shù)字轉換模塊以及PCIE接口模塊構成,通過基于FPGA的控制器為各模塊提供控制時序,數(shù)據(jù)采集系統(tǒng)通過PCIE接口與上位機PCIE總線相連。TOF-SIMS數(shù)據(jù)采集系統(tǒng)通過定時甄別器獲取離子檢測器信號的時間信息并輸出標準脈沖,利用時間數(shù)字轉換技術計算出二次離子在飛行時間質量分析器中的飛行時間,通過FPGA控制PCIE接口將離子飛行時間數(shù)據(jù)傳輸至上位機。TOF-SIMS數(shù)據(jù)采集系統(tǒng)的上位機驅動采用WDM驅動模型,在Matlab環(huán)境下進行數(shù)據(jù)處理,并形成橫軸為離子飛行時間、縱軸為各飛行時間的離子計數(shù)的TOF-SIMS質譜圖,質譜圖顯示于Matlab GUI界面中。通過測試TOF-SIMS數(shù)據(jù)采集系統(tǒng)的時間測量范圍、時間分辨率、數(shù)據(jù)傳輸速度等系統(tǒng)性能指標,驗證系統(tǒng)滿足設計要求。最終將TOF-SIMS數(shù)據(jù)采集系統(tǒng)應用于同位素地質學專用TOF-SIMS儀器中,通過TOF-SIMS質譜圖對鋯石樣品進行簡單的質譜分析。
[Abstract]:Time of flight secondary ion mass spectrometry (TOF-SIMS) combines the technical features of the secondary ion mass spectrometer (SIMS) and the time of flight mass analyzer (TOF). It is a kind of sample without chemical treatment, nearly non-destructive to the sample, fast analysis speed and wide quality range. Surface analysis technology with good quality resolution. At present, TOF-SIMS instrument has been widely used in life science and material science. Data acquisition system is an important part of TOF-SIMS instruments. The TOF-SIMS ion detector outputs signal time information and forms a TOF-SIMS mass spectrogram. Complete the sample mass spectrometry analysis. According to the "Isotope Geology Special TOF-SIMS Scientific instrument" project, the data acquisition system is required. Combined with the characteristics of TOF-SIMS instrument and the signal characteristics of ion detector, the overall scheme design of TOF-SIMS data acquisition system is completed, and the time measurement range is determined to be more than 340 microseconds. The time resolution is less than 60 nanoseconds. The TOF-Sims data acquisition system adopts time-digital conversion technology, and the actual data transmission speed is more than 200 megabytes per second. The hardware is mainly composed of timing discrimination and level conversion module, time-digital conversion module and PCIE interface module, through the controller based on FPGA to provide control timing for each module. The data acquisition system is connected with the host computer PCIE bus through the PCIE interface. The TOF-Sims data acquisition system acquires the time information of the ion detector signal and outputs the standard pulse through the timing discriminator. The time of flight of secondary ions in time-of-flight mass analyzer is calculated by time-digital conversion technique. Through the PCIE interface controlled by FPGA, the ion-time-of-flight data is transmitted to the upper computer. TOF-Sims data acquisition system is driven by the WDM driver model. The data were processed in Matlab environment, and the TOF-SIMS mass spectrogram was formed in which the transverse axis was the ion flight time and the longitudinal axis was the ion count of each time of flight. The mass spectrogram is displayed in the Matlab GUI interface. The time measurement range, time resolution, data transmission speed and other system performance indexes of TOF-SIMS data acquisition system are tested. Finally, the TOF-SIMS data acquisition system is applied to the special TOF-SIMS instrument for isotope geology. Zircon samples were analyzed by TOF-SIMS mass spectrometry.
【學位授予單位】：吉林大學
【學位級別】：碩士
【學位授予年份】：2017
【分類號】：TP274.2

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本文編號：1432913