本文選題：交疊成像技術(shù) + 表面微觀輪廓��； 參考：《南京理工大學》2017年碩士論文

【摘要】：交疊成像技術(shù)(ptychography)具有典型的無透鏡成像特點,其成像系統(tǒng)結(jié)構(gòu)簡單,并且具有成像范圍可擴展,成像分辨率高等優(yōu)點。本文圍繞交疊成像技術(shù)展開表面微觀輪廓檢測研究,提出了一種基于交疊成像技術(shù)的表面微觀輪廓檢測方法。從交疊成像技術(shù)的基本原理出發(fā),通過數(shù)理分析論證了采集多幅交疊相干衍射圖可以實現(xiàn)相位恢復的正確性�？偨Y(jié)了交疊成像技術(shù)的特征與發(fā)展歷程,掌握 ePIE 算法(extended ptychographic iterative engine),為利用交疊成像的表面微觀輪廓檢測研究奠定理論基礎(chǔ)�；诖郎y物的表面微觀輪廓對入射照明光的調(diào)制作用,設(shè)計一個改進的交疊成像系統(tǒng),利用可變光闌與透鏡的組合方式控制照明光場,便于滿足不同檢測需求。模擬仿真了臺階高度與噪聲對純相位臺階板復原結(jié)果的影響,結(jié)果表明對于相位臺階板檢測的臺階高度不能超過1.5λ,相干衍射圖的隨機噪聲低于5%時復原質(zhì)量較高。光學實驗中選取計算全息板(CGH)為樣品,通過照明光場的改變實現(xiàn)了表面微觀輪廓的檢測與相位臺階特征尺寸的提取。利用精確度較高的白光干涉輪廓儀檢測CGH,將基于交疊成像技術(shù)的表面微觀輪廓檢測結(jié)果與之比較,臺階高度的誤差小于30nm,驗證了本文提出的檢測系統(tǒng)有著較高的檢測精度及可靠性。針對交疊成像技術(shù)中掃描位移誤差問題,本文引入一種位置誤差校正模擬退火算法,仿真與實驗表明該算法可以提高復原結(jié)果的分辨率,位置誤差可降低到亞像素級別。
[Abstract]:Overlapping imaging technology (ptychography) has the advantages of typical lensless imaging, simple structure and high imaging resolution. This paper focuses on the research of surface micro-contour detection based on overlapping imaging technology, and proposes a surface micro-contour detection method based on overlapping imaging technology. Based on the basic principle of overlapping imaging technology, the correctness of phase recovery by collecting multiple overlapping coherent diffraction patterns is proved by mathematical analysis. In this paper, the characteristics and development of overlapping imaging technology are summarized. Grasping the EPI algorithm (extended ptychographic iterative engine), lays a theoretical foundation for the research of surface micro-contour detection using overlapping imaging. Based on the modulating effect of the microscopic profile of the surface of the object under test on the incident illumination, an improved overlapping imaging system is designed. The illumination field is controlled by the combination of the variable aperture and the lens, which is convenient to meet the different detection requirements. The effect of step height and noise on the restoration results of pure phase step plate is simulated. The results show that the step height detected by phase step plate can not exceed 1.5 位, and the recovery quality is higher when the random noise of coherent diffraction pattern is lower than 5. In the optical experiment, the CGH is selected as the sample, and the detection of the surface microscopic profile and the extraction of the phase step feature size are realized by changing the illumination light field. Using the high-precision white light interferometric profilometer to detect CGH, the surface micro-contour detection results based on overlapping imaging technology are compared. The error of step height is less than 30 nm, which verifies the high accuracy and reliability of the proposed detection system. In order to solve the problem of scanning displacement error in overlapping imaging, a position error correction simulated annealing algorithm is introduced in this paper. Simulation and experiments show that the algorithm can improve the resolution of the restoration results, and the position error can be reduced to sub-pixel level.
【學位授予單位】：南京理工大學
【學位級別】：碩士
【學位授予年份】：2017
【分類號】：O439

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