本文選題：射頻輝光放電 + 等離子體射流��； 參考：《東華大學(xué)》2017年碩士論文

【摘要】：近年來大氣壓等離子體射流因其設(shè)備成本低廉,在材料處理、生物醫(yī)學(xué)領(lǐng)域、廢水處理等方面都有廣泛應(yīng)用。大氣壓等離子體射流相比于其它等離子體放電形式,具有溫度低、放電裝置簡易、化學(xué)活性強等優(yōu)點。因此成為當前等離子體基礎(chǔ)和應(yīng)用研究領(lǐng)域熱點方向之一。本文提出將脈沖放電射流與射頻放電相結(jié)合,將脈沖放電射流產(chǎn)生的活性粒子引入到射頻放電中,輔助射頻放電過程以及脈沖調(diào)制射頻放電的起輝過程。首先,研究脈沖放電射流對連續(xù)射頻放電的影響,采用在連續(xù)射頻放電中引入高壓脈沖放電,研究這種新型放電形式的電流電壓特性;脈沖放電射流與射頻放電強度的時空分布;放電強度的時間分辨,揭示組合電極結(jié)構(gòu)的放電過程。深入研究射頻放電區(qū)域的放電空間結(jié)構(gòu)時空分布與放電強度時間分辨,確定脈沖放電射流對射頻放電的影響。其次,研究脈沖放電射流對脈沖調(diào)制射頻放電起輝過程的影響。將脈沖放電引入脈沖調(diào)制射頻放電的關(guān)閉階段,通過改變施加脈沖電壓以及與射頻電壓之間的時間間隔,得到四種放電情況下放電空間結(jié)構(gòu)時空演變過程與放電強度時間分辨,揭示脈沖放電射流產(chǎn)生的活性粒子對射頻放電的起輝作用。最后,利用COMSOL進行數(shù)據(jù)模擬,模擬結(jié)果再次驗證了脈沖放電產(chǎn)生各種活性粒子輔助了射頻放電的起輝,而且發(fā)現(xiàn)脈沖放電和射頻放電時間間隔越短,射頻起輝至穩(wěn)定放電之間的時間變短。這提供了一種降低射頻電壓情況下,增強射頻放電強度的大氣壓輝光放電技術(shù)。
[Abstract]:In recent years, atmospheric pressure plasma jet has been widely used in material treatment, biomedical field, wastewater treatment and so on because of its low cost. Compared with other plasma discharge modes, atmospheric pressure plasma jet has the advantages of low temperature, simple discharge device and strong chemical activity. Therefore, it has become one of the hotspots in the research field of plasma foundation and application. In this paper, the pulse discharge jet is combined with the radio frequency discharge, and the active particles generated by the pulse discharge jet are introduced into the radio frequency discharge to assist the radio frequency discharge process and the pulse modulation radio frequency discharge process. Firstly, the influence of pulse discharge jet on continuous RF discharge is studied. The current and voltage characteristics of this new type of discharge are studied by introducing high voltage pulse discharge into continuous RF discharge. The temporal and spatial distribution of the pulse discharge jet and the radio frequency discharge intensity and the time resolution of the discharge intensity reveal the discharge process of the composite electrode structure. The temporal and spatial distribution of the discharge spatial structure and the time resolution of the discharge intensity in the radio frequency discharge region are studied in detail, and the influence of the pulse discharge jet on the radio frequency discharge is determined. Secondly, the effect of pulse discharge jet on the initiation process of pulse modulated RF discharge is studied. The pulse discharge is introduced into the closing stage of pulse modulated radio frequency discharge. By changing the time interval between the applied pulse voltage and the radio frequency voltage, the temporal and spatial evolution process of the discharge spatial structure and the time resolution of the discharge intensity are obtained under the four discharge conditions. The effect of active particles produced by pulsed discharge jet on radiofrequency discharge is revealed. Finally, using COMSOL to simulate the data, the simulation results show that the pulse discharge produces a variety of active particles to aid the radiofrequency discharge, and the shorter the time interval between the pulse discharge and the radio frequency discharge, the shorter the time between the pulse discharge and the radio frequency discharge. The time between radiofrequency initiation and steady discharge becomes shorter. This provides an atmospheric pressure glow discharge technique for increasing RF discharge intensity under the condition of reducing RF voltage.
【學(xué)位授予單位】：東華大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2017
【分類號】：O53

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本文編號：1965472