本文選題：激光波長測量 + 邁克爾遜干涉�。� 參考：《浙江理工大學》2017年碩士論文

【摘要】：長度基準是保證量值準確和實現(xiàn)互換性的基礎,現(xiàn)行長度基準采用光的波長作為長度單位。激光波長作為幾何測量的基準,被廣泛應用于長度、角度、平面度、直線度和垂直度等幾何量的測量,是精密計量、精密機械和微電子工業(yè)領(lǐng)域重要的測量參數(shù)。因此精確地測量波長大小是保證幾何量測量準確性和量值溯源的關(guān)鍵。本文提出了一種基于單頻正交線偏振光的激光波長直接測量方法,在光路中構(gòu)建了兩套邁克爾遜干涉儀,通過壓電陶瓷驅(qū)動器調(diào)制兩套干涉儀的參考鏡,將對未知波長的測量轉(zhuǎn)化為干涉條紋信號整周期計數(shù)和干涉信號相位差的測量。主要研究工作如下:設計了基于單頻正交線偏振光的激光波長測量系統(tǒng)的光路結(jié)構(gòu),并結(jié)合光路結(jié)構(gòu)對測量原理進行了詳細分析;設計了信號預處理電路,用于調(diào)整輸出電壓范圍及改善電路輸出特性;利用級聯(lián)積分梳狀(Cascaded Integral Comb,CIC)數(shù)字濾波算法對信號進行濾波處理,從而改善了信號質(zhì)量;對造成相位差測量誤差的原因進行了分析并進行補償,從而實現(xiàn)了相位差的高精度測量;給出了整周期計數(shù)方法及與小數(shù)計數(shù)整合的方法;利用整周期計數(shù)模塊對參考鏡運動方向進行判斷從而實現(xiàn)了在參考鏡特定的運動方向上對相位差進行測量;利用Visual Basic語言進行了上位機軟件的設計。為驗證本文研制的基于單頻正交線偏振光的激光波長測量系統(tǒng)的有效性,分別進行了以下實驗:(1)相位差檢測及補償實驗,以10°為步長進行相位差檢測補償實驗,補償前相位差測量誤差平均值為2.38°,補償后相位差測量誤差平均值為0.22°。(2)整周期計數(shù)值及與小數(shù)計數(shù)值整合實驗,以5 mm為步長進行了整小數(shù)結(jié)合實驗,整小數(shù)值與理論值差值的絕對值均小于0.5。(3)系統(tǒng)穩(wěn)定性實驗,進行了相位差連續(xù)測量實驗,在三十分鐘內(nèi)相位差變化較小,證明系統(tǒng)穩(wěn)定性良好。(4)測量鏡運動不同距離對波長測量精度影響實驗,分別進行了測量鏡運動100 mm、150 mm、200 mm、250 mm的波長測量實驗。波長測量不確定度分別為1.38×10-6、9.86×10-7、7.80×10-7、5.36×10-7。(5)激光器波長測量應用實驗。測量了ZYGO激光器的波長,波長測量不確定度為5.17×10-7。
[Abstract]:The length reference is the basis to ensure the accuracy and interchangeability. The current length reference uses the wavelength of light as the unit of length. Laser wavelength, as a standard of geometric measurement, is widely used in the measurement of geometric parameters such as length, angle, flatness, straightness and perpendicularity. It is an important measurement parameter in the field of precision metrology, precision machinery and microelectronics industry. Therefore, accurate measurement of wavelength is the key to ensure the accuracy and traceability of geometric measurements. In this paper, a direct measurement method of laser wavelength based on single frequency orthogonal linear polarized light is proposed. Two sets of Michelson interferometers are constructed in the optical path, and two reference mirrors of the interferometer are modulated by piezoelectric ceramic driver. The measurement of unknown wavelength is transformed into the whole period count of interference fringe signal and the measurement of phase difference of interference signal. The main research work is as follows: the optical circuit structure of the laser wavelength measurement system based on single frequency orthogonal line polarized light is designed, and the principle of the measurement is analyzed in detail, and the signal preprocessing circuit is designed. It is used to adjust the output voltage range and improve the output characteristics of the circuit, and the signal quality is improved by using the cascade integral CombCIC digital filter algorithm to filter the signal. The reason of the error of phase difference measurement is analyzed and compensated to realize the high precision measurement of phase difference, the method of integral period counting and the method of integrating with fractional count are given. The whole cycle counting module is used to judge the direction of motion of the reference mirror so as to measure the phase difference in the specific direction of the reference mirror, and the software of upper computer is designed by using Visual basic language. In order to verify the effectiveness of the laser wavelength measurement system based on single frequency orthogonal linear polarization, the following experiments were carried out: (1) the phase difference detection and compensation experiments were carried out with 10 擄step. The average value of phase difference measurement error before compensation is 2.38 擄, and that of phase difference measurement error after compensation is 0.22 擄. (2) the integral period counting value and the numerical integration experiment with decimal count are carried out with 5 mm step size. The absolute value of the difference between the whole value and the theoretical value is less than 0.5. (3) in the system stability experiment, the phase difference is measured continuously, and the change of the phase difference is small in 30 minutes. It is proved that the stability of the system is good. (4) experiment on the influence of different distance of motion of measuring mirror on the accuracy of wavelength measurement is carried out, and the wavelength measurement experiment of 100 mm / 150 mm / 200 mm / 250 mm is carried out respectively. The uncertainty of wavelength measurement is 1.38 脳 10-6, 9.86 脳 10-7, 7.80 脳 10-7 and 5.36 脳 10-7, respectively. (5) the wavelength measurement experiment of laser. The wavelength of ZYGO laser is measured. The uncertainty of wavelength measurement is 5.17 脳 10 ~ (-7).
【學位授予單位】：浙江理工大學
【學位級別】：碩士
【學位授予年份】：2017
【分類號】：TN24

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