本文選題：微波微等離子體線性陣列　切入點(diǎn)：微帶諧振器　出處：《華東師范大學(xué)》2017年碩士論文　論文類型：學(xué)位論文

【摘要】：微等離子體是指體積被限制在一個(gè)有限空間內(nèi),氣體放電尺寸一般在毫米或微米級(jí)別的等離子體。由于微等離子體放電尺寸縮小,使得其具有不同于普通等離子體的特性。首先,微等離子體能夠穩(wěn)定的存在于大氣壓下,具有較高的等離子體密度和較好的穩(wěn)定性;其次,微等離子體對(duì)氣體和能量的消耗較低,可降低其使用成本;此外,小尺寸使得微等離子體設(shè)備輕巧、便攜、易于集成。因此微等離子體在納米材料合成、微機(jī)械系統(tǒng)、微化學(xué)分析、光子器件及生物材料加工等領(lǐng)域具有廣泛的應(yīng)用前景。本文基于微帶諧振器陣列,在空氣中,對(duì)微帶諧振器激發(fā)的微波微等離子體線性陣列的特性進(jìn)行多維度的深入探究分析。首先,文章簡(jiǎn)要介紹了微等離子體基本理論、微帶諧振器工作原理和耦合模理論等。其次,在0～20GHz頻率范圍內(nèi)對(duì)微帶諧振器陣列進(jìn)行數(shù)值仿真,并研究陣列放電縫隙上方覆蓋聚四氟乙烯材料對(duì)縫隙處電場(chǎng)強(qiáng)度的影響。最后,通過實(shí)驗(yàn),研究真空度、微波頻率和輸入功率對(duì)微帶諧振器陣列的S參數(shù)、諧振頻率及微波微等離子體線性陣列的激勵(lì)特性、放電強(qiáng)度、放電區(qū)域和發(fā)射光譜等的影響,并估算出實(shí)驗(yàn)中微波微等離子體線性陣列的電子溫度及電子密度。仿真研究表明,在0～20GHz頻率范圍內(nèi),微帶諧振器陣列具有多諧性,除主模 2.45GHz 外,還有 7.3GHz、8.21GHz、10.35GHz、13.94GHz、15.74GHz 和17.95GHz等6個(gè)諧振頻率;當(dāng)在放電縫隙上方覆蓋聚四氟乙烯材料時(shí),陣列各單元縫隙處的場(chǎng)強(qiáng)均勻性明顯改善。實(shí)驗(yàn)研究表明,減小真空度,放電區(qū)域減小,微波微等離子體線性陣列出現(xiàn)斷裂,亮度減弱,微波微等離子體線性陣列的電子溫度和電子密度減小。保持輸入功率不變,在(6.2～45)Torr范圍內(nèi),真空度為17.9Torr時(shí),|S11|有最小值0.274;當(dāng)真空度為6.2Torr時(shí),線性陣列有8個(gè)單元成功激勵(lì),且放電區(qū)域及亮度最大,此時(shí)電子溫度約為0.61eV(7078K),電子密度為7.97*1017cm-3;當(dāng)真空度約為45Torr時(shí),微波微等離子體線性陣列熄滅。保持真空度3.3Torr不變,當(dāng)輸入功率為21.73W時(shí),微波微等離子體線性陣列激勵(lì)起8個(gè)單元;當(dāng)輸入功率為20.4W時(shí),微波微等離子體線性陣列出現(xiàn)斷裂;當(dāng)輸入功率低于18.6W時(shí),微波微等離子體線性陣列全部熄滅。微波微等離子體線性陣列激勵(lì)后,微波微等離子體線性陣列源的諧振頻率由2472MHz分別增大至2487MHz和2495MHz,微波微等離子體線性陣列激勵(lì)的帶寬約為125MHz。
[Abstract]:A microplasma is a plasma whose volume is confined to a finite space and the discharge size of a gas is generally in millimeter or micron. It has different characteristics from ordinary plasma. Firstly, microplasma can exist stably at atmospheric pressure, with higher plasma density and better stability. Microplasmas consume less gas and energy, reducing their cost of use; in addition, small sizes make microplasma devices lightweight, portable and easy to integrate. Therefore, microplasmas are synthesized in nanomaterials, micromachined systems, Microchemical analysis, photonic devices and biomaterial processing have a wide range of applications. In this paper, based on microstrip resonator array, in the air, The characteristics of microwave microplasma linear array excited by microstrip resonator are analyzed in detail. Firstly, the basic theory of microplasma, the working principle of microstrip resonator and coupled mode theory are briefly introduced. The microstrip resonator array is numerically simulated in the frequency range of 0 ~ 20GHz, and the influence of PTFE material on the electric field intensity of the gap is studied. Finally, the vacuum degree is studied by experiments. The effects of microwave frequency and input power on the S parameters, resonant frequency and excitation characteristics, discharge intensity, discharge region and emission spectrum of the microstrip resonator array. The electron temperature and electron density of the microwave microplasma linear array are estimated. The simulation results show that the microstrip resonator array has multi-harmonics in the frequency range of 0 ~ 20 GHz, except for the main mode 2.45 GHz. There are also 6 resonance frequencies of 7.3GHz / 8.21GHz / 10.35GHz / 10.35GHz / 13.94GHz / 15.74GHz and 17.95GHz respectively, and the uniformity of the field strength at the gap of the array is obviously improved when the discharge gap is covered over the gap. The experimental results show that the discharge region decreases when the vacuum degree decreases, and the discharge region decreases when the discharge gap is covered with polytetrafluoroethylene. The microwave microplasma linear array is broken, the brightness is weakened, and the electron temperature and electron density of the microwave microplasma linear array are decreased. When the vacuum degree is 17.9 Torr, S11 has a minimum value of 0.274.When the vacuum degree is 6.2 Torr, the linear array has 8 units excited successfully, and the discharge region and brightness are the highest. The electron temperature is about 0.61eV ~ (1) 7078KN, the electron density is 7.971017cm-3, and the vacuum is about 45Torr. The microwave microplasma linear array is extinguished. The vacuum degree of 3.3Torr is kept unchanged. When the input power is 21.73W, the microwave microplasma linear array is excited by 8 units, and the microwave microplasma linear array breaks when the input power is 20.4 W. When the input power is less than 18.6 W, the microwave microplasma linear array is extinguished. The resonant frequency of microwave microplasma linear array source increases from 2472 MHz to 2487 MHz and 2495 MHz, respectively. The bandwidth of microwave microplasma linear array excitation is about 125 MHz.
【學(xué)位授予單位】：華東師范大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2017
【分類號(hào)】：TN629.1;O53

【參考文獻(xiàn)】

相關(guān)期刊論文 前10條

1 陳康喜;馮國英;鄧國亮;劉彩飛;王德良;;基于發(fā)射光譜及成分分析的激光除漆機(jī)理研究[J];光譜學(xué)與光譜分析;2016年09期

2 何立明;陳高成;趙兵兵;祁文濤;張華磊;蘇建勇;;空氣等離子體射流點(diǎn)火器的光譜特性實(shí)驗(yàn)研究[J];高電壓技術(shù);2015年09期

3 解宏端;孫冰;朱小梅;劉永軍;;大氣壓氬氣微波等離子體參數(shù)的光譜診斷[J];河北大學(xué)學(xué)報(bào)(自然科學(xué)版);2009年03期

4 廖斌;張少君;趙娜;朱守正;;基于微帶環(huán)縫諧振器的小功率微波等離子體源[J];上海交通大學(xué)學(xué)報(bào);2009年03期

5 王新新;;介質(zhì)阻擋放電及其應(yīng)用[J];高電壓技術(shù);2009年01期

6 董麗芳;齊玉妍;趙增超;李永輝;李雪辰;;發(fā)射光譜研究氬氣/空氣混合氣體介質(zhì)阻擋放電能量傳遞過程[J];光譜學(xué)與光譜分析;2008年11期

7 廖斌;張少君;朱守正;;基于微帶環(huán)縫諧振器的2.45GHz小功率微波等離子體源的建模與仿真[J];電子與信息學(xué)報(bào);2007年10期

8 張樹宇;辛煜;寧兆元;梁榮慶;;微等離子體及其應(yīng)用[J];物理;2007年10期

9 李天鳴;閆光緒;郭紹輝;;低溫等離子體放電技術(shù)應(yīng)用研究進(jìn)展[J];石化技術(shù);2007年02期

10 屠昕;陸勝勇;嚴(yán)建華;馬增益;潘新潮;岑可法;CHERON Bruno;;大氣壓直流氬等離子體光譜診斷研究[J];光譜學(xué)與光譜分析;2006年10期

相關(guān)會(huì)議論文 前1條

1 陳文聰;蒲以康;;一種測(cè)量射頻電容耦合等離子體吸收功率的簡(jiǎn)便方法[A];第十五屆全國等離子體科學(xué)技術(shù)會(huì)議會(huì)議摘要集[C];2011年

相關(guān)碩士學(xué)位論文 前1條

1 李春麗;立體螺旋線圈微型ICP激發(fā)源研究[D];河北大學(xué);2009年

，

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