發(fā)布時(shí)間：2018-01-12 13:20

  本文關(guān)鍵詞：金屬微納結(jié)構(gòu)及其柔性光子、電子器件研究　出處：《東南大學(xué)》2016年博士論文　論文類型：學(xué)位論文

  更多相關(guān)文章： 金屬微納結(jié)構(gòu) 表面等離激元 柔性光子器件 柔性電子器件

【摘要】：微納結(jié)構(gòu)作為微納光子、電子器件的基礎(chǔ)組成部分,是目前微納米技術(shù)中的前沿和熱點(diǎn)。通過將各種性能迥異的材料在微納米的跨尺度范圍內(nèi)組合,能夠形成具有多層次,多維度的微納功能結(jié)構(gòu)。這些結(jié)構(gòu)特有的微觀形態(tài)和材料具有的微觀性能一起賦予了微納結(jié)構(gòu)獨(dú)特的光學(xué)、電學(xué)特性。其中,光與金屬微納結(jié)構(gòu)相互作用可產(chǎn)生表面等離激元,能夠?qū)崿F(xiàn)新概念的光傳輸、光局域和光加熱。同時(shí),金屬微納結(jié)構(gòu)在納米尺度表現(xiàn)出獨(dú)特的小尺寸效應(yīng):其熔點(diǎn)及燒結(jié)溫度均顯著降低,可在接近室溫的溫度下形成良好的電連接;具有良好的柔韌性,為實(shí)現(xiàn)新型柔性光子、電子功能器件提供新途徑。這些新穎特性使得金屬微納結(jié)構(gòu)及其柔性器件的研究具有重要的科學(xué)意義和應(yīng)用價(jià)值。本論文的研究目的在于探索金屬微納結(jié)構(gòu)中包含的表面等離極化激元傳輸特性、局域表面等離激元光熱效應(yīng)、小尺寸效應(yīng)等新特性和新效應(yīng)。同時(shí),利用上述新穎效應(yīng)調(diào)控金屬微納結(jié)構(gòu)自身形貌及光、電學(xué)特性,探索新型金屬微納結(jié)構(gòu)的制備方法,進(jìn)而實(shí)現(xiàn)基于新概念、新結(jié)構(gòu)、新工藝的光子、電子柔性功能器件。本論文首先介紹了金屬微納結(jié)構(gòu)的基本效應(yīng),概述了微納結(jié)構(gòu)在制備技術(shù)和柔性集成技術(shù)等方面的發(fā)展情況。然后著重介紹了論文在金屬微納結(jié)構(gòu)光學(xué)、電學(xué)、機(jī)械性能的變化規(guī)律、調(diào)控機(jī)理等方面的理論和實(shí)驗(yàn)研究工作,同時(shí)介紹了在金屬微納結(jié)構(gòu)的柔性集成方法以及柔性光子、電子器件應(yīng)用等方面的探索研究工作。具體研究工作包括以下幾個(gè)方面:(1)首先研究了表面等離激元的基本原理,包括可傳輸?shù)谋砻娴入x極化激元和局域表面等離激元兩部分�；诒砻娴入x極化激元的傳輸特性提出了具有不對(duì)稱包層折射率的楔形金屬納米波導(dǎo)結(jié)構(gòu),發(fā)現(xiàn)楔形兩側(cè)不對(duì)稱折射率的引入可減小模式尺寸,增加傳播距離�；诰钟虮砻娴入x激元及其光熱效應(yīng),探索了銀納米球及銀納米板結(jié)構(gòu)的近場(chǎng)耦合作用。其中,基于銀納米板的結(jié)構(gòu)相比銀納米球具有更顯著的近場(chǎng)增強(qiáng)及光熱效應(yīng),可形成高度局域的可調(diào)諧納米熱源。上述研究為后續(xù)章節(jié)提供了理論基礎(chǔ)。(2)提出了兩種柔性光傳輸結(jié)構(gòu),即基于聚合物多層復(fù)合襯底的柔性光波導(dǎo)結(jié)構(gòu),以及基于超薄金屬薄膜及聚合物波導(dǎo)的混合表面等離激元結(jié)構(gòu)。提出了聚合物多層復(fù)合襯底柔性光波導(dǎo)結(jié)構(gòu),研究了聚合物多層復(fù)合襯底的光學(xué)、機(jī)械特性,實(shí)現(xiàn)了加速度傳感器靈敏度的調(diào)節(jié)。在此基礎(chǔ)上將超薄金屬薄膜引入柔性光波導(dǎo)結(jié)構(gòu),發(fā)現(xiàn)了表面等離極化激元的單偏振特性可抑制聚合物矩形波導(dǎo)結(jié)構(gòu)中面外彎曲損耗,并可保持良好的單偏振特性,實(shí)現(xiàn)了能夠在小彎曲半徑下工作的柔性波導(dǎo)偏振器。上述研究為實(shí)現(xiàn)高性能的柔性光子器件提供了理論與實(shí)驗(yàn)基礎(chǔ)。(3)針對(duì)低維金屬納米結(jié)構(gòu)的局域表面等離激元共振、光熱效應(yīng)和小尺寸效應(yīng)展開研究,并應(yīng)用于柔性電子器件。研究了這些新穎效應(yīng)對(duì)納米結(jié)構(gòu)的組成、形貌、電學(xué)、機(jī)械等特性的影響,揭示了其內(nèi)在的物理機(jī)制。發(fā)現(xiàn)銀納米板層疊結(jié)構(gòu)可成倍提高電子封裝的剪切強(qiáng)度。發(fā)現(xiàn)銀納米板層疊結(jié)構(gòu)具有各向異性電導(dǎo)率特性。對(duì)將"熔點(diǎn)降低"效應(yīng)與表面等離激元光熱效應(yīng)結(jié)合的納米尺度局域燒結(jié)展開研究,并提出一種基于針管直寫-光熱燒結(jié)的柔性電子器件制備方法,可在表面特性復(fù)雜的紙質(zhì)襯底上制備具有優(yōu)良彎曲特性的柔性電極。在此基礎(chǔ)上提出并展示了具有優(yōu)異彎折特性的新概念紙基觸摸傳感器,并建立了觸摸傳感的理論模型。(4)針對(duì)二維金屬/石墨烯納米復(fù)合結(jié)構(gòu)的原位光還原制備技術(shù)及其在紙基柔性超級(jí)電容方面的應(yīng)用開展研究。提出了利用激光直寫技術(shù)將二維金納米結(jié)構(gòu)薄膜引入還原氧化石墨烯(rGO)薄膜,實(shí)現(xiàn)具有rGO/Au二維復(fù)合結(jié)構(gòu)的原位光還原制備。系統(tǒng)研究了氧化石墨烯/氯酸金(GO/HAuCl4)的光還原過程,包括rGO/Au納米復(fù)合結(jié)構(gòu)的形貌、組成等特性,揭示了氯酸金與GO光還原的內(nèi)在機(jī)制。發(fā)現(xiàn)了 rGO/Au二維復(fù)合結(jié)構(gòu)具有極高的電導(dǎo)率,并論證了 rGO/Au微納薄膜高電導(dǎo)率形成的內(nèi)在機(jī)理;發(fā)現(xiàn)了飛秒激光還原可形成的多孔rGO。利用rGO/Au納米薄膜結(jié)構(gòu)的高電導(dǎo)率特性,實(shí)現(xiàn)了具有低等效串聯(lián)電阻、高倍率性能、高頻率響應(yīng)的柔性共面微型超級(jí)電容。提出了基于多層結(jié)構(gòu)的柔性共面微型超級(jí)電容,實(shí)現(xiàn)了微型超級(jí)電容面電容的倍增。
[Abstract]:The micro nano structure as micro nano photonic devices, electronic components, micro nanotechnology is currently in the forefront and hot. Through the combination of various properties of different materials in micro nano scale in the cross, to form a multi-level, multi dimension function of micro nano structure. With these unique properties of micro structure the micro morphology and the material together gives the micro nano optical structure, unique electrical properties. Among them, light and metal micro nano structure interaction can produce surface plasmons, optical transmission can realize the new concept of light and light, local heating. At the same time, the metal micro nano structure on the nanometer scale showed a small size effect unique: the melting point and the sintering temperature decreased significantly, can form a good electrical connection at near room temperature; has good flexibility, in order to realize the new flexible photon electronic devices to provide a new way. Study on these novel features make the metal micro nano structure and flexible device has important scientific significance and application value. The purpose of this study is to explore the metal micro nano structure contains the surface plasmon polarization transmission characteristics, localized surface plasmon photothermal effect, small size effect, new features and new effects. At the same time, the new regulation effect of metal micro nano structure morphology and optical, electrical properties, exploring a new type of metal micro nano structure preparation method, and based on the new concept, new structure, new photonic technology, flexible electronic functional devices. This paper firstly introduces the basic effect of metal micro nano structure, overview the development of micro nano structure preparation technology and flexible integration technology etc. in the system. Then introduced the metal micro nano structure of optical, electrical and mechanical properties change rule, regulation mechanism Theoretical and experimental research work and other aspects, and introduces the flexible integration method in metal micro nano structure and flexible photonic, study on electronic device applications. The specific work includes the following aspects: (1) firstly studies the basic principle of surface plasmon polaritons, including transmission surface etc. from the polariton and localized surface plasmon two. Surface plasmon polariton propagation is presented with asymmetric refractive index of the cladding of metal nano wedge waveguide structure based on introducing the wedge asymmetry index model can reduce the size and increase of the propagation distance. The localized surface plasmon and photothermal based on the effect, explore the near-field coupling effects of silver nanospheres and nano silver plate structure. The structure of silver nano plate based on silver nanospheres compared with near field photothermal enhancement and more significant Effect, can form a highly localized tunable nano heat source. The study provides a theoretical basis for the following parts. (2) proposed two kinds of flexible optical transmission structure, namely a flexible optical waveguide structure based on multilayer polymer composite substrate, and based on the ultra-thin metal film and polymer waveguide hybrid plasmonic structure is proposed. The polymer multilayer composite substrate flexible optical waveguide structure of optical polymer multilayer composite substrate, mechanical properties, the adjustment of the sensitivity of the sensor. On the basis of ultra-thin metal film using the flexible optical waveguide structure, surface plasmon polariton single polarization element can inhibit the polymer in a rectangular waveguide structure out of plane bending loss found, and can keep the good characteristics of the single polarization, realize flexible waveguide polarizer can work in small bending radius. The research for the realization of high To provide a theoretical and experimental foundation for flexible photonic device performance. (3) for the low dimensional metal nanoparticles localized surface plasmon resonance, study the photothermal effect and small size effect, and applied to a flexible electronic device. Research on these novel effects of nano structure composition, morphology, electrical and mechanical effects other characteristics, reveals its inherent physical mechanism. Silver nano plate laminated structure can improve the shear strength of electronic packaging. Double silver nano laminated structure is found in anisotropic conductivity. The "lower melting point" of nano scale local sintering effect and surface plasmon with photothermal effect, and a needle direct writing - flexible electronic device for thermal sintering preparation method, in the paper the substrate surface characteristics of complex on the flexible electrode preparation has excellent bending properties. On the basis of Propose and demonstrate a new concept paper base has excellent bending properties of the touch sensor, and established the theoretical model of touch sensing. (4) for the two-dimensional metal / graphene nano composite structure in situ photoreduction application of preparation technology and on paper based flexible super capacitor is studied. The proposed direct writing technology two dimensional gold nanostructure film using reduced graphene oxide (rGO) thin film by laser, in situ with rGO/Au two-dimensional composites prepared by photoreduction. Study on graphene oxide / chlorate gold (GO/HAuCl4) light reduction process, the morphology of rGO/Au nano composite package structure, composition and other characteristics, reveals the chlorate gold GO and the intrinsic mechanism of light reduction. It is found that the two-dimensional rGO/Au composite structure has high conductivity, the intrinsic mechanism of the rGO/Au micro nano thin film with high conductivity formation and demonstration; the femtosecond laser could be also found RGO. with high conductivity of porous rGO/Au nanometer thin film structure is formed, can achieve a low equivalent series resistance, high rate performance, high frequency response of the flexible micro coplanar super capacitor is proposed. The multilayer structure of flexible micro coplanar super capacitor based on the double micro super capacitor capacitor.

【學(xué)位授予單位】：東南大學(xué)
【學(xué)位級(jí)別】：博士
【學(xué)位授予年份】：2016
【分類號(hào)】：TN25;TP212;TM53

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